MST11 Class 10010,000 Cleanroom User Facility

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MST-11 Class 100/10,000 Cleanroom User Facility
http//iiswww.mst.lanl.gov/cleanroom/index.asp (LA
NL internal site, external site in progress)

• Catherine Mombourquette
• 606-1990
• cmombo_at_lanl.gov

Brian Crone 667-0344 bcrone_at_lanl.gov
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Capabilities

• Deposition (RF Sputtering, E-Beam, Oxidation)
• Wet Processing
• Patterning ( Karl Suss MJB3 Mask Aligner)
• Dry Etching (Oxford RIE)
• Thermal Processing (RTP, Tube Furnace)
• Characterization / Analytical (Ellipsometer,
  Profilometer, Probe Station, XRD, XRF, SEM)
• Assembly / Packaging (Wire Bonder, Spot Welder)
• Sample Preparation (Dicing Saw, Ultrasonic
  Cleaner, Plasma Asher)
• additional fee ( contact Fernando Garzon)

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Cost Structure

• Option 1Individual user pass
• Full Facility
  Single Tool
• 
  (Ellips/Dektak)
• Day pass        500Week pass     1000Month
  pass    2000 500
• Year pass       5000 1000
• Option 2
• Group pass
• 50K for the entire group for a year.
• Costs are for LDRD codes, other codes will
  incur appropriate taxes