Nonlinear dynamics of MEMS components

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Non-linear dynamics of MEMS components through
Cosserat theory of elasticity
Paolo BONIFACIO
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1. Modeling MEMS dynamics
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Challenge developing tools to model MEMS
dynamics Existing methods (1) FEM (2)
Parameterized behavioral models Main problem
these are either computationally slow or
oversimplifying
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1) Analytical mass, stiffness matrices and
non-linear terms obtained with MAPLE 2)
Mathematical simplicity, enabling computationally
fast modeling of multibody systems 3) Resulting
non-linear ODEs with lower degrees of freedom 4)
A few rod elements suffice for accurate
predictions
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3. Future developments
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Thank you!
p.bonifacio_at_abdn.ac.uk