World Leader in ElectroOptical Fire Detection Technology

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Fire Sentry Corporation 2 Stage
Electro-OpticalFire DetectorsforSemiconductor
Wet Benches Prevent Costly Clean Room Fire
Damage and Business Interruptions
World Leader in Electro-Optical Fire Detection
Technology
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Fires Cause Major Losses to Semiconductor Fabs

• Over 1,000 semiconductor fabs worldwide totaling
  1 Trillion US dollars in assetsare at risk due
  to fire in tools constructed of combustible
  materials using flammable solvents and gasses.
• Business disruption losses due to these fires
  can be more costly than property damage.
• In the USA, the average is 2 to 8 weeks
  production downtime resulting in business
  interruption.
• In the USA, property damage costs from fire range
  from 2 million to 60 millionUS dollars.
• Two recent international semiconductor fabs were
  severely damaged due to catastrophic fires
  resulting in 1 Billion US dollars in property
  damages and unrecoverable production downtimes.
• In the USA during 1995, there was one fire loss
  for every 10 insured fabs with an average loss in
  excess of 8 Million US dollars.

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Property Damage and Business Interruptions are
due to

• Fire itself.
• Black smoke caused by the fire.
• Corrosive by-products of smoke caused by fire.

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Fire Hazards

• Wet Benches manufactured from Polypropylene or
  PVC
• Flammable chemicals such as isopropyl alcohol
  (IPA), acetone, etc.
• Flammable gasses, such as Silane and Hydrogen
• Wet Benches and tools manufactured from non-burn
  materials but using flammable gases and chemicals

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Fire Hazards

• Semiconductor tools constructed of plastic
  combustible materials that may present a serious
  fire threat in the clean room are
• 1. Steppers
• 2. Plating benches.
• 3. Spray acid tools.
• 4. Ion Implanters.
• 5. Spray Coaters.
• Cleaning equipment using flammable chemicals such
  as IPA and acetone

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Fire Hazards

• Silane Hydrogen gas cylinder cabinets.
• Valve manifold boxes that regulate flammable
  gasses.
• Outdoor bulk gas storage and distribution areas
  for silane, hydrogen and other flammable gasses
• Central Chemical Supply Systems
• Chemical Storage Areas

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Traditional Fire Detection Apparatus
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Heat-Activated Sprinklers

• Heat-activated sprinklers alone are inadequate to
  prevent extensive damage to wet benches because
  they are slow to react to a fire.
• Once a tool, such as a wet bench, constructed of
  plastic,(i.e., polypropylene, PVC, etc.),
  catches on fire, the fire burns with such
  intensity that heat-activated overhead sprinklers
  CANNOT contain the fire damage. The resulting
  black, corrosive smoke permeates the clean room
  contaminating costly product, processing
  equipment, and the clean room surface
  environment.
• Wet benches have enclosed hidden compartments and
  obstructionswhich typically are not protected by
  sprinklers.
• Overhead sprinklers do not meet the business
  needs of the Semiconductor Industry and the
  Insurance Companies.

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Smoke, Aspirating Smoke, and Heat Detectors

• High air flow in wet benches prevents fast
  detection, therefore the response time is too
  slow for wet bench fire detection.
• By the time smoke or heat detectors do respond,
  the polypropylene is fully burning and releasing
  black smoke into the clean room and it may not
  possible to extinguish the fire.
• Smoke and heat detectors are not sealed in
  leak-proof and corrosion-proof housings, and
  should not be installed inside the plenum and on
  the surface areas of wet benches.

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Electro-Optical Fire Detectors
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Electro-Optical Fire Detectors provideFast
Detection of Wet Bench Fires

• Electro-Optical Fire Detectors with a Two-Stage
  Alarm respond before damaging black, corrosive
  smoke, (from a fully burning polypropylene fire),
  is released and permeates the Clean Room.
• Each detection stage level is based on the
  radiant heat output of the fire, not the time
  period of the fire, which only the Fire
  SentryMulti-Spectral Wide Band IR fire sensing
  technology can provide, (detects over 88 of the
  fires spectral radiant energy).
• A Two-Stage fire response approach avoids costly
  destruction of in-process product while providing
  early warning that a fire exists in the bench.

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Infrared Sensor Wavebands
Near Band Infrared0.7 to 1.1 Microns
0.7
1.1
3.5
4.3
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1st Stage Response - Alert

• Alert condition, (4kw fire), energizes a relay
  for external audibleand visual alarms to notify
  operators of the Fire Early Warning condition.
• Alert provides time for operators to select the
  following actions to deal with the fire
  condition
• 1. Wait to finish the chip production batch if a
  fire is non-threatening and appears to be
  retreating and may self-extinguish on its own.
• 2. Apply a localized suppression agent with a
  portable extinguisher.
• 3. Manually shut off electrical power to the wet
  bench, which potentially could be the ignition
  source.
• 4. Download FirePicTM which records 8 seconds
  of Detector spectral data preceding the fire, to
  enable a postulation of the cause of the fire.

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2nd Stage Response - Alarm

• If the fire still exists and grows to the Factory
  Mutual specified heat level criteria of 13 kW,
  the following occurs
• 1. Energize relays for remote annunciation
  notifying operators of the Fire ALARM
  condition, and signal for suppression
  release.
• 2. Automatically shut off electrical power to
  the wet bench.
• 3. FirePic data stored in the detectors
  non-volatile memory.
• 13kW is the equivalent of a 8 polypropylene
  fire 8 feet from the detector. This level of
  energy will not ignite polypropylene

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Two-Stage Early WarningElectro-Optical Fire
Detection

• May also be used for
• Plating Benches
• Steppers
• Ion Implanters
• Spray Coaters
• Spray Acid Tools
• Gas Cabinets

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FSC Electro-Optical Fire DetectionAdvantages
Benefits

• 1. Wide Band IRTM (0.7 to 3.5 microns) sees
  all hydrocarbon non-hydrocarbon fires, (i.e.,
  polypropylene, IPA, acetone, silane, hydrogen,
  etc.)
• 2. Wide Band IR sees through smoke, gasses,
  fumes, chemical vapors, as well as fire
  suppression agents such as water mist, FM200, and
  CO2, (should the fire re-flash).
• 3. Wide Band IR provides an accurate measure of
  Factory Mutuals 13 kW fire alarm criteria.
• 4. No false alarms which could cause product
  loss and production downtime.
• 5. No Ultraviolet sensors, as UV is easily
  blinded by smoke, acetone, suppression agents,
  etc. UV is susceptible to false alarms.
• 6. Two-Stage response to fire provides an early
  warning that a fire exists.

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FSC Electro-Optical Fire DetectionAdvantages
Benefits

• 7. Solid-state Wide Band Infrared, Near Band
  Infrared and Visible sensors,and digital
  electronics for stability, long-life, and
  reliability.
• 8. Automatic electro-optical test source to
  assure Detector operational readiness at all
  times.
• 9. Wide 120 degree field-of-view
• 10. Built-in temperature compensation using
  temperature transducer software
• 11. Leak-proof, heat-sealed, corrosion-proof
  housing rated for IP67 with corrosion-proof
  cabling, enables the Fire Detectors to be
  installed in plenum areas.
• 12. Ease of Installation using Detector snap
  slide mounting brackets

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FSC Electro-Optical Fire DetectionAdvantages
Benefits

• 13. FirePic stores in detectors non-volatile
  memory Alert and Alarm Fire data for up to six 8
  second fire events.
• 14. User-friendly PC software for monitoring
• a. Graph on a PC screen in real-time what the
  installed Detector sees.
• b. Display and save FirePic Alert and
  Alarm fire data for up to six 8 second fire
  events.
• c. Event Log downloads a Controllers and/or
  Detectors event history.
• d. Documented Certification provides hard-copy
  of system configuration data.
• 15. Proven track record with large installed
  user base worldwide.
• 16. FM Approved family of stand alone detectors
  and detector/controller combinations for all
  types of applications.

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Fire Sentry Fire Detectors for Semiconductor
Applications
Wet Benches and Tools

• Model FS7-2173 Fire Detector, used with- Model
  FS7-130-SX Controller (12 Detectors)- Model
  S7-2175 Controller (22 Detectors)- Model FSWB-1
  Wall Mount Controller (7 Detectors)
• Model FS7-2173-2RP Stand Alone Fire Detector with
  Alert, Alarm and Fault relays

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Fire Sentry Controllers

• Model FS7-130-SX Controller (12 Detectors)-
  designed to work with new or existing Fire
  control panels- 4 programmable zones

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Fire Sentry Controllers

• Model S7-2175 Controller (22 Detectors)- 24 hour
  battery back up- Single Zone

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Fire Sentry Controllers

• Model FSWB-1 Wall Mount Controller (7
  Detectors)- 24 hour battery back up- Single
  Zone- Outputs for Suppression Release and
  Annunciators- Inputs for smoke, heat gas
  detection

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Fire Sentry Fire Detectors for Semiconductor
Applications
Silane Gas Cabinets and Silane Bulk Storage

• Model SS4-A UV/IR Fire Detector-
  Explosion-proof- Fire Alarm, Verified Fire
  Alarm Fault Relays- use unitized or with
  CM1-A Wallmount Controller

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FSC Electro-Optical Fire DetectionReview

• Overhead Heat-Activated Sprinklers are too slow.
• Ionization and Photoelectric Smoke Detectors,
  Aspirating Smoke Detection Systems, and Heat
  Detectors are too slow.
• Fire Sentrys Electro-Optical Fire Detectors are
  fast. The fire is caught BEFORE fire damage and
  smoke permeation.
• No false alarms due to Digital Signal Processing
  and Wide Band IR Technology
• Thousands of proven detector operating hours.
  Used by all major semiconductor manufacturers.
  The worldwide industry standard.

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Application and Installationof
Electro-OpticalFire Detectionfor Semiconductor
Wet Benches
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Inverse Square Law
As a fire event is located closer to a Detector,
the Detectors ALARM activationthreshold is
correspondingly reduced by the Inverse Square
Law
13 kW
1.6 kW
0.4 kW
Model FS7-2173
Electro-Optical
Fire Detector
8ft
7ft
6ft
5ft
3ft
2ft
4ft
1ft
Distance
FS7-2173 Fire Detector will ALARM to a 13 kW fire
at 8 ft, which is the equivalent of a 1.6 kW
fire at 2 ft or a 0.4 kW fire at 1 ft
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Potential Fire Ignition Sources

• Heaters
• Transformers
• Terminal Blocks
• Power Cable Connections
• Static Electricity
• Chemical Reactions
• Flammable liquids in Plastic Heated Modules

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Fire Control Panel Actions

• Audible and Visual Warnings via Horn/Strobe
  mounted on Wet Bench or in immediate area
• Wet Bench Electrical Shutdown, in ALARM response,
  via Power Control Module, (Emergency Off)
• Notify Facility Alarm System of fire, via Control
  Panel outputs

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Location of Electro-Optical Fire Detectorsin a
typical 34 ft Wet Bench
Head Case
Surface Area detection, includingrobot deck area
across Process Tanks
Plenum Area under Process Tanks
Robot Wafer Load and Unload Area
Equipment Area behind Wet Bench
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Typical location of Fire Detectors, Control
Panel, Manual Pull Station and Horn/Strobe in a
34 ft Wet Bench
FS7-2173 Electro-Optical Fire Detector
Model S7-2175 Control Panel
Horn/Strobe
Headcase
with Model S7-2177-224 hour Battery Back-Up Panel
NoteModel FS7-2173 has a120 Degree Field of
View
FS7-2173 Electro-OpticalFire Detector
Working Surface
Equipment Area
Side View
Manual PullStation
Process Tank
Robot
Area
Plenum
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Fire Detection System Schematic for 34 ftWet
Benches
Emergency Off (EMO)
Alarm Outputto Plant Facilities
FS7-2173Fire Detector
FS7-2173Fire Detector
FS7-2173Fire Detector
Model S7-2178Power Control Module
FS7-2173Fire Detector
Horn/Strobe
ModelS7-2175Control Panel
S7-2179 JB
S7-2179 JB
S7-2179 JB
Up to total of 22FS7-2173 FireDetectors
Manual PullStation
24VDC
FS7-2173Fire Detector
FS7-2173Fire Detector
FS7-2173Fire Detector
Model S7-2177-2Battery Back-UpPanel
120VAC
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Typical location of FS7-2173 Fire Detectors in a
Small Wet Bench - Front View
Headcase
Headcase
Working Surface
Field of View
Field of View
Model FS7-2173Fire Detectors
Plenum
Note Detector has a 120 Degree Field of View
Front View
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Typical location of FS7-2173 Electro-Optical
Fire Detectors in a Small Wet Bench - Side View
FS7-2173Fire Detectors
Note Detector has a 120 DegreeField of View
Field of View
Process
Tank
Plenum
Equipment
Area
FS7-2173Fire Detectors
Side View
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Typical Location and Quantities of FS7-2173 Fire
Detectors in Different Size Wet Benches
No. of FS7-2173 Fire Detectors
8 foot Wet Bench
34 foot Wet Bench
Description of Detector Location
Plenum Areas Underneath the Process Tanks
2
5
Surface Area, including Robot Deck Area across
Process Tanks
1
5
Equipment Area behind Wet Bench
2
5
Robot Load and Unload Areas
N/A
2
Head Case Area
2
1
___________________________
Total
22
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http\\www.Firesentry.com
World Leader in Electro-Optical Fire Detection
Technology