Tap the Yield Improvement Frontier at the Front End

1
Tap the Yield Improvement Frontier at the Front
End
2
Introduction

• Correlate in-line chamber metrology with gas
  panel testing
• Find problems before they effect process results
• Stop gambling on inadequately tested gas boxes
• Get data driven system-level test and verification

3
Test Integrated Flow Devices

• Great effort downstream of the gas panel
• Gas panel has always lacked test tools

4

• Replace trial error to isolate problematic
  devices
• Individual device servicing may miss underlying
  causes

5
Find and Fix Marginal Failures in Gas Panels

• Calibration labs, aware that 80 of returned
  devices are not actually defective, have long
  recognized that a panel level test and
  verification tool would reduce the number of
  devices needlessly sent out for re-calibration.
  The 20 of devices returned for rework that have
  in fact failed, have done so either completely or
  marginally. Marginal failures are anything less
  than complete failure where a difference between
  indicated and actual measures is exhibited.
  These typically undiagnosed variations between
  actual and indicated measures of flow, pressure,
  and temperature, present a sizeable and untapped
  opportunity to improve process yield. The return
  on investment promises to be considerable,
  especially in contrast to the diminishing returns
  downstream of the gas panel.

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• Some marginally failing devices fail as a result
  of defects in the device itself. Many marginally
  failed devices have no defects, but show symptoms
  manifested by problems elsewhere in the gas panel
  system that are not accurately diagnosed.
  Without effective panel level monitoring and
  verification, many if not most marginal failures,
  while potentially having a negative impact on
  process yield, are not even specifically apparent
  to operators.

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• As a panel level test and verification tool,
  Mobius? improves yield by finding the marginal
  failures the majority of problems in chemical
  delivery systems that can and should be found and
  fixed before their effects show up in process
  results. Mobius? test and verification tools are
  to gas panels in the semiconductor industry what
  MRI machines are in the healthcare. Mobius?
  takes a preemptive (act before failure) rather
  than reactive (after failure) approach. Mobius?
  checks every device in a gas box individually and
  as interrelated parts of the whole system to
  precisely diagnose, identify, and in some cases
  correct, the real causes of failures of any kind,
  complete or marginal. Devices with failures that
  cannot be corrected at the panel level or in situ
  by Mobius? must be returned for re-work.

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• Since actual measures of flow devices integrated
  into panel systems are prone to vary from
  indicated measures, the real-time system-level
  pinpoint accuracy provided by Mobius? is vital to
  overall product performance of process tools and
  therefore to the ultimate objective of ever
  improving process yield.

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Correlate Chamber and Gas Panel Analyses in Fabs
Foundries

• Gas panel test and verification in fabs and
  foundries will make it possible to analytically
  close the loop between the very substantial
  amount of chamber-oriented monitoring and
  analysis and the many root causes of process
  issues and yield improvement opportunities
  resident upstream in the gas panel.
•  

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The System Problem at Panel Level

• For process tools to function properly,
  indicated measures of flow, pressure, and
  temperature
• must be the same as actual measures.
•  
• Within integrated assemblies, actual measures
  may vary from indicated measures because of
• individual device variations, but also because of
  other system effects stemming from
• interconnect interactions.
•  
• Testing devices outside the system verifies
  device performance on a standalone basis only.
•  
• When devices are integrated into a gas panel
  system of plumbing and electrical work, a new set
• Of conditions is created that allows actual
  system variations in pressure, temperature, and
  flow
• to affect actual measures of specific devices,
  even though indicated measures are within spec.
  
•  
• Indicated measures differing from actual
  measures are inaccuracies or marginal failures,
  which
• result in lower yield.

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Seawares Solution

• Seaware has the ability to test and document
  every device individually and the gas panel as a
• system to precisely pinpoint defects.
•  
• Seaware uses the Mobius? platform for automated
  test, measurement, and monitoring of
• process chemistry systems in wafer process tools
  individual and interactive device
• performance and system level operating
  parameters.
•  
• Seaware can configure for all device types,
  device arrangements, communication protocols
• and application specific operations.
•  
• Innovative software and hardware architecture
  allow for ever-changing industry requirements.

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Gas Box Manufacturers

• How thoroughly can you test gas delivery systems?
• Seawares Solution The most comprehensive test
  available
•  
• What is the cost of your test operations?
• Seawares Solution Cost-reducing efficiencies
•  
• How much time is lost on manual operations or
  isolating the cause of detected failures?
• Seawares Solution Diagnostic tools quickly
  identify problem source
•  
• Can you easily integrate new or custom test
  requirements into your test equipment without
• costly downtime or upgrade?
• Seawares Solution Plug play
  hardware/software architecture for rapid
  integration of
• additional test requirements

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Gas Box Manufacturers continued

• How much time is required at customer sites after
  shipment and what is the quality impact
• resulting from incomplete or inaccurate testing?
  Seawares Solution Test system
• Control interface through unit under test
  interconnect for more complete and reliable
  results
•  
• How many different test systems do you currently
  require?
• Seawares Solution Handles all test
  requirements
•  
• How much time is lost in pre-test preparation and
  complex set up because each unit tested
• has something new? Seawares Solution Reduced
  test cycle time
•  
• How much of your facility is dedicated to your
  test equipment and product staging?
• Seawares Solution Reduced space and improved
  product flow
•  
• How much of your testing requires highly
  specialized, costly technicians?
• Seawares Solution Demonstrated cost savings

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OEMs

• How thoroughly can you test gas delivery systems?
• Seawares Solution The most comprehensive test
  available
•  
• How easily can you isolate cause of failure or
  defects?
• Seawares Solution A diagnostic tool to replace
  trial error troubleshooting
•  
• How much time is lost on manual operations or
  isolating the cause of detected
• failures? Seawares Solution Diagnostic tools
  quickly identify problem source

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OEMs - continued

• Can you easily integrate new or custom test
  requirements into your test equipment
• without costly downtime or upgrade?
• Seawares Solution Plug play
  hardware/software architecture for rapid
• integration of additional test requirements
•  
• How much time is required at customer sites after
  shipment and what is the quality
• impact resulting from incomplete or inaccurate
  testing?
• Seawares Solution Test system control
  interface through unit under test
• interconnect for more complete and reliable test
  results

16
Rebuilders

• How thoroughly can you test gas delivery systems?
• Seawares Solution The most comprehensive test
  available
•  
• What is the cost of your test operations?
• Seawares Solution Cost-reducing efficiencies
•  
• How much time is required at customer sites after
  shipment and what is the quality
• impact resulting from incomplete or inaccurate
  testing?
• Seawares Solution Test system control
  interface through unit under test
• interconnect for more complete and reliable test
  results

17
Fabs Foundries

• How easily can you isolate cause of failure or
  defects?
• Seawares Solution A diagnostic tool to replace
  trial error troubleshooting

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• Do you have digital devices in your process tool
  gas panels?
• Digital is our specialty!
• Revolutionizing Test Automation
• Complete testing of gas panels related devices
  digital, analog, vacuum, etc.
• 408-942-5010, Fax [phone]
• www.seawaretech.com
• 875 Ames Avenue
• Milpitas, CA 95035

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The Seaware Choice

• Dear Manufacturer or User of Gas Panels,
•  
• As a manufacturer or user of gas panels, what
  are your choices when it comes to testing?
•  
• 1. Dont test and wait for failures and ongoing
  support costs.
• 2. Test inadequately and wait for failures and
  ongoing support costs.
• 3. Buy the right tester
• Determine requirements and justify the purchase
• Find a supplier of the right tester
• Finance the purchase
• Acquire and install the tester
• Modify other processes and/or adapt the tester to
  its specific use
• Maintain the tester and replace parts
• Replenish printer cartridges and paper
• Train staff to use the tester
• Use the tester
• Upgrade the tester
• Dispose of the tester
• Replace the tester

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Information Requirements for Panel Testing

• Seawares test system is designed to fully test
  any gas box design, including all component
  function and performance and their relative
  influence on the assembly level conformance to
  customer requirements. These tests are performed
  through the respective tool interconnects
  verifying the electrical and pneumatic circuitry.
• Information requirements for panel testing
  (Mobius Test Configuration)
• Gas box specification indicating plumbing
  schematic, component descriptions and any special
  interlock or functional features.
• Electrical control interface connector types and
  pin-outs.
• External pneumatic interface connectors
  (typically between solenoid valve banks and air
  operated valves.
• General gas box test spec indicating test
  requirements and pass / fail criteria.