BS EN ISO 146443

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BS EN ISO 14644-3

• Cleanrooms associated controlled environments-
• Part 3
• Metrology and test methods

DIS
2
BS EN ISO 14644-3Metrology Test Methods

• Current Status
• 1. DIS was issued by ISO in September 02
• 2. UK comments to BSI to be made by end December
  02
• 3. LBI/30 will consider all UK comments by end
  January 03
• 4. BSI vote to CEN/ISO by end February 03
• 5. DIS is valid and can be referred to and used
  until it is superseded.
• 6. Likely time when revised DIS will be available
  - mid 2004

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BS EN ISO 14644-3Metrology Test Methods

• 14644-11999 Classification of air cleanliness
• 14644-22000 Specifications for testing and
  monitoring to prove continued compliance with -1
• 14644-3DIS Metrology and test methods
• 14644-42001 Design, construction start-up
• 14644-5FDIS Operations
• 14644-6CD Vocabulary/terminology
• 14644-7FDIS Separative devices
• 14644-8CD Classification of Airborne Molecular
  Contamination

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BS EN ISO 14644-3Metrology Test Methods

• Current Status of BS 5295
• BS 5295 Part 0 General Introduction - Current
• BS 5295 Part 1 Classification - Withdrawn
• BS 5295 Part 2 Design - Withdrawn
• BS 5295 Part 3 Operation - Current
• BS 5295 Part 4 Compliance - Withdrawn

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BS EN ISO 14644-3Metrology Test Methods

• Current Status of BS 5295
• BS 5295 Part 0 General Introduction - Current
• BS 5295 Part 1 Classification - 14644-1/3
• BS 5295 Part 2 Design - 14644-4
• BS 5295 Part 3 Operation - Current
• BS 5295 Part 4 Compliance - 14644-2
• Some of BS5295 Part 1 is not addressed currently
  and PD66092000 is being revised to bridge the
  gap.
• Part 3Operation will be covered by 14644-5FDIS

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BS EN ISO 14644-3Metrology Test Methods

• This part of BS EN ISO 14644 may be used for the
  characterisation of a cleanroom as described and
  specified in other parts of BS EN ISO 14644.
• Not all cleanroom parameter test procedures are
  shown.
• Other standards may be considered to be
  applicable
• The annexes to this document are informative.
  Ie they are not compulsory, but form a
  recommendation for compliance with the
  standard.
• Consequently, throughout the document references
  are made to or as agreed between customer and
  supplier

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BS EN ISO 14644-3Metrology Test Methods

• SUMMARY OF ESSENTIAL CONTENTS
• 1. Scope - ISO standard text and also states
  that alternative methods can be used based on
  agreement between customer and supplier.
• 2. Normative - Reference to standardsReference
• 3. Terms and - Helps understanding,
  andDefinitions allows document to exist alone
• 4. Testing - Recommended tests with procedures
  Procedures and apparatus
• 5. Test Report - Reporting documentation

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BS EN ISO 14644-3Metrology Test Methods

• Item 4 forms the crux of this section of the
  standard.
• Recommended tests are listed in table 1. Each
  test has a procedure in Annex B and a
  corresponding set of apparatus in Annex C. The
  section of the standard referencing the test is
  also given.
• Selecting and scheduling of these tests is
  discussed in Annex A.

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BS EN ISO 14644-3Metrology Test Methods Annex A

• ANNEX A (Informative) Choice of recommended tests
  of an installation and the sequence in which to
  carry them out
• A1 Recommended test procedures
• Choice of tests
• Table A1 Test checklist for installation
  properties
• Table A2 Test checklist for sequencing
• The checklists are useful in that they can be
  taken from the standard and used as a tool.

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BS EN ISO 14644-3Metrology Test Methods Annex
ATest Selection Sequence Checklist

• Choose which tests are required
• Put them in a logical order for your application
• Where not applicable put N/A
• Review the schedule of tests

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B1 Airborne Particle Count (for classification)
• B2 Ultrafine Particle Count (for
  characterisation)
• B3 Macro Particle Count (for characterisation)
• B4 Airflow Test
• B5 Pressure Difference Test
• B6 Installed Filter Leakage Test
• B7 Flow Visualisation
• B8 Airflow Direction Test
• B9 Temperature Test
• B10 Humidity Test
• B11 Electrostatic Ion Generator Test
• B12 Particle Deposition Test
• B13 Recovery Test
• B14 Containment Leak Test

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• Each section comprises items on
• Principle - what and why
• Recommended test procedure - how
• Recommended apparatus - with what
• Test report - detailed results

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B1 Airborne Particle Count (for classification)
• Airborne test for size distributions with
  thresholds between 0.1 and 5 microns to certify
  or verify cleanliness classification

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B2 Ultrafine Particle Count (for
  characterisation)
• Airborne test for particles with size
  distribution thresholds less than 0.1 micron for
  characterisation of the cleanroom

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B3 Macro Particle Count (for characterisation)
• Airborne tests for particles with size
  distribution thresholds greater than 5 microns
  for characterisation of the cleanroom

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B4 Airflow Test
• Tests to evaluate airflow velocity, uniformity of
  airflow velocity and supply air volume depending
  on classification.
• Airflow velocity and uniformity tests are
  described for use principally in unidirectional
  systems.
• Air volume tests are described for
  unidirectional, non unidirectional or supply air
  duct systems.
• NB Political correctness avoids terms such as
  laminar and turbulent flow systems

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B5 Air Pressure Difference Test
• Verification of capability of installation to
  maintain the specified PD between it and its
  surroundings.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B6 Installed Filter Leakage Test
• Particle Counter and Photometer tests are both
  described
• Photometer method for ISO 5 and less (ie
  typically non-unidirectional), and for MPPS
  Filters with penetrations gt 0.005 (H14 and lower
  to BS EN 1822) Acceptance criteria is 0.01 for
  all grades.
• DPC method more sensitive unidirectional systems.
  Evaluation of scan rate and allowable particle
  counts is based on BS EN 1822 part 4 and DIN
  24184.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B6 Installed Filter Leakage Test
• Note error on B6.3.5 formula for scan rate
• Sr lt Cc.Ps.K.Dp.Fs/Np is equivalent to
• Sr 472 Cc.Ps.K.Dp/Np
• Units should be (cm/s)

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B7 Flow Visualisation
• Tests to demonstrate airflow characteristics in
  the installation.
• Techniques described are by thread, tracer
  injection or image processing (CFD)

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B8 Airflow Direction Test
• Tests to demonstrate airflow directional
  characteristics in the installation.
• Techniques described are by thread, tracer
  injection or image processing (CFD)

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B9 Temperature Test
• Tests to demonstrate temperature characteristics
  in the installation.
• Techniques described are for general or more
  exacting measurement requirements.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B10 Humidity Test
• Tests to demonstrate the humidity characteristics
  of the installation using measurements of dew
  point or relative humidity
• Humidity tests should be performed in conjunction
  with the temperature test.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B11 Electrostatic Ion Generator Test
• Tests to evaluate the level of electrostatic
  charge and dissipation rate in the installation.
• Techniques for the measurement of surface voltage
  and resistance as well as ioniser performance are
  suggested

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B12 Particle Deposition Test
• Tests to evaluate the level of particulates that
  can be deposited on work or surfaces in the
  installation.
• Techniques using witness plates or a fall out
  photometer are suggested.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B13 Recovery Test
• Test to evaluate the capability of the clean air
  system to recover from a particle generating
  event principally in non-unidirectional
  applications.

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BS EN ISO 14644-3Metrology Test Methods Annex B

• ANNEX B (Informative) - Test Methods
• B14 Containment Leak Test
• Test to evaluate the intrusion of contaminated
  air from surrounding areas using DPC or
  Photometer methods.

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BS EN ISO 14644-3Metrology Test Methods Annex C

• Annex C (Informative) - Test Instruments
• Describes test apparatus that should be used for
  the corresponding recommended tests in Annex B.
  There is a recommendation that apparatus should
  be subject to agreement between the customer and
  the supplier.
• The information provided is not limiting, it
  represents a sensible minimum requirement. Ie
  Equipment that becomes available through
  improvements in measurement technology are not
  restricted by this Annex.
• Equally alternate equipment may be suitable and
  may be used subject to agreement.

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BS EN ISO 14644-3Metrology Test Methods Annex C

• Annex C (Informative) - Test Instruments -
  example
• C1. Discrete Particle Counter (DPC).
• C2. Condensation Nucleus Counter (CNC).
• C3. Microscope, Cascade Impactor, DPC, Time of
  Flight.
• C4. Anemometers - Thermal, Ultrasonic, Vane,
  Pitot, Hood.
• C5. Manometers - Electronic, Inclined,
  Mechanical.
• C6. Photometer, DPC, Aerosol Generator,
• C7. Anemometers, Tracers, Aerosol generator.
• C8. Anemometers, Tracers, Aerosol generator.
• C9. Liquid in Glass thermometer, Electronic
  thermometer.
• C10. Humidity meters Capacitive, Hair.
• C11. Voltmeter, Ohmmeter, Charged plate monitor.
• C12. Microscope, Fall-out Meter.
• C13. Discrete Particle Counter (DPC).
• C14. Discrete Particle Counter (DPC),
  Photometer, Aerosol Generator.

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BS EN ISO 14644-3Metrology Test Methods

• UK public comments on this section to BSI need
  to be made in written form and in an approved
  format by end December 02 otherwise they will not
  be considered.

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This presentation has been prepared and delivered
by- Wander ter Kuile McLeod Russel UK Ltd c/o
Vokes Ltd Henley Park Guildford Surrey, GU3 2AF UK
tel [phone] fax [phone] e-mail
wander.ter.kuile_at_vokes.com