Achieving Energy Savings at Fabs by Leveraging SEMI Standards to Implement a Pump 'Idle' State

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Achieving Energy Savings at Fabs by Leveraging
SEMI Standards to Implement a Pump 'Idle' State
Richard GwizdakCanton Control Solutions Thomas
RussellBOC Edwards
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Outline

• Introduction
• Motivation for Pursuing Energy Savings in Pumps
• Ensuing Standardization Process
• Task Force
• E54 Specific Device Model Standard
• Status
• Device High Level Structure
• Specific Device Objects and Attributes
• Specific Device Object Behavior Description
• Summary
• Future Update

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Motivation Typical Energy in a Fab

• SEMATECH energy benchmark
• studies have found that
• Process tools represent 36-40 of a typical
  fabs total energy use
• Facilities systems use about 54-60
• Process pumps are the largest energy users on
  many process tools.
• Cleanroom systems include recirculation air,
  makeup air, and large portion of chilled water

Source 1997, 2000, and 2002 SEMATECH Energy
Research
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Motivation Pumps in Energy Picture

• According to ISMI research projects and surveys
  on tool energy use the typical fab facility uses
• In excess of 10,000 kVA in Process Tool load
• New High Volume Manufacturing Fabs may have 2500
  kVA in Vacuum pumps
• In excess of 8.50M m3/hr of recirculation air and
  corresponding make-up air.
• In excess of 5100 Nm3/hr each of compressed air
  and nitrogen with over 750 kW required for each
  system.
• All of these system requirements may require in
  excess of 250,000,000 kWh per year in electricity.

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Motivation Pump Application Energy

• Process tools use vacuum pumps for load lock,
  transfer chambers, and process chambers.
• Pump energy may average as much as 52 of total
  tool energy.
• Pump duty configuration in a standard FAB is 70
  light and medium duty and 30 harsh duty
• Current installed base of semiconductor vacuum
  pumps is in excess of 150,000 world wide for just
  the top 5 suppliers and consume in excess of
  3x109 kWh per year.
• For this reason, any utility savings in the light
  and medium duty will result in greatest cost
  savings.

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Typical Pump Configuration
Dry Pump
Turbo Pump
Dry Pump
Turbo Pump
Process Chamber 1
Process Chamber 2
Transfer Chamber
Dry Pump
Turbo Pump
Cassette Chamber 2
Cassette Chamber 1
Dry Pump
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Pump Idle Mode Opportunities
Processing Wafers
Waiting Product
Indicates when dry pump is off
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How Much Could Be Saved at a Typical Fab?

• Assuming a 300mm fab with 540 pumps
• Utility Costs Assumed (2004 North American
  example)
• Power 0.057 /kWh
• Water 0.00038 /l
• N2 0.000011 /sl
• Comparison between a fab utilizing iH/iL and the
  new iGX/iH mix
• 70 iGX, 30 iH

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Utilities Cost US 300mm Fab Example
closest competitor
38 saving 500,000 per yr.
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Active Utility Controls Could Gain Even More

• Active Utility Control (AUC) enables a standby
  mode
• Pump is in a reduced state of operation
• Speed slows
• Water and N2 are reduced
• Simple signal from process tool is required
• Signal indicates tool is in a safe standby mode
• Pump is not at process capacities but is idling
• Signal removal brings pump out of standby
• Pump is ready for service in less than 1 minute

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Utilities Cost Including AUC US 300mm Fab Example

• AUC can increase annual saving from 500,000 to
  609,000

Up to 46 saving 609,000 per yr
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Outline

• Introduction
• Motivation for Pursuing Energy Savings in Pumps
• Ensuing Standardization Process
• Task Force
• E54 - Specific Device Model Standard
• Overview
• Status
• Device High Level Structure
• Specific Device Objects and Attributes
• Specific Device Object Behavior Description
• Summary
• Future Update

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Standardization E54 Sensor Bus Standard

• The E-54 Standard provides a mechanism to model
  and standardize on device capabilities
• This standardization is communication-medium
  independent
• This standard is thus an ideal environment to
  standardize on an Idle mode
• and provide a mechanism to verify that an
  incoming device has this capability
• This would be pursued through development of a
  Vacuum Pumps Specific Device Model

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SEMI E54 StandardSensor/Actuator Network
Standard
SAN Interoperability Guideline (Umbrella Document)
Specific Device Models(SDMs)
Network CommunicationStandards (NCSs)
Mass Flow Device
In-Situ Particle Monitor Device
Endpoint Device
Vacuum Pump Device (Under development)
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Standardization The SEMI E-54 Solution

• Components of Standard
• SAN Network Communications Standards (NCSs)
• Cafe Standard (DeviceNet, LonWorks, Profibus,
  Seriplex, Modbus/TCP, SafetyBus p...)
• Common Device Model (CDM)
• One Model
• Specific Device Models
• MFC, Endpoint, ISPM, Vacuum Pump, etc.
• Object Oriented Approach
• Attributes, services and behavior for each object
• NCSs must support object data communication

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Standardization E54 Sensor Bus Standard

• E54 Standard Documentation Layout

Sensor/Actuator Network Specific Device
Models ( Mass Flow Device)
Sensor/Actuator Network Interoperability
Guideline (Umbrella Document)
( Particle Counter)
( Endpoint.)
( Vacuum Pump)
Templates (How to Write NCSs and SDMs)

Sensor/Actuator Network Common Device Model
Object Glossary
Sensor/Actuator Network Network
Communications Standards
( DeviceNet)
(LonWorks)
Technical Notes
(Seriplex)
(Profibus)
( Modbus)
( SafetyBus p)

( Future)
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Standardization Process Steps

• Formalize a Vacuum Pump Task Force
• 10 members
• Report to Sensor Bus Sub-committee
• Focus on existing pump platform requirements from
  participating Task Force OEMs and End Users
• Identify supplier pump specific requirements
  (variables, services, and device behaviors)
• Review other industry standard groups for current
  vacuum pump definitions (ODVA, Profibus, etc)
• Allow flexibility for supplier product
  differentiation and technology evolution
• Maintain independence of the Sensor/Actuator
  Network communication interface
• Drive task force to Consensus

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Task Force Leadership

• Task Force Leaders
• Thomas Russell, BOC Edwards
• Mark Curry, Applied Materials
• Richard Gwizdak, Canton Control Solutions
• Standard Sponsors
• Sematech
• Integrated Measurement Association

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Status

• Last face-to-face meeting Oct 2004 Portland
  Oregon
• Reduce complexity of definition and
  implementation
• Defined Basic Vacuum Pump Device SDM
• Provide for capability to extend SDM
• Mechanical Roughing Vacuum Pump
• Turbo Molecular Vacuum Pump
• Cryogenic Vacuum Pump
• Ballot 3979
• SDM Blue Ballot submitted, February 2005
• SDM Yellow Ballot submitted, April 2005
• Review SDM Yellow Ballot results, July 2005
  (SEMICON West)
• Resbumit SDM Yellow Ballot 3979A, August 2005
• Review SDM Yellow Ballot results, October 2005
  (Portland)

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Common Device Model -Specific Device Object Model

• High Level Object View - Required from CDM

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Vacuum Pump -Specific Device Object Model

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Vacuum Pump Device - SDM Objects

• Common Device Model
• SAC Object
• Defined in Common Device Model and Extended
• Device Manager Object
• Defined in Common Device Model and Extended
• Assembly Object
• Define input/output and configuration
• Actuator Object
• Define common actuation elements

• Specific Device Model
• Sensor AI-VP-SPEED Object
• Maintain and report pump speed value
• Sensor AI-VP-PRES Object
• Report pump pressure value
• Sensor AI-VP-TEMP Object
• Report pump temperature value
• Sensor AI-VP-POWER Object
• Report pump power value
• Sensor AI-VP-Current Object
• Report pump current value
• Sensor AI-VP-Purge Gas Flow
• Report pump purge gas flow value
• Sensor AI-VP-Coolant Gas Flow
• Report pump coolant gas flow value

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SDM Object Modeling Process

• Extending CDM object definitions
• Sensor/Actuator/Controller (SAC) and Device
  Manager (DM) objects
• Extending sensor, actuator, controller hierarchy
  to specific pump objects
• Defining an assembly object for reporting of data

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Extending CDM Object DefinitionsExample
Sensor/Actuator/Controller Object

• Sensor/Actuator/Controller Object - Common Device
  Model

• Optional Attributes
  Services

• Extended Attributes
• Hours To Next routine Maintenance
• Hours To Next Overhaul
• Process Gas Flowing
• Process Cycles To Next Routine Maintenance
• Procees Cycles To Next Overhaul

• Extended Service
• Process Cycles Completed

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Extending CDM Object DefinitionsExample Device
Manager Object

• Device Manager Object - Common Device Model

• Required Attributes
  Services

• Device Type
• Exception Detail Alarm
• Exception Detail Warning
• Extended Attributes
• Idle Mode Capable
• Pump Acces Mode Status

• Extended Service
• Set Pump Access Mode
• - Access Mode Selector

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Device Manager -Exception Detail Alarm Attribute
Definition

• Device Manager Object - Exception Detail Alarm
  Bit Assignment

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Device Manager -Exception Detail Warning
Attribute Definition

• Device Manager Object - Exception Detail Warning
  Bit Assignment

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Device Manager - Extended Service Definition

• Device Manager Object Service - Set Pump Access
  Mode

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Device Manager -Extended Service Behavour
Definition

• Device Manager Service - Set Pump Access Mode
  Transition Matrix

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Providing a Vacuum Pump Assembly for Data
Reporting

• Assembly VP1 Object - Common Device Model

• Required Attributes
  Services

• Data (Assembly)
• Exception Status
• Pump State
• Exception Detail Alarm
• Exception Detail Warning

• GetAttribute
• Publish

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Extending Hierarchy to Specific Pump
ObjectsExample Actuator-VP Vacuum Pump Object

• Actuator-Vacuum Pump Object - Vacuum Pump Model

• Required Attributes
  Services

• Pump On State (Setting)

• Pump On
• Pump Stop
• Pump Idle
• Idle Mode Selector

• Optional Attributes
  Services

• None

• Normal Operation

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Actuator-VP Object - Vacuum Pump Service
Definition

• Actuator-Vacuum Pump Object Service - Pump (On,
  Stop, Idle)

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Actuator-VP Object - Vacuum Pump Service
Definition

• Actuator-Vacuum Pump Object Service - Pump (On,
  Off, Idle)

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Actuator Object -Vacuum Pump Service Definition

• Actuator-Vacuum Pump Object Service - Pump (On,
  Stop, Idle) Transition Matrix

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Actuator Object -Vacuum Pump Service Definition

• Actuator-Vacuum Pump Object Service - Pump (On,
  Stop, Idle) Transition Matrix

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Extending Hierarchy to Specific Pump
ObjectsExample Sensor-AI-VP Speed Object

• Sensor-AI-VP Speed Object - Vacuum Pump Model

• Required Attributes
  Services

• Speed Actual (value)

• Common in CDM

• Optional Attributes
  Services

• None

• Speed Target
• Speed Scale Factor
• Over Speed Warning Limit
• Over Speed Alarm Limit
• Under Speed Warning Limit
• Under Speed Alarm Limit

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Outline

• Introduction
• Motivation for pursuing energy savings in pumps
• Ensuing Standardization Process
• Task Force
• E54 Specific Device Model Standard
• Status
• Device High Level Structure
• Specific Device Objects and Attributes
• Specific Device Object Behavior Description
• Summary
• Future Updates

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Summary

• Benefits and ROI of energy conservation through
  enabling a pump idle mode clear
• E-54 provides a way to standardize this
  capability and ensure compliance in providing it
  and providing access to it
• The E-54 Vacuum Pump Standard effort is in full
  swing
• Users should be able to begin referencing it by
  the end of the year
• Reference it regardless of whether or not you are
  utilizing sensor bus for communications.

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Future Efforts Task Force

• Review Yellow Ballot 3979A Otober 2005, Portland
  SEMI Standard meetings
• Extend E54 Standard To Include
• Roughing Vacuum Pump
• Tubo Molecular Vacuum Pump
• Cryogenic Vacuum Pump