T'C' Shen, Physics, USU - PowerPoint PPT Presentation
1 / 2
Title:
T'C' Shen, Physics, USU
Description:
... C. Shen, Physics, USU. An epitaxial approach for nanoscale electronics in silicon ... Future applications. Single electron devices. Field-effect transistors ... – PowerPoint PPT presentation
Number of Views:20
Avg rating:3.0/5.0
Title: T'C' Shen, Physics, USU
1
T.-C. Shen, Physics, USU
An epitaxial approach for nanoscale electronics
in silicon
PH3 dose
P delta-layer
Si growth
3D
Si
UHV-H-resist
200 nm
95 nm
Electronics
33 nm
50 nm
Poster P7
2
Why dopant devices?
- Compatible with current CMOS
- All epitaxial
- Low power
- 3D integration
Recommended
CrystalGraphics Presentations
