370 mm

1
Prototypes overview
Global view of the test beam setup
VME/PCI/
ECAL general view
HCAL
2nd structure (21.4mm of W plates)
3rd structure (31.4mm of W plates)
180 mm
BEAM
ECAL
Beam monitoring
Movable table
VFE
370 mm
1st structure (1.4mm of W plates)
370 mm
Silicon wafer
Detector slab
2
Alveolus structures
Design and construction of a mould with all
metallic pieces for the 3 different structures
3
Detector slab
4
Detector schematic description
Amorphous silicon deposition ? Protection ?
Capacitance (AC coupling)
Aluminium sheet
PCB
Wafers
The aluminium sheet is the ground
5

• 4 high resistivity wafers
• 525 microns thick 5K?cm
• tile side 62.0 0.0
• - 0.1 mm
• scribe line 100 ?m
• scribe safety zone 200 ?m
• guard ring width cca 750 ?m
• (cca 1.5 wafer thickness)

ECAL prototype silicon wafer description
Dead zone width is only 1mm
First test production with 25 wafers

• 24 good
• (lt10nA leakage)

Wafer book keeping information