Sensor%20R

1
Sensor RD at FNAL

• SIDET Lab A dedicated probe station
• Cold chuck (can set temp and maintain it down to
  10C or below)
• Quadtech LCR meter (bias up to 500V)
• Labview interface
• Dry N2 line (in principle) control humidity
• Dry box to store detectors
• Refrigerator to store irradiated detectors
• Semi-automatic probe station to do wafer probing
  (production)

2
Sensors tested so far

• BNL wafers 2 quarter wafers
• SINTEF wafers (oxygenated and low resistivity)
• Bump bonded detectors and module
• Detectors irradiated at IUCF last week (will be
  probed when we get them back)
• Guard-ring designs
• P-stop- atoll, common
• Excellent yield from SINTEF wafers better than
  90!
• Next normal resistivity SINTEF wafers, ATLAS
  pre-prototype and pre-production wafers

3
Layout of SINTEF wafer

• RED
• FPIX0_SIP 1, 4, 8,10,11
• FPIX0_SCP 2,3,7,12
• FPIX0_SCPEXT 5,6
• GREEN
• FPIX1_SIP A,C,D,F
• FPIX1_SCP B,E,G
• BLUE
• FPIX1_TIP5X1 TILIP

4
ATLAS Prototype 2 wafer

• 1, 5 STlad
• 2,6 Stnod
• 3,4 STsmd
• Use 3,4 and 2 from Cis Wafers.

5
Measurements

• I-V
• C-V
• Effect of temperature, humidity, test signal
  frequency, size
• Different method of biasing, chuck
• Dicing, cleaning

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Detectors
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Function of temperature
9
ATLAS wafers

• Prototype 2
• 2 normal CiS wafers, 1 oxygenated
• 4 normal IRST wafers, 1 oxygenated (not
  delivered)
• Pre-Production
• 6 CiS wafers (oxygenated) not delivered yet
• We have their GDS file and technology file
• Will also get their probing results

10
Software

• CADENCE
• GDS viewer
• Conversion software (can convert files from one
  format to another GDS, CIF, autocad)
• DAVINCI no longer available licence expired
  Jason is investigating to re-install it. May be
  better to use ISE-Tcad?