Laboratory%20of%20Micro%20and%20Nanosciences

1
Laboratory of Micro and Nanosciences

• Fabrication approaches to Graphene-based
  nanoelectronics

• Goal Large-scale nanoelectronic devices based
  on patterned and modified graphene sheets
• Fabrication method for large area single and
  multi layer graphene sheets needed
• Graphene based electronic devices still at early
  stage, possibly ultra-narrow electron waveguide
  channels necessary in devices

2
Fabrication of graphene sheets

• Exfoliation of highly ordered pyrolytic graphite
  (HOPG)
• Easy-to-access (e.g. cleavage by Scotch tape)
• Labour-intensive, uncertain placement
• Identification of graphene sheets by optical
  microscopy/AFM
• Electrostatic deposition1
• Electric field used to peel off single-few layers
  from HOPG to SiO/Si wafer
• Epitaxial growth of graphene on SiC2
• Vacuum graphitization by UHV thermal treatment
• Possibility to collaborate with Linköping Univ.
  (UHV expertise)
• Layers studied by STM and XPS
• Strong links to Norstel AB (SiC manufacturer)

1 N. Sidorov et al., Nanotechnology 18 (2007),
135301 2 C. Berger at al., Science 312 (2006),
1191
3
Patterning and modification of the device
structures

• Focused ion beam (FIB) patterning and contacting
  of the transistor structures down to 5 nm feature
  size
• FIB milling capabilities expected in Micronova
  during 2007
• Atomic layer deposition (ALD) and epitaxy to add
  more functionality to graphene devices
• Nanolayers of dielectrics, semiconductors and
  conductors
• 2 ALD systems already in operation