Cleanrooms

1
Presentation to ESTECH 2005 Tengfang
(Tim) Xu, Ph.D., PE Lawrence Berkeley National
Laboratory
2

• Investigating the Performance of a
  Minienvironment System
• Tengfang (Tim) Xu, Ph.D., PE
• Environmental Energy Technologies Division
• Lawrence Berkeley National Laboratory
• May 3, 2005

3
Investigating the Performance of a
Minienvironment System

• Introduction
• Scope and Objectives
• Case Study Methods
• Results
• Conclusions and Recommendations

4
Introduction

• Minienvironment
• A minienvironment is a localized environment
  created by an enclosure to isolate a product or
  process from the surrounding environment
• Separative Devices

5
Why Minienvironment?

• Minienvironment - Separative Devices
• Gaining wide adoption in various industries
• Knowledge about energy efficiency
• Emerging technologies and strategies to improve
  efficiency

6
Cleanroom Electric Power

Cleanroom Measured Power
7
Cleanroom Contamination Control
8
Efficient Air Systems

• Reduce initial costs
• optimized sizing
• Reduce utility costs while benefiting
  productivity
• Other non-energy benefits
• Energy efficient design can be considered as a
  strategy in the industry to achieve cost savings
  and improve bottom line

9
ISO Standards from IEST

• The Institute of Environmental Sciences and
  Technology (IEST)
• ISO 14644 (1 through 8) Cleanrooms and
  Controlled Environments
• ISO 14698 (1 through 3) Bio-contamination

10
Minienvironment within a Ballroom
(Cleanroom)
11
Background

• Energy information on minienvironments is
  essentially non-existent
• Understand energy efficiency opportunities in
  minienvironments
• Key metrics W/cfm

12
Objectives

• Develop an understanding of the key parameters
  contributing to energy performance of a
  minienvironment
• Quantify energy performance of the
  minienvironment air system and identify
  opportunities for improving its energy
  performance.

13
Approaches

• Literature reviews
• Develop a case study on minienvironment system
  performance
• Collaborate with industry leaders and Sematech
  in research actions

14
Case Study Method

• Minienvironment
• 4 FFUs of 1x2
• Dimensions (2x4x 77)
• Electric Power
• True RMS energy analyzer (3)
• Airflow and Pressure
• electronic micro-manometer (3 of reading plus
  7 fpm)
• Pitot tube (2 of reading 0.25Pa)

15
Case Study Results

• Total fan power vs. Airflow rate

16
Case Study Results

• Power factor vs. Airflow rate

17
Case Study Results

• EPI vs. Airflow rate

18
Case Study Results

• Static pressure vs. Airflow rate

19
Case Study Results

• Pressure difference vs. airflow rate

20
Conclusions

• Measure up with Cleanrooms EPI

21
Recommendations - i

• Improve energy performance of minienvironment
  systems
• Fan-filter Unit
• Airflow path

22
FFU Wide Range of Efficiencies
23
FFU Performance
24
Recommendations ii

• Understand energy implications of minienvironment
  vs. cleanroom through demonstrations
• Electric power usage
• Size of minienvironment
• Cleanliness requirements

25
Recommendations - iii

• Develop demonstration for approach and tools to
  tackle and implement energy efficiency throughout
  planning, construction, installation, design,
  commissioning, OM, re-commissioning, reuse of
  minienvironment and integration with process and
  cleanroom facility

26
Recommendations - iv

• Develop and identify strategies in energy
  efficiency for effective environmental control

27
Interaction with IEST

• Interact with IEST to possibly adopt energy
  efficiency in recommended practice (RP)
  guidelines
• IEST WGs

28
Questions

• TTXU_at_LBL.GOV
• Lawrence Berkeley National Laboratory