Nickel Electroplating

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Nickel Electroplating

• http//www.omgi.com/buprod/nickel_metals_products/
  om8285_nickelhandbook.pdf

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ELECTROPLATING
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What is LIGA?

• LIGA is a three stage process which can be used
  for the manufacture of high aspect ratio, 3-D
  microstructures in a wide variety of materials
  (e.g. metals, polymers, ceramics and glasses).
  The name is derived from the German acronym
  LIthographie, Galvanoformung und Abformung, i.e.
  lithography, electroplating and moulding.
• Irradiating a resist (polymer) is the first step
  in the process. This can be achieved using laser
  light, electron or ion beams or X-rays from a
  synchrotron radiation source, the latter being
  essential for deep structures.
• All the methods use a shadow printing process. In
  the deep X-ray lithographic process a 2-D
  absorber pattern from a mask is transferred into
  the depth of a thick resist by the chemical
  changes induced by a highly collimated beam of
  X-rays. Development of the irradiated areas of
  the resist results in a 3-D replication of the
  pattern and a metallic master mould can then be
  produced by electroplating into the 'free' areas.

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