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Performances of epitaxial GaAs detectors

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Laboratoire des Milieux D sordonn s et H t rog nes. Universit Pierre et ... Photolithography. Chemical etching. Si3N4 deposition. Metallic alloy deposition ... – PowerPoint PPT presentation

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Title: Performances of epitaxial GaAs detectors


1
Performances of epitaxial GaAs detectors
  • E. Bréelle, H. Samic, G. C. Sun, J. C.
    Bourgoin
  • Laboratoire des Milieux Désordonnés et
    Hétérogènes
  • Université Pierre et Marie Curie (Paris 6)

2
Introduction
  • Material for X-ray imaging
  •  
  • Bulk
    Epitaxial
  •  
  • Semi-insulating
    Thick enough
  • Large defect concentration,
    Low defect concentration,
  • ?Non-uniform electronic
    properties Residual doping (1013-1014
    cm-3)
  • ?Short life time
    ?Small depleted depth
  •  
  • Imaging at room temperature
  • Bulk CdTe
    Epitaxial GaAs (InP,
    GaP..)
  • Limited area
    Large area
  • Bad homogeneity
    Homogenous
  • No technology
    Existing technology

  • ? Limitation in space
    charge region

3
Aim of the work
Epitaxial GaAs detector
4
What has been achieved by Chemical Reaction
method
A. Growth of thick epitaxial GaAs layers
100-500 µm thick layers Homogenous
electronic properties Electronic properties
similar to that of standard epilayers
  B. Pixel technology Polishing Ion
implantation annealing Photolithography
Chemical etching Si3N4 deposition
Metallic alloy deposition  
5
What has been achieved by Chemical Reaction
method
                   
C. Photo current induced by X-ray
6
Results
  • 1. Proton detection 
  • GaAs detector  2 mm2, 4.3 x 1014 cm-3, bias of
    100 V (depleted depth 18.4 µm)
  • Retrodiffusion of 1.2 MeV (a) and 1.3 MeV (b)
    protons

7
Results 
  • 2. Electron detection
  • Si detector 25 mm2, depleted depth 100 µm at 50
    V
  • GaAs detector 2 mm2, depleted depth about 13 µm
    at 50 V.

8
Results 
  •  
  • 3. Alpha detection (241Am)-5.49 MeV  
  • Bias of 80 V

9
Results 
  •  
  • 4. Gamma detection (241Am)- 59 keV
  • Cooled at 50C, at bias of 70V
  •  
  •  

10
 Conclusion
  • Good energy resolution
  • Width of the space charge region, small !
  • Decrease of the residual doping
  • Work in photocurrent
  • 3. Optimise the technology of the detector.
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