OnWafer Data Set Weir Temporal Response analysis

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OnWafer Data Set Weir Temporal Response analysis

• Origin PEB_March12, 2003.cvs

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Weir Temporal Analysis Overview

• Sensor Time-Response Analysis of On-Wafer Data
• Analysis of Process Phases
• Thermal Response by sensor
• Temperatue
• Maximum Temperature
• Phase Error
• Thermal Response over Time
• Phase Error as a function of time
• Slope
• Slope vs Time
• Zero Slope Constant temperature phase
• Sensor positions
• Cumulative Energy into the process
• Contour Maps
• Of Temperatkure, Energy, Cumulative Energy and
  Rise/Fall Slope

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First Analysis Screen
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Thermal Range Across Wafer

• Five transitions occur
• Marked by yellow squares
• Sections of the wafer begin dropping faster than
  others at 70 seconds time

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Phase Response
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Thresholds Phase 10 Temperature 96 deg

• Phase change transition threshold should be set
  lower than 10 to detect the flat response of
  phase 3
• Phase 3 has a 2-second variaiton in start time
  with 3.59 degrees variation

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Thermal Range by Sensor

• Phase 5 interrupted so phase 1 could be observed

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Phase 2 3 response magnified
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Phase Error

• Phase Error
• (Tsensor Tmean)
• Tsensor temperature of the sensor
• Tmean Mean temperature of the phase

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Phase 3 error _at_ max temp
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Phase error as function of time
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Slope as a function of time
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Slope vs Temperature

• Zero slope implies a constant temperature

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Sensor Locations
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Cumulative Energy by sensor

• Activation temperature set to 96 deg.

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Phase 3 Cumulative Energy

• Phase 3 (constant temperature) results only.

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Temperature Mean, Rise, Phase Length, Start Value
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Temp _at_ end of phase
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Maximum/Minimum Slope
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Average slopes for constant temperature
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Energy for 96 degree Threshold

• Changed threshold to 96 degrees

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Energy transfer

• Energy transfer into the substrate with a 96
  degree threshold
• Blowup on right shows variation at the maximum
  temperature

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Temperature plots across cycle

• Matrix format with selected time-slices

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Plot matrix of temperature

• Thermal grid lines added