Birck Nanotechnology Center All-User Meeting

1
Birck Nanotechnology CenterAll-User Meeting

• January, 2009

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Welcome !

• Thank you for coming to the all-user meeting of
  the Birck Nanotechnology Center
• This meeting contains updates on
• BNC policies and procedures
• Working together successfully
• Safety in the laboratories and cleanroom
• Billing procedures
• This meeting is held once per year to update you
  on our operations and to give you reminders on
  our procedures
• Attendance at this meeting by all users is
  required by law (OSHA)

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As a courtesy to the presenters and to those
around you.

• Please turn off cell phones, Blackberries, etc.
• Please do not use laptops
• Close them and/or turn them off

4
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

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BNC Engineering StaffAn enabling resource for
research

• Technical staff
• 19 Engineers and Scientists
• 321 years of experience
• 5 Ph.D.s, 2 M.S., 8 B.S., 2 A.S.
• Several staff are known throughout the country
  for their expertise
• Support staff
• 7 Staff Members
• 116 years of relevant experience
• 2 B.S., 1 B.A., 2 A.S.

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Staff Introductions

• John Weaver
• Facility Manager
• Responsible for the overall operation of the
  facility
• Mark Voorhis
• Building Manager
• Responsible for building infrastructure
• Responsible for tool installation
• Steve Jurss
• Safety Manager
• Responsible for all safety issues, chemical
  safety, and safety monitoring systems
• Ron Reger
• Process and Equipment Manager
• Responsible for processes and equipment
  throughout the facility
• Responsible for overall training program

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Staff Introductions (CONTINUED)

• Dave Lubelski
• Process and Equipment Owner Metallization
• Responsible for evaporation and sputtering
  systems
• Responsible for recharge center finances
• Kenny Schwartz
• Process and Equipment Owner Metallization
• Responsible for evaporation and sputtering
  systems
• Responsible for process gases
• Tim Miller
• Process and Equipment Owner Ultrapure Water
• Responsible for UPW, dicing saws, fume hoods
• Responsible for cleanroom training
• Dan Hosler
• Process and Equipment Owner Thermal Processing
• Responsible for furnaces
• Responsible for cleanroom training

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Staff Introductions (CONTINUED)

• Hasan Sharifi
• Process and Equipment Owner Plasma Systems
• Responsible for plasma etching systems
• Responsible for plasma deposition systems
• Geoff Gardner
• Process and Equipment Owner Plasma Systems
• Responsible for plasma etching systems
• Responsible for plasma deposition systems
• Responsible for Machine Shop project
• John Coy
• Process and Equipment Owner Epitaxy
• Responsible for epitaxial systems
• Responsible for Coral
• Jeff Grau
• Process and Equipment Owner Optical Lithography
• Responsible for maskmaking systems
• Responsible for aligners and wafer bonder

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Staff Introductions (CONTINUED)

• Bill Rowe
• Process and Equipment Owner e-beam lithography
• Responsible for e-beam lithography systems
• Responsible for nano-imprinter (future)
• Aamer Mahmood
• Process and Equipment Owner Processing
• Responsible for processing services
• Responsible for process characterization
• Lisa Reece
• Process and Equipment Owner Bio-Nano
• Biosafety officer
• Responsible for bio-nano and biochemistry
  laboratories
• Jeff Kuhn
• Facility Engineer
• Responsible for building systems

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Staff Introductions (CONTINUED)

• Dima Zemlyanov
• Staff Scientist Surface Analysis
• Responsible for surface-analysis systems
• Dmitri Zakharov
• Staff Scientist Electron Microscopy
• Responsible for Transmission Electron Microscopes
  (TEMs)
• Responsible for Scanning Electron Microscopes
  (SEMs)
• Responsible for Focused Ion Beam system (FIB)
• Vlad Drachev
• Staff Scientist Nanophotonics
• Responsible for laser-based systems

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Staff Introductions (CONTINUED)

• Mary Jo Totten
• Building Logistics Coordinator
• Building Deputy
• Responsible for building training
• Responsible for keys/card access
• Responsible for mail, shipping, and receiving
• Ira Young
• Process Inventory Control Clerk
• Responsible for cleanroom and laboratory supplies
• Responsible for chemical and biological
  deliveries
• Organizes MSDSs for chemicals used in the
  facility
• SeAndra Donaldson
• Building Logistics Assistant
• Support for building logistics
• Responsible for keys/card access
• Responsible for mail, shipping, and receiving

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Staff Introductions (CONTINUED)

• Larry Tunget
• Jonathan Schmucker
• Mike Bayless
• Lab Attendants
• Assist off-hours researchers
• Maintain building, laboratory, and cleanroom
  safety
• Assist in stocking
• Assure protocol compliance
• Nancy Black
• Secretary
• Assists Staff and Faculty
• Gail Lockwood
• Wire-bonding

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

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Recharge Centers

• Scifres Nanofabrication Laboratory (Cleanroom)
• General Laboratories
• E-Beam Lithography
• Electron Microscopy
• Surface Analysis
• Epitaxy

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Zero-Sum Financial Model
IN OUT
Recharge Center
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Setting the Rates Equipment
Total Number of Uses
Fee per Use


Total Expenses
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Setting the Rates Laboratory
Total Number of Users per Month
Usage Fee per Month


Total Expenses
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Setting the Rates Cleanroom
Total Number of Users per Month
Usage Fee per Month


Total Expenses
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Expenditure Tracking 2008
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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

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Code of Conduct

• If you have not previously signed a Code of
  Conduct form, please pick up a form, sign it, and
  turn it in as you leave.
• This Code of Conduct was developed by NSAC, and
  helps all of us work together in a positive
  manner in the BNC laboratories and cleanroom

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Code of Conduct
As a member of the Birck Nanotechnology Center
community, I will support an environment marked
by mutual respect, fairness, accountability,
collaboration, partnership, honesty and
integrity.

• I will be honest, fair, and courteous in my
  dealings with coworkers, staff members, and
  others whom I encounter in my daily work.
• I will read, be aware of, and adhere to the
  policies of each laboratory in which I am
  involved.
• I will report honestly, completely, and promptly
  any safety incidents involving me or witnessed by
  me according to the policies of each laboratory.
• I will be honest and straightforward in my
  reporting of equipment or processing issues that
  may occur. I recognize that all equipment is
  shared and thus my actions will impact the work
  of others.

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Code of Conduct (CONTINUED)

• I will fill out all forms and document all uses
  of equipment and materials as required. I
  recognize that failure to do so is stealing and
  will be handled accordingly.
• I will maintain a professional level of
  cleanliness throughout this shared facility.
• I will be considerate and respectful of the work
  and materials of my coworkers.

I understand that using the Birck Nanotechnology
Facility is a privilege not a right, and that
this privilege may be revoked at anytime.
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New Discipline Policy

• The disciplinary policy has been revised by a
  joint action of the faculty and staff in the BNC
• The following slides give a brief summary of the
  new procedure more detailed information is
  available in the BNC Policy and Procedure Manual

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Motives for Disciplinary System

• Ensure safety of all users of the facility
• Guarantee that users acting in good faith have a
  facility that enables them to become the best
  researchers in the world
• Provide a research-friendly environment that
  allows fair access to equipment by all users
• Divide cost for equipment usage fairly among
  researchers

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New Consequences

• First Offense
• PROCEDURAL VIOLATION One-week restriction of
  hours
• SAFETY VIOLATION Two-week restriction of hours
• Second Offense
• PROCEDURAL VIOLATION Two-week restriction of
  hours
• SAFETY VIOLATION Four-week restriction of hours
• Third Offense
• PROCEDURAL VIOLATION Four-week restriction of
  hours
• SAFETY VIOLATION Eight-week restriction of hours

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New Consequences (CONTINUED)

• Fourth Offense
• Four-week suspension from facility
• Fifth Offense
• Suspension from facility pending action by BNC
  Director, Facility Manager, and Faculty Advisor.
  Action may include expulsion from the facility.

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Staff Roles

• Help users
• Training and support
• New or exotic processes
• Equipment idiosyncrasies
• Keep equipment operating
• Preventive maintenance
• Repair maintenance
• Staff accountable for enforcing policies
• They are not out to get you they want to make
  sure the equipment is available to all users
• They are held accountable for enforcing BNC
  policies

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

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Operations Manual
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Operations Manual Key Points

• BNC Description/Summary
• Take pride in our wonderful facility!
• Laboratory Cleanroom Access Training
• Required general courses
• Specialized courses (LASERS, X-ray, BSL-1,-2)
• Equipment training
• Registration procedures/links
• Badge readers track entry/exit
• Visitors

Birck Nanotechnology Center
Operating Policies and Procedures Revised 29
December 2008
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Operations Manual Key Points

• Safety Emergency Response
• Toxic pyrophoric gases, hazardous chemicals,
  sharp instruments, lasers, high voltage, X-rays,
  tornados, severe weather
• Emergency Response Team (ERT)
• Building evacuations

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Operations Manual Key Points

• Universal Procedures for all Areas
• Hours of operation
• New chemicals
• Reserving equipment
• Consequences of rule violations
• Lab Procedures
• Clothing requirements
• Glove policy
• Specialty lab procedures

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Operations Manual Key Points

• Cleanroom Procedures
• Gowning procedures/requirements
• Entrance/egress tracking
• Housekeeping
• Appendices Miscellaneous
• Forms
• Chemicals
• Related websites

Birck Nanotechnology Center
Operating Policies and Procedures Revised 29
December 2008
Read Heed
35

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

Agenda
36
Equipment Usage Procedures

• Remember the Golden Rule of equipment use
• After youre finished with your use of the
• equipment, leave it in a clean and
• ready state for the next user!

Clean And Ready
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Equipment Usage Procedures

• Vacuum Systems
• Coral Log in before starting using
• Fill out log sheets completely legibly
• If vacuum gauge doesnt turn on, abort and get
  help
• Use only source material provided by BNC
• Use stainless steel tweezers to move crucibles
• Beam sweep must spread beam (no pinpoint beams)
• Check mechanical parts for proper movement
• Do not adjust shutters
• Maintain vacuum integrity
• Use clean gloves
• Wipe bell jar and gasket
• Use new foil on cleanroom vacuum cleaner

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Equipment Usage Procedures

• Plasma Systems Training, New Users
• Expectations
• You MUST read documents available on-line.
• You MUST be familiar with physical concepts of
  plasma etch or deposition
• You MUST be familiar with your process
  requirements
• Scheduling
• Standing training classes scheduled for every
  other Wednesday
• Panasonic, AXIC and FilmMetrics or STS, AlpaStep,
  PlasmaTech, Branson
• Parylene CVD scheduled upon request

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Equipment Usage Procedures

• Plasma Systems, Existing Users
• Process Expectations
• Carrier wafer MUST be clean on the underside.
• New/Unconventional processes MUST be discussed
  with Hasan Geoff.
• Chamber MUST be cleaned post process as covered
  in training.

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Equipment Usage Procedures

• Other cleanroom lab equipment
• Leave fume hoods clean and orderly, with proper
  labeling on materials
• Maintain personal totes, stow when not using
• Use proper trash containers
• Report problems when they happen

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

42
Photomask Services

• Two Electromask Criss-Cross systems
• Both capable of 1.25 micron minimum features for
  step repeat jobs and 3 microns for pattern
  generated jobs
• One system is dedicated to approx 1x1cm and the
  other 2x2cm die sizes
• Capable of both clear field and dark field
• Iron Oxide available for dark field with low data
  density
• Transparency conversion

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Photomask Services

• Data requirements
• Data can be either .gds or .dxf
• All submissions must be in microns and centered
  around (0,0)
• Draw the data, not the background
• Suggested programs
• IC Station or Cadence for .gds
• AutoCAD for .dxf
• Multiple levels on same mask must be same tone
• Text should be limited to absolutely necessary
  and must be block style
• You dont need hundreds of alignment marks!

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Photomask Services

• Transparency masks are to be delivered cleaned
  and in plastic wrapping to the photomask shelf in
  the cleanroom
• All transparency masks must be from an approved
  vendor
• Pageworks in MA
• Order right reading up from Pageworks so
  converted mask is right reading down
• Transparency masks must be same tone as original
• No transparency is allowed on the mask aligners
• Original transparencies will be stored by staff
  after conversion to glass

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Photomask Services
Step and Repeat Job
-Die size is limited to 1.9x1.9 cm
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Photomask Services
Hybrid Job
Layer 1
Layer 2
Layer 3
Layer 4
-Draw one file with the data and one with the
locations. -Location patterns should be no
larger than 1000x1000 microns.
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Photomask Services

• Delivery Time
• Delivery time is guaranteed 5 working days after
  job approval.
• Any delivery before 5 days is a bonus and is not
  to be expected nor requested.
• Please plan ahead!

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

49
Process Capability Study

• Project Leader Aamer Mahmood, PhD (With support
  from all BNC Eng Staff)
• Scope of project Characterization of critical
  parameters of all the key process equipment in
  the cleanroom
• Physical deposition systems
• LPCVD
• Wet and dry oxidation
• Photolithography systems
• Plasma etch systems

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Process Capability Study

• Physical deposition systems
• Metal sputtering and evaporation, dielectric
  evaporation

Film thickness, deposition rate, and uniformity
Residual stress
Surface roughness
Sheet resistance/refractive index
Conformality
51
Process Capability Study

• LPCVD (Si3N4, poly-Si, LTO)
• Wet SiO2 and Dry SiO2
• Film thickness, deposition rate, uniformity
• Residual stress
• Surface roughness
• Refractive index
• Conformality
• Grain size
• Composition
• e.g., Si N

x
y
52
Process Capability Study

• Photolithography Systems . . . Aligners
• Development time
• Photoresist thickness across the wafer
• Fidelity of optical mask pattern

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Process Capability Study

• Plasma Etch Systems (STS AOE, STS ASE, Plasma
  Tech RIE, Panasonic RIE, Branson Asher)
• Etch rate
• Side wall angle
• Etch uniformity across wafer
• Side wall angle across wafer

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

55
Coral

• Coral access is required prior to equipment
  training.
• Account number must be submitted by faculty to
• https//engineering.purdue.edu/NANO/coral
• All Coral related trouble reports go to
• coral_at_ecn.purdue.edu

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Coral

• Reservations are to be continuous and within the
  reservation policy limit.
• Attempts to go around the established reservation
  policy will be deleted upon detection.
• If you need an exception to the reservation
  policy, contact the staff in charge of the
  equipment.
• If you feel the reservation policy needs to be
  changed, then contact staff to discuss it. Dont
  cheat the current policy.

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Coral

• Equipment must be enabled in Coral prior to you
  doing anything on the system.
• The person controlling the equipment is the one
  who must be enabled in Coral.
• Disable equipment when you are finished.
• Frequency of adjustments is increasing.

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

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Biological Laboratories (Bionano Wing)

• Lisa Reece
• Lab Director of Molecular Cytometry,
• BNC Biosafety Officer
• lreece_at_purdue.edu
• X6-6786
• BRK 2038

60
Process for Biolab Access

• PI must submits name(s) of trainees to Lisa Reece
  via email with a brief description of research
  project.
• FIC must approve request via email to Lisa, prior
  to access to any BSL1/2 lab.
• Lisa will provide appropriate online and
  classroom training.
• Lisa will submit name(s) via email and phone call
  to Mary Jo Totten and/or SeAndra Donaldson for
  biolab access after all requirements are met.
• Lisa will meet with trainees in person to sign
  safety documentation and give new users lab
  safety orientation to lab space.

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Process for Biolab Access

• PI submits name(s) to Lisa Reece
• via email
• brief description of research project.
• FIC must approve request prior to biolab access
• Student requests e-mail from FIC
• FIC sends e-mail to Lisa
• Lisa will provide appropriate training
• Online
• Classroom
• Lisa will submit name(s) after all requirements
  are met
• To Mary Jo Totten and/or SeAndra Donaldson.
• Via email and phone call
• Lisa will meet with trainees in person
• Sign safety documentation
• Give new users lab safety orientation to lab
  space.

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Biosafety Level 1 Labs 2077 / 2081

• FIC
• BRK 2077 Cagri Savran, PhD
• BRK 2081 Babak Ziaie, PhD
• No BSL2 agents allowed in these labs.
• Any agent used in these labs must be approved by
  Lisa Reece and Biosafety Committee BEFORE
  bringing into the labs.
• List of agents used must be posted on inside of
  lab (e.g. entrance door).
• Required online training
• Purdue Biological Safety Manual and self-quiz
• BNC 208A Biohazard Training and quiz
• pass with 80 or better
• Biosafety orientation to lab (s)

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Biosafety Level 2 Labs 2043 / 2087

• FIC
• Jim Leary, PhD
• Both BSL1 2 agents allowed in these labs
• Any agent used in these labs must be approved by
  Lisa Reece and Biosafety Committee BEFORE
  bringing into the labs.
• List of agents used must be posted on inside of
  lab (e.g. entrance door).
• Required online training
• Purdue Biological Safety Manual and self-quiz
• BNC 208A, Biohazard Training
• Required personal training
• Bloodborne Pathogen Training (yearly
  certification)
• Interview with Lisa and/or Dr. Leary on research
  and how biological agents will be used
• Biosafety orientation to lab space(s)

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Temporary BSL1 Designations

• For those processes that require a biological
  agent in a non-biological lab
• Usually for use of specific equipment
• Temporary only (Maximum 2 weeks)
• New to BNC
• This is evaluated on a case-by-case basis
• BNC Biosafety Committee must approve.
• FIC of lab / equipment owner must approve.
• Facility Manager must approve.
• Standard BNC BSL1 training requirements

65
Birck Biosafety Committee

• BNC Staff
• Lisa Reece (Chair)
• Stephen Jurss
• John Weaver
• Ron Reger
• Ira Young
• REM Biological Safety Officer
• Bob Golden

• BNC Faculty
• Don Bergstrom, PhD
• James Leary, PhD
• Cagri Savran, PhD
• Babak Ziaie, PhD
• Zone 7 Leader
• Mike Lane

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Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

67
Web Site Updates

• Operating Policies Procedures Manual has been
  Updated
• Link under Facilities ? Operations
• and
• Resources ? Users/Faculty/External
• Publications active links to ePubs articles
• Users forum available
• New design Feb/March 2009
• Questions/Comments jgoecker_at_purdue.edu
• nano.purdue.edu

68
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

69
Building Updates

• Card Reader Commissioning Time Line
• Dec 12, 2008 to January 5, 2009
• Fix hardware software issues
• Replace strikes for labs 1269 1267
• January 5, 2009 to January 16, 2009
• Return keys for card access
• January 23, 2009 to February 6, 2009
• Rekey all lab doors
• For safety reasons each person has to swipe their
  card to access the lab.

70
Laboratory Card Access

• Laboratory access is now with cards, not keys
• If you have not turned in your key and had your
  card activated for your laboratory access, please
  do so immediately.
• The key card-activation exchange can be done
  with Mary Jo or SeAndra any afternoon (1-430).
• Locks are now being changed, so your key may not
  be functional. No keys will be functional by
  late January.

71
Using Laboratory Card Access

• Everyone must swipe their card when entering a
  laboratory or the cleanroom!
• In an emergency, we need to know who is in each
  laboratory
• For laboratory costs to be fairly distributed, we
  need to know who enters a laboratory
• REMEMBER If you are entering the laboratory
  with other people, each person must swipe their
  card.

72
Take Care of Your Badge

• You are both legally and morally responsible for
  anything that takes place under the aegis of your
  badge!
• DO NOT share your badge with other people
• DO NOT leave your badge hanging in your office
• DO keep your badge with you whenever you are in
  the BNC
• DO treat your badge as you would your house or
  apartment key, as an important possession
• Sharing or misuse of your badge will be addressed
  by disciplinary action

73
West Door Access

• The west door of the BNC is now part of the card
  reader system
• The door will be unlocked during business hours
• The door can be opened in non-business hours by
  swiping your Birck badge

74
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

75
Cleanroom Reminders

• Waste Containers
• Make sure capped following use
• Please make sure halogenated
• waste is not mixed with non-
• halogenated waste.

76
General Housekeeping

• Lithography Bay
• Cleaning up of spilled
• material and maintaining equipment
• in and around the solvent hoods

• Fume-hood Etiquette
• Please remove trash and
• glassware following use

77
End of Semester Fume-hood Clean-out

• Labeling of small photo-resist bottles

78
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

79
Research use of Consumable/ Edible Materials

• Examples meat, fish, fruit, bread, vegetables,
  etc.
• Approval for use of above material must be
  obtained before material is brought into BNC
• MUST be stored in laboratories ONLY and the lab
  must be designated at least BSL-1
• Material for research must be labeled with this
  label gt

Material Description _________________________ D
ate of Receipt _____________________________ Date
of Expiration ___________________________
FOR RESEARCH USE ONLY!
Researcher ________________________________
80
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

81
CHP/ RTK Compliance Plan

• Chemical Inventories and Material Safety Data
  Sheets
• Standard Operating Procedures
• Required Facility Training
• Engineering Controls
• Personal Protective Equipment
• Designated Areas of Use

Material
Safety
Data
Sheets
BNC 105
BNC 150
82
MSDS Locations
First Floor Locations
Second Floor locations
Material
Safety
Data
Sheets
83
MSDSs at BNC

• MSDS manuals in the galleys are organized by lab
  room number

Note A list of general chemicals with MSDSs are
supplied are listed in the front of the manuals
to reduce space and redundancy in the manuals
Note A copy of the Chemical Hygiene Plan,
Personal Protective Equipment Policy and Laser
Safety Policy is available
The chemicals filed numerically and the
alphabetically by lab
84
General Fume-hood Use

• Maintain flow across the opening (80-120 LFM) for
  gas and vapor containment.
• Containers and equipment may compromise proper
  flow for containment result in a vortex

85
Emergency Spill Materials

• Chemical Spill Carts are available in the galleys
  for minor (lt 1 gallon ) Except for fluorine-based
  chemicals (i.e. HF, BOE, Ammonium Fluoride).
  Contact Staff for assistance

86
2nd Floor
Chemical Spill Cart Locations
1st Floor
87
Cleanroom Emergency Equipment
Spill Carts
HF First Aid
88
Proper Chemical Storage

• Chemicals are to be stored in the laboratory only
• Materials stored other than in a Lab is a safety
  violation
• POISON! DANGER! MAY BE FATAL IF SWALLOWED,
  INHALED OR ABSORBED THROUGH SKIN. STRONG
  OXIDIZER. CONTACT WITH OTHER MATERIAL MAY CAUSE A
  FIRE. CORROSIVE. CAUSES SEVERE BURNS TO EVERY
  AREA OF CONTACT. AFFECTS THE RESPIRATORY SYSTEM,
  LIVER, KIDNEYS, EYES, SKIN AND BLOOD. MAY CAUSE
  ALLERGIC REACTION. CANCER HAZARD. CAN CAUSE
  CANCER. Risk of cancer depends on duration and
  level of exposure.

Desk In Grad Student Office
Clearly a corrosive material and in this case a
Known Carcinogen
89
References

• REM Chemical Hygiene Program Page
  http//www.purdue.edu/REM/ih/chp.htm
• Right-to-Know/Hazard Communication Program page
  http//www.purdue.edu/REM/ih/hazcom.htm

90
Agenda

• Welcome and Staff Introductions
• Cost Model BNC Finances
• Code of Conduct
• New Discipline Procedure
• Operations Manual Update
• Equipment Usage Procedures
• Maskmaking Services
• Process Capability Study
• Coral Use Procedures
• Biological Laboratories
• Web site updates
• Building Updates Card Reader System
• Housekeeping Update
• Safety Incidents and Review
• Right-to-Know Training
• Dismissal and Follow-up Information

91
Follow-Up and Dismissal

• This is a mandatory-attendance meeting
• Please be sure you have signed in
• Tell your colleagues they must attend
• There will be two makeup sessions next week
• Monday, 26 Jan 2009, 330 500 PM (BMED)
• Tuesday, 27 Jan 2009, 330 500 PM (MRGN)
• Anyone missing those sessions will have
  laboratory and cleanroom access revoked
• Special arrangements with faculty advisor will be
  required to reactivate access

92
Thank You for your participation

• These slides will be available on the web at
  nano.purdue.edu for your reference
• Please enjoy the rest of your evening

The BNC Engineering Staff