NanoscienceNanotechnology

1
Nanoscience/Nanotechnology International and US
Initiatives Large Expectations from Small
Structures
Dr. James S. Murday Director, National
Nanotechnology Coordination Office Head,
Chemistry Division, Naval Research Laboratory
ECEDHA 2002 Annual meeting March 2002
2

NANOMETER (nm) SCIENCE AND TECHNOLOGY
MAT - TECH
INFO - TECH
pm nm µm mm meter km
BIO - TECH
PHENOMENA EXAMPLE Interface/Interphase oxide
layer cell membrane Size effects paramagnetic
limit antibody/antigen recognition Quantum
confinement QD color Single electron device
Murday, NRL 1
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Paleontology of Nanostructures
EMPIRIC
SURFACE

NANO
EPOCH
EPOCH

EPOCH
Nanolayer
?
Nanofilaments
Nanodots
1960
1990
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NANOTECHNOLOGY RESEARCH PROGRAMS IN THE
WORLD Main government sponsored research programs
1997 2001 2002 (WTEC) (est) USA
115M 420M 600M JAPAN 120M 500M 900M W
ESTERN EUROPE 125M 250M 300M OTHER
COUNTRIES 70M 200M 400M (FSU, China,
Canada, Australia, others) TOTAL 430M
1400M gt2200M Fiscal year start/stop
varies from country to country
Murday, NRL 110 3/13/02
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US NATIONAL NANOTECHNOLOGY INITIATIVE
(NNI) PROGRAM
FY00 FY01 FY02 FY03 FUNDAMENTAL
RESEARCH 87M 140M GRAND CHALLENGES 71M 125
M NANOSTRUCTURED MATERIALS BY DESIGN, NSF NANOEL
EC, OPTELEC, MAGNETICS, DOD ADVANCED
HEALTHCARE/THERAPEUTICS, NIH ENVIRONMENTAL
IMPROVEMENT, EPA ENERGY CONVERSION/STORAGE, DOE
TRANSPORTATION, DOT MICROCRAFT
ROBOTICS, NASA BIONANOSENSORS FOR
BIOTHREAT, NIH, DOD INSTRUMENTATION
METROLOGY, NIST NEW MANUFACTURING
SCIENCE NSF NEW CBRE PROTECTION/DETECTION DOD
NEW CENTERS/NETWORKS 47M 66M INFRASTRUCTUR
E 50M 77M ETHICAL/SOCIAL IMPLICATIONS 15M
21M TOTALS 270M 422M 600M 700M
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Why Nanoelectronics?
The evolution of computer technology over the
last few decades has revolutionized computational
capability Faster electronics Lower power
consumption Larger data handling
capabilities More complex information
processing The era of
Nanoelectronics (lt100 nm) is forecast (ITRS) to
begin within 3 years (2005)
Murday, NRL 168 3/02
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Nanoelectronics
SIA Technology Roadmap Sustained government
support of semiconductor research is mandatory if
this industry is to continue to provide for
strong economic growth in the U.S.
350nm 180nm 100nm
1995 1998 2001
2004 2007 2010 2015
processing
metrology
Nanostructure ST
miniaturized sensors
high density memory
http//www.src.org/nano
Murday, NRL 90b
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ITRS (2001) Identified Difficult Challenges lt65
nm and Beyond 2007
Topic Challenge Summary of issues Design
Manufacturing integration Red-Bricks,
requirements with no solutions Test Failure
analysis identify, locate, and distinguish
single defect Process Implementation of
non-CMOS major changes in process, materials,
design Atomic level fluctuation fundamental
problems of statistical fluctuation Front End
Memory storage cell new memory types and
storage concepts Surface and Interface
control structure, composition and
contamination Lithography Mask
fabrication equipment infrastructure
Metrology critical dimension overlay
metrology to 9 nm Interconnect New materials and
size effects microstructure and quantum
effects Defect Characterization size,
shape, composition of nanostructures Metrology
NDE surface charging and contamination
interfere Modeling Nanoscale device new
device concepts beyond traditional CMOS
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25 nm x 25 nm bit
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Information Technology NanoDevice Projections
Fabricate
Communicate
Processor Digital
Processor Analog
Display
Sensing
Memory
2005 2010 2015 2020 Time
Terabit/in2
Innovative NanoDevice Concepts Chou magnetic
rods Sun magnetic nanocrystal Tiwari NanoCrystal
floating gate Vettiger plastic deformation Heath m
olecular switch Lieber CNT switch Aono Ag2S
switch Prinz GMR Quate QD charge
storage Vettiger Millipede
Complexity
3D?
Multistate?
104 parallel Read/write?
Terabit/mm2?
Murday, NRL 66 11/01
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Nanoelectronic Web Searches
Data was generated by searching for the key word
nanoelectronics and recording the number of
hits on a particular day
Gernot S. Pomrenke 2001
Murday, NRL 170 3/02
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NNI Grand Challenge Nanoelectronics,
Optoelectronics, Magnetics

• Challenges/Opportunities for
• Research Investment strategy, single
  investigator vs teaming, funding amount
• Infrastructure focus / resources /
  geographical distribution
• NNUN (5)
• DOE Centers (3)
• NASA Centers (3)
• NSF NSEC (6)
• Education / Training curricula, K-12 student,
  US vs non US
• Cross-discipline
• Industrial Needs estimates of trained manpower
  requirements
• Technology Transition how

Advisory Group on Electron Devices Special
Technology Area Review Nanoelectronics Fall
2002 HELP!
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NNI ST Notional Investment Planning
Industrial RD And Products
400 300 200 100 0
Fundamental Research
M
1 terabit/in2 Disk Memory
1 terabit/cm2 Disk Memory
Industrial Product Development
Grand Challenge
2000 02 04 06 08 10 12 14
YEAR
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Challenges/Opportunities Research Investment

• Funding adequacy
• ITRS appeal for Government funding of
  pre-competitive research for technology options
• ST funding in Asia (Japan, Korea, Taiwan) and
  Europe
• Growing NSF funds
• Diminishing DOD ST funds
• Single Investigator vs Teaming
• MURI (DOD) / NIRT (NSF) - 1M/yr
  multidisciplinary projects in nanoelectronics
• Centers
• Networks - NNUN

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MURI (DOD) / NIRT (NSF) Funded Programs Nanoelect
ronics
1 Engineering of Nanostructures and
Devices 98-02 ARO / Princeton 2 Self-Assembled
Semiconductors Size/Distribution
Control 98-02 AFOSR / USC 3 Computational Tools
to Design/Optimize Nanodevices 98-02 AFOSR / U
Minn 4 Low-Power High Performance Nanoelectronic
Circuits 98-02 ONR / Arizona State Univ 5
Science Base for Nanolithography 99-04 ARO /
Univ of New Mex 6 Hybrid Molecular and Spin
Semiconductors 99-04 ARO / Purdue 7 Molecular
Control of Nanoelectronic and Nanomagnetic
Structures 01-05 ARO / U Washington 8 Nanoscale
Electronic Devices and Architectures 01-05 ONR
/ Princeton 9 Nano-Porous Semiconductors -
Matrices, Substrates, and Templates 01-05 ONR /
Carnegie Mellon 10 Organic Nanophotonics and
Nanoelectronics 01-05 AFOSR / SUNYAB 11 Quantum
Computing and Quantum Devices 01-05 AFOSR /
MIT, SUNYAB 12 Synthesis and Modification of
Nanostructured Surfaces 01-05 DARPA / UCB 13
Self-Aligned and Self-Limited Quantum Dot
Nanoswitches 01- NSF / Ohio State 14 Zeolitic
Materials for Nanoscale Electronics Quantum
Computation 01- NSF / Ohio Univ 15 Nanostructured
Optoelectronic Materials New Concepts 01- NSF /
Univ Washington 16 Semicon Nanowires Building
Blocks for Nanoscale Electronics 01- NSF / Penn
State 17 Molecular Nanomagnets Magnetic and
Electronic Properties 01- NSF / Texas AM 18 Spin
Transport and Dynamics in Nanoscale Hybrid
Structures 01- NSF / Washington Univ 19
Artificially Engineered Nanoscale
Ferroelectrics 01- NSF / Penn State 20 Nanoscale
Molecular Opto-Electronics 01- NSF/ Arizona
State 21 Engineered Nanoparticle Electronic and
Photonic Device Materials 01- NSF / CIT 22
Nanoscale Single-Electron Switching
Arrays 01- NSF / SUNYSB 23 Coherence and
Correlation in Electronic Nanostructures 01- NSF
/ Duke 24 Single-Molecule Electrical
Transport 01- NSF / CIT
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Infrastructure

• Centers/Networks initiated under NNI
• NSF
• National Nanofabrication Users Network
  (NNUN) Cornell, Penn State, Howard, Standford,
  UCSB
• Nanoscale Systems in Information
  Technologies Burhman Cornell
• Nanoscience in Biological Environmental
  Engn Smalley Rice
• Nanoscale SE for Integrated Nanopatterning
  Detection Mirkin Northwestern
• Electronic Transport in Molecular
  Nanostructures Yardley Columbia
• Nanoscale Systems and their Device
  Applications Westervelt Harvard
• Directed Assembly of Nanostructures Siegel RPI
• DOE
• Integrated NanoSystems Michalske Sandia/Los
  Alamos
• Nanostructured Materials Lowndes Oak Ridge
• Molecular Foundry Alivisatos Lawrence
  Berkeley
• NASA
• Bio/Nano/Information Technology Fusion TBD in
  02
• Bio-Nanotechnology Materials and Structures for
  Aerospace Vehicles TBD in 02
• Nanoelectronics Computing an Electronics TBD
  in 02
• DOD
• Institute for Soldier Nanotechnologies TBD in
  02

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Education/Training
Curricula Laboratory experience K-12 Undergraduate
/Graduate PSU Albany University (NY) US vs
non-US graduate degrees
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Technology Transition NNI Approaches and Possible
Metrics

• Grand Challenge Investment Strategies
• Increasing investment in applied research
• Infrastructure to Provide Measurement /
  Manipulation / Metrology
• Adequately equipped, well used centers for
  measurement and manipulation
• Standards and techniques for measurement and
  quality control
• New commercial tools providing improved
  measurement/manipulation.
• SBIR / STTR / ATP Programs to Foster Innovation
  in Companies
• Number of Phase 2 programs, (useful initially)
• Number of commercialized products emanating
  from the SBIR / STTR / ATP programs
• Outreach Efforts to Encourage Business
  Involvement
• Number of NNI/NNCO outreach events
• Investment at state and local levels
• Industrial investment to complement the Federal
  programs
• Education/Training for Skilled Industrial/Technica
  l Workforce
• Multidisciplinary nanotechnology centers at
  Universities
• Masters and Doctoral degrees focused on
  nanoscience
• Curricula adaptations to incorporate
  nanoscience
• Increased multi-disciplinary research groups
  and programs at universities and colleges.

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Information Technology Device Prognosis
Science Technology Market   Now
(1998-2002) Properties of single
molecules Semiconductor superlattices HEMT,
VCSEL, Quantum Cascade 1B/yr?? Surface
passivation of building blocks GMR read heads for
magnetic memories B/yr?? Lines/dots via
graphoepitaxy/strained layer SET at room
temperature Nanoimprint/emboss CNT/single
molecule transport Polarized electron
transport   Near Term (2002 2005) Control of
building block size/shape CNT field emitters for
displays Properties of nanostructures Sensors 2-D
Hierarchical assembly Molecular logic devices
NEMS   Mid Term (2005 2010) Directed
assembly Terabit/in2 memory 50B/yr Molecular
logic circuits RTD (1D nano) 3-D Hierarchical
assembly MEMS based diagnostics/repair with
parallel (gt103/cm2) processing Nanostructure QD
photonic structures Nanoimprint/emboss
lithography Non-aqueous synthesis of
nanomaterials Spintronic devices Logic device
physics Electronic paper UV lasers NEMS
RF filters Far Term (2010 2020) Terahertz
logic 10 Terabit/cm2 memory via
self-assembled crossbar Nonvolatile terabit
DRAM Photonics enabled by nanoscale Quantum
Dots Quantum Computing Molecular
electronics 
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Nanomaterials by Design Prognosis
Science Technology Market   Now
(1998-2002) CNT expt/theoretical
models Nanobuilding blocks CNT, powders (many
companies) 30M/yr Dendritic molecules Nanoclay
composites (many companies) Nanotubes/wires
other than carbon Catalysts Nanostructure
analytical tools (VEECO) 200M/yr Self-cleani
ng window glass (PPG, Pilkington) Ferrofluids
50M/yr Nanostructured WC/Co tool
bits Near Term (2002 2005) Size/shape
of nanostructure building blocks Variety of
surface tailored building blocks Control of
interface passivation Nanostructured coatings
conductivity, wear resistance Nanostructured
polymers Environmentally benign CB decon
Standard and metrology Multi-probe systems and
nanomanipulators Manufacturing scale up   Mid
Term (2005-2010) Control of interface directed
assembly Nanoporous membranes for
separations Molecular motor dynamics Nanostructur
e analytical tools for chemical
composition Nanostructure dynamics at
interfaces Instrumentation for analysis of soft
materials Multiscale modeling Low-observable
materials across several spectral regions   Far
Term (2010 2020) Devices powered by molecular
motors Nanostructured energy alternatives
generation and storage      
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NanoBioDevice Prognosis
Science Technology Market   Now (1998
2002) Protein folding Contrast enhancers for
diagnostic imaging Membrane molecular
structure Gene gun (BioRad Labs) Antimicrobial
dressing (Nucryst Pharmaceuticals)   Near Term
(2002 2005) In-situ measurement of soft
materials Nanostructure enhanced drug
solubility Mechanisms of self-assembly CB
sensors with revolutionary capability Membrane
molecular dynamics   Mid Term (2005
2010) Tailored membrane properties Lab-on-a-chip
utilizing nanostructures for blood
pathology Nanoscale analytical tools for
cells Nanoporous microcapsules for immune system
isolation Biotic/abiotic interfaces Predictive
models of cell physiology   Far Term (2010
2020) Semiconductor detector signals routed
directly to brain (eye,ear) Site-specific
NEMS dispensers of drug
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NNI/NSET/NNCO OUTREACH CHALLENGES
US Public
State Agencies
Venture Capital
Scientific Technological Commercial Discovery
Innovation Product
Federal Agencies
Company IRD
International
Murday, NRL 56b
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Why Nanoelectronics?
Gernot S. Pomrenke 2001
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Nanomaterials Grand Challenge Roadmap
2000 2005 2010 2015 2020 2025
Nanoscale Building Blocks
SCIENCE
Surface/Interface Control
Ultrahard Materials
Nanostructured Polymers
Specialty Coatings
Ultralightweight Structures
Self Assembled Materials
Tailored Propellants/Explosives
Complexity
Selectively Permeable Membranes
Hierarchically-structured Materials
Multifunctional Lightweight Armor
Smart/Interactive Textiles
3-D Nanofabrication
EO/Signature Management
DEVICE/APPLICATION
Biointeractive
Nanomaterial Systems by Design
Multi-scale modeling/simulation Nanostructured
materials synthesis/characterization Hierarchical
materials system design concepts Nanomaterials
processing/manufacturing science
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Info Technology Device Grand Challenge Roadmap
2000 2005 2010 2015 2020 2025
Molecular Electron Transport/Switching
SCIENCE
Embossing/Printing Lithography
Nanostructure Building Block Control/Properties
QD Enhanced Photonics
Terabit/cm2 Memory
Complexity
Directed Nanostructure Assembly
Terahertz Logic
DEVICE/APPLICATION
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NanoBioDevices Grand Challenge Roadmap
2000 2005 2010 2015
2020 2025
Single Molecule/Particle Properties
SCIENCE
Molecular motors
Sunscreen Imaging Contrast Agents
Soft Material Tools
Tailored Membranes
Genomic/Proteomic diagnostics
Biotic -Abiotic Material Interfaces (in-situ)
COMPLEXITY
Cell-based diagnostics
Nanocomposite implant
Power Scavenging
Personnel status monitor
DEVICE/APPLICATION
Molecular Machines
In-vivo sense/respond therapy BioNEMS
Murday, NRL 167 2/21/02