MEMSCAP at a Glance

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DTM'99
TM
The Power of a Small World
An Advanced Integrated Solution for MEMS Design
J.M. Karam President CEO MEMSCAP Phone 33 4
76 52 55 80 Fax [phone] Email
Jean-Michel.Karam_at_memscap.com
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Memscap' System Designer Flow
Schematic Capture
Specifications
Architecture
Optimization
Behavioral Simulation
Design Centering
Automatic Layout Generation
Process Variations
DRC Etching Verification
Cross-Section Viewing 3D Viewing
FEM/BEM
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Memscap' Component Designer Flow
FEM/BEM Analysis
Specifications
Architecture
Optimization
Layout Generation
Behavioral Modeling
Behavioral Simulation
Design Centering
Process Variations
Full System Functionality
DRC Etching Verification
Cross-Section Viewing 3D Viewing
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TM
VULCAIN
The Fully Integrated Solution
TM
KANAGA
Layout Generators
Technology Files
DRC
Etching Verification
System Designer

Schematic Capture (e.g. DA)
PlaceRoute Layout Tool (e.g. IC Station)
Cross-Section Viewer
Layout to 3D Solid-Model
FEM to HDL-A Translator
MEMS HDL-A/ VHDL-AMS Library
Field Solvers (FEM, etc.) ANSYS
Mixed-Technology Simulator (e.g. Continuum/Eldo)
TM
EDD-Mesh
Device Designer
Result Interface
Optimization Manufacturing Yield
Management Tools
Material Data Base
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CAD Tools - The MEMS Engineering Kits

• Generic VULCAINTM
• Customizable by the User to the targeted process
  technology
• Seamless Design Flow from Front-End to Back-End
• Anisotropic Sacrificial Etching Simulation
• Multi-Segment, Multi-Angle Cross-Section Viewer
• Layout to/from 3D Solid-Model Generator
• EDDTM-Mesh FEM to HDL-A Translator
• Foundry Modules
• KANAGATM MCNC/Cronos
• More than 75 Device Generators !

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MEMS Library Structure
Description Level
Schematic Symbol
MEMS HDL-A Model
Layout Generator
Building Block Level
Structuring Level
Device Level
Validation Level
FEM Validated
Generic
Characterized
Complexity Level
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Manufacturing Yield Management

• Algorithms Monte Carlo Surface Response
  Methods
• Customizable for any MEMS Process
• Extract Data from Process of
• Critical Monitors
• Build Statistical Model
• Behavioral Simulation
• Considering Process Variations
• Design Centering

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HDL-A Code Generator for Non-Linear Behavioral
Model from Low Level Description
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EDD-Mesh The FEM to A-HDL Translator
Integrated Within
VULCAIN KANAGA
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Full System Functionality Verification - Mixed
Technology Simulation
Characterized Component Library

HDL-A
VHDL-AMS
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Device Layout Generators

• Ensure Schematic Driven Layout
• Generators
• Coupled to System Level Model
• Improve Productivity at Layout
• Custom Design
• Device Generators
• Functions (Non-Manhattan Shapes)
• Building Blocks
• Device Level

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Schematic Driven Layout Generation
Automatic Maping to Layout
Properties and Connectivities Save

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DRC for MEMS

Design Rules for Electronic Non-Electronic
Parts
"A Clean Seperation between the Processing done
during Wafer Fabrication and the Design Effort
that creates the pattern to be implemented"
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Integrated Etching Simulation

Anisotropic Etching Simulation
Sacrificial Etching Simulation
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Cross-Section Viewer

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'Layout to / from 3D Solid-Model' Generator

• Layout Area Selection
• Layout FEM
• 3D Viewer (VRML, etc.)

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MCNC/Mentor Graphics/MEMSCAP A Partnership
Model for an Optimal MEMS Solution
MCNC - MEMS Manufacturer
With DARPA Support
Mentor Graphics - EDA Vendor
MEMSCAP - MEMS IP
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A Wider Support for the MEMS Foundries
MEMS Manufacturer
EDA Vendor
MEMS IP Provider
Bosch, SensoNor, Austria Mikro Systeme - MEMS
Engineering Kits
Very Soon