Micromachining

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Micromachining

• By Subramaniam Iyer

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Micromachining

• It is the Manufacturing method used to create
  Parts / systems of the size in the 10-6 meters
  while NanoManufacturing is used to create Parts /
  systems of the size in the 10-9 meters
• It is used to create MicroElectroMechanical
  systems (MEMs devices), Integrated circuits

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Different meaning in Diff application

• The term Micromachining is used for a variety of
  methods.
• For instance in the Integrated Circuit field it
  implies the lithography based technique is used
• However in traditional manufacturing terms it
  means the use of miniaturized milling, drilling
  and lathe tools. This type of micro machining is
  called the M4.

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• One of the important requirements for micro
  machining is the high spindle speed for the
  cutting tools
• As the tool is smaller than the grain size of the
  material to be cut the relative sharpness is very
  low
• Hence the high spindle speed

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• Some of the other methods used for micro
  machining are
• Lithography
• Surface micromachining
• Bulk micromachining

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• Surface micromachining

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• Bulk maching

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Applications

• It is used to manufacture digital micromirror
  devices
• To manufacture micro motors
• Pressure sensors
• Accelerometersetc