Ken Gilleo PhD

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MEMS MOEMS Nano
Workshop
Nanotechnology
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(Focus on devices)

• Ken Gilleo PhD
• ET-Trends LLC

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Nanotechnology ID Crisis
No universal definition for nanotechnology.
Definition Ability to work at the molecular
level, atom by atom, to create large structures
with a fundamentally new molecular organization
and novel and significantly improved physical,
chemical, and biological properties. National
Nanotechnology Initiative (NNI)
Definition a set of methods and techniques
providing the fabrication of structures
consisting of individual atoms, molecules or
macromolecular blocks in the length scale of
approximately 1 100 nm. It is applied to
physical, chemical and biological systems in
order to explore their novel and differentiating
properties and functions arising at a critical
length scale of matter typically under 100 nm.
Source What is what in the Nanoworld 11-08.
Definition A field whose theme is the control of
matter on an atomic and molecular scale.
Generally deals with structures 100 nanometers or
smaller, and involves developing materials or
devices within that size. Wikipedia
Chemistry Science of the composition, structure,
properties, and interactions of matter,
especially atomic and molecular systems.
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Top-Down vs. Bottom-up

• Bottom-Up-Nano (BUN)
• Atom-by-atom
• Feynman approach
• Erik Drexler is leading advocate
• AFM (microscope) is prime method
• Some include chemical synthesis
• Ultra-precise, no throughput yet
• Revolutionary if and when it is done for complex
  systems

• Top-Down Nano (TDN)
• Start with unshaped material
• Machine, cut, etch, drill, lase, or somehow
  fabricate to desired structure
• Lower specificity, higher throughput
• Semiconductors use TDN processing

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Size Domains
1 mm
Cells
Pollen
MEMS
100 mm
M I C R O
Mirror 16m
10 mm
Blood Cells
Mites
Bacteria
1 mm
100 nm
Transistors
Virus
Next Gen 45nm
10 nm
Proteins
1 nm
Chemistry
Atoms
Physics
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Nano-Science Technology

• Nanoscale Materials particles, parts, tubes,
  wires, ropes, fibers, mesh
• Nano-Optoelectronics quantum dots/wires
• Nano-Biomedical agents
• MEMS and MOEMS not much nano yet (NEMS)
• Nano-Electronics
• Discrete devices e.g. transistors, sensors
• Nano-ICs emerging? When?
• Circuits
• Storage
• Computing

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Nano Building Blocks

• Powders thin films/coatings old nano
• Small 3D molecules
• Bucky Balls (fullerenes)
• Horns
• Graphene
• Carbon Nanotubes (CNT)
• Wires ropes
• Self-assembling entities
• Complex shapes (in future)

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Carbon Nanotubes (CNT)
Carbon Nanotubes graphene cylinders closed at
either end new elemental form of carbon (C).
Uses semiconductors, electrically conductive
non-metals, high thermal conductors and
reinforcement - strongest known fibers. New
uses are being discovered every monthly.
CNTs are usually 1-50 nanometers in diameter and
typically a few microns long.
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Nano-Wires

• Definition wires with diameter lt 100nm.
• Electrically conducting, CNT, other materials.
• Formation
• AFM manipulation
• Lithography
• Spin/entangle
• Grow continuously (like polymerization)
• Filled CNT by capillary action
• Conductivity is quantized

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Molecules as Machine Parts?
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Nanoelectronics Evolution
Nano material Examples Image
Building blocks CNT, graphene, fullerene
Devices Transistors, sensors
Circuits ICs, PCBs
Systems Computers, nanobots
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Nanocarbon Focus

• Quantum Devices have been built
• Electrical conductive/semiconductor
• Thermally ultra-conductive 4K wm/C
• Key component for new electronics?
• On most roadmaps since 2007
• Potential is still unknown

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Nanoelectronics Today
IBM Develops Alternative To Silicon
Transistors Electronic News -- Electronic News,
4/27/2001
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Next Stage

• RD focus is CNT assembly connections
• Need to improve present nano-transistors
• Need massively parallel processing
• Future nano-transistor integration (IC)
• 5 10 years away, or longer
• May not be CNTs or even carbon-based

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Nano-Optoelectronics

• Carbon NanoTube light source
• Nanowires new laser principle

UC-Berkeley
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Storage
Tiny depressions melted by an AFM tip into a
polymer medium represent stored data bits that
can then be read by the same tip.
IBM Millipede
Thermomechanical AMF storage
2009 Breakthrough "baroplastics" hard, but they
soften under pressure 1 TB/in2. memory density.
IBM Racetrack
Data is stored in domain walls between magnetic
regions on a nanowire. No motion, no wear,
extreme density, low power.
Animation Demo
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Nano-Mechanics
Nano-Pen
From S. Crucheon-Dupey, NanoInk
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Biotechnology
Combining MEMS Nanotech
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Potential Nano-Devices
Will probably require packaging

• Discretes transistors sensors
• Optical devices emitters, sensors
• Integrated systems Nano-IC
• Bio-medical (with electro/electronic)
• Nano-enhanced MEMS
• Nano-passives including wires/PCBs

Maybe use as part of package
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Nanotechnology Issues

• Best Process bottom-up, top-down, hybrid?
• How to move from lab to fab?
• Where to focus nanotech RD disorganized
• Clarification and leadership needed
• Investors becoming vary hype penalty

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Session Conclusions

• Embryonic scope and potential yet unknown
• Nanoscale being confused with Nanotech
• Nanotechnology needs to clearly define itself
• Quantum-effect nano has unknown potential
• Disruptive potential carbon-base electronics
  (organic)