SEM lab week

1
SEM lab week 6 1999 Resolution and
Magnification Calibration
Au on Carbon Instrumental Resolution
Binary image used for FESEM resolution
calculation
2
Resolution measurements on silver paint in the
1400 (not the claimed resolution (10-15nm)
because the sample is not ideal
3
Magnification Calibration Calculate the
correction factor for the micron marker in these
images (Grid 2160 lines/mm) 50kx 12mm
23mm
4
Grid 200 Mesh (spaces 75 microns)
Calculate the correction factor
5
Compare the measurements taken under the
following conditions
6
Account for the 45 degree tilt angle and show the
error between x y
7
Latex spheres of known diameter used for an
internal mag std.