Porous silicon formation

1
Porous silicon formation

• Name Christopher Frewin
• Level Senior
• Number of Semesters Participated 3
• Date of Submission 12/12/2003
• Advisor Stephen Saddow, Ph.D..
• Department Electrical Engineering

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Porous Silicon

• Applications
• Photoluminescence
• room temperature
• visible spectrum
• Substrate material for
• SiC growth

• Formation
• Method Anodization
• Solution Aqueous HF
• J 20-120-mA/cm2
• t 20-45 minutes

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Anodization Cell

• A. Teflon Cylinder
• filled with HF solution
• B. Cell Cap
• supports Pt cathode
• C. Base
• Gold anode
• D. O-ring
• E. Nylon Screws

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Porous Silicon Experimental Results

• Fig. 1 Mesa or Columnar Fig. 2 Cleaved edge
  view
• type structures 4µm thick

Process conditions 24.6mA/cm2 in HF,ethanol,H20
(112)