Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization

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Highly Parallel Fabrication of Nanopatterned
Surfaces with Nanoscale Orthogonal
Biofunctionalization Imprint LithographyH. E.
Gaubert and W. Frey, Nanotechnology 18 (2007)
135101

• Devang Parekh
• 3/21/07
• EE235

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Overview

• Motivation
• Fabrication
• Results
• Conclusion

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Motivation

• Nanopatterned surfaces
• Biosensors
• Tissue engineering scaffolds
• Bio-Mems
• Self-assembly techniques
• Pattern parameters
• Pattern defects
• Lack of dual functionality
• E-beam and Ion-beam
• Serial
• Cost prohibitive

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Fabrication

• Step and Flash (SFIL)
• Quartz template
• Bottom Antireflective Coating (BARC)
  planarization layer
• BARC spin-coated 45nm
• Low-viscosity resist
• Photoresist fills template
• Harden PR with UV exposure
• Step

M. Stewart, et. al, J. Microlith., Microfab.,
Microsyst. 4, 011002 (2005)
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Fabrication

• O2 etch residual photoresist
• 2nd O2 etch to transfer pattern to BARC
• Evaporate 3nm of Cr
• Evaporate 17nm of Au
• Lift-off

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Fabrication

• O2 plasma remove residual organics
• Hexadecanethiol (HDT)
• Polyethylene Glycol-silane (PEG-silane)
• Fibronectin
• Human umbilical vein endothelial cells (HUVECs)

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Results

• AFM physico-chemical mapping
• Force is random for untreated
• HDT is hydrophobic
• PEG is less hydrophilic than clean wafer
• nm-resolution of physico-chemical differences

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Results
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Results
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Conclusion

• Soft litho-gtmicro NOBIL-gtnano
• Orthogonal functionalization shown
• Simple and cheap fabrication
• Possible extension to glass or polymer substrates