Title: Performances of epitaxial GaAs detectors
1Performances of epitaxial GaAs detectors
- E. Bréelle, H. Samic, G. C. Sun, J. C.
Bourgoin - Laboratoire des Milieux Désordonnés et
Hétérogènes - Université Pierre et Marie Curie (Paris 6)
2Introduction
- Material for X-ray imaging
- Â
- Bulk
Epitaxial - Â
- Semi-insulating
Thick enough - Large defect concentration,
Low defect concentration, - ?Non-uniform electronic
properties Residual doping (1013-1014
cm-3) - ?Short life time
?Small depleted depth - Â
- Imaging at room temperature
-
- Bulk CdTe
Epitaxial GaAs (InP,
GaP..) - Limited area
Large area - Bad homogeneity
Homogenous - No technology
Existing technology -
? Limitation in space
charge region
3Aim of the work
Epitaxial GaAs detector
4What has been achieved by Chemical Reaction
method
A. Growth of thick epitaxial GaAs layers
100-500 µm thick layers Homogenous
electronic properties Electronic properties
similar to that of standard epilayers
 B. Pixel technology Polishing Ion
implantation annealing Photolithography
Chemical etching Si3N4 deposition
Metallic alloy deposition Â
5What has been achieved by Chemical Reaction
method
         Â
C. Photo current induced by X-ray
6Results
- 1. Proton detectionÂ
- GaAs detector 2 mm2, 4.3 x 1014 cm-3, bias of
100 V (depleted depth 18.4 µm) - Retrodiffusion of 1.2 MeV (a) and 1.3 MeV (b)
protons
7ResultsÂ
- 2. Electron detection
- Si detector 25 mm2, depleted depth 100 µm at 50
V - GaAs detector 2 mm2, depleted depth about 13 µm
at 50 V.
8ResultsÂ
- Â
- 3. Alpha detection (241Am)-5.49 MeVÂ Â
- Bias of 80 V
9ResultsÂ
- Â
- 4. Gamma detection (241Am)- 59 keV
- Cooled at 50C, at bias of 70V
- Â
- Â
10Â Conclusion
- Good energy resolution
- Width of the space charge region, small !
- Decrease of the residual doping
- Work in photocurrent
- 3. Optimise the technology of the detector.