EPoSS Annual Forum

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Microsystems in the ICT Programme
Objective 3.9 Microsystems and Smart
Miniaturised Systems
Griet Van Caenegem European Commission Directorat
e-General Information Society and Media
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Microsystems and C - Some simplified Vocabulary
Micromachines
Microsystems Smart miniaturised systems
Microsystems
MEMs, MOEMs
NEMs,
Miniaturised systems
Smart systems
Nanosystems
Microrobots
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MICROSYSTEMS Integration of technologies and
functions
Technologies
Nanoelectronics
Biology
Microfluidics
Materials
Microsystems
Chemistry
Photonics
Micromechanics
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Microsystems get smart ?Smart systems
Able to

• Describe a situation, diagnose, and/or
• Predict, decide, help to decide, and/or
• Interact with the environment

• Smart (Miniaturised) System

Actuate
Actuate
Close-loop
Process
Sense
Interact
Store
Communicate
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Main Challenges for Microsystems and smart
miniaturised systems
1. Multiple Research fields to
combine Mechanics, electronics, fluidics,
biology, magnetism, photonics 2. Multiple
Materials need to work side by
side Semiconductor, ceramic, glass, organic 3.
Multiple Functions to integrate Sensing,
processing, logic, memory, communication 4.
Multiple Integration technological
options ?Heterogeneous integration Monolithic
, hybrid, multichip ETP EPoSS
http//www.smart-systems-integration.org/public
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Convergence and Integration Some examples
GSM phone
Smart Fabrics (PROETEX)
Lab-on-Chip (OPTOLABCARD)
Biology
RF
Microfluidics
Nanoelectronics
Photonics
Micromechanics
Chemistry
Microrobotic surgery (ARAKNES)
Neural Probe arrays (NEUROPROBES)
Photonic biosensor (NEMOSLAB)
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ICT Objective ICT-2009.3.9 Microsystems and
smart miniaturised systems
(a) Heterogeneous Integration
(b) Autonomous energy efficient smart systems
(c) Application-specific Microsystems and Smart
Miniaturised Systems
Transport, Safety and Security
Environment Food/Beverage
Smart Fabrics, Interactive Textile
Biomedical
Telecommunications
(d) Coordination and Support actions
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(a) Heterogeneous Integration
Multiple core technologies and materials,
integrated and interfaced Emphasis -
Innovative concepts of industrial relevance -
Address challenges that limit the industrial
take-up Focus 1. Heterogeneous technologies for
more intelligence in microsystems -
multi-sensing, processing, wireless
communication, actuation 2. Address the value
chain for more efficient manufacturing
Materials, modeling, design, processes,
packaging, characterisation, testing 3.
Disruptive approaches for nanosensor-based
microsystems
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(b) Autonomous energy efficient smart systems

• Objective
• Long-lasting autonomous operation
• Challenges
• 1. Energy
• Scavenging, storage and transmission
• Power generation, accumulation and consumption
• 2. Communication
• Smart transceivers for wireless communication of
  sensor-based systems
• (reconfigurable, low power, adaptive, miniature)

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(c) Application-specific Microsystems (1/2)

• Lab-on-chip platforms, from RD to validation in
• Drug discovery, diagnosis/therapy
• emphasis integration of sample preparation,
  flexibility to multiple-type assays
• Microinstruments for cell manipulation and
  micro-injection
• Microsystems interacting with the human body
• - miniaturised active implants
• - bio-robots and non-invasive microsystems
• (monitoring, diagnosis and therapy)

Biomedical
Note Biosensors and microfluidic
chips/components as such out of scope
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(c) Application-specific Microsystems (2/2)

• Multi-sensing microsystems for
• Environment (including water treatment)
• Food and beverages quality and safety
• Emphasis reliability and cost

Environement Food/Beverage
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(d) Coordination and Support actions
Non-RD projects !

• Techno-economic analysis
• Dissemination and promotion actions, public
  awareness
• Identification of international cooperation
  opportunities
• Coordination between Technology providers and
  Users
• (for in-vitro diagnostics and food/beverage
  quality)

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Budget and Instruments
Instrument
Budget
IP or STREP
(a) Heterogeneous Integration
(b) Autonomous energy efficient smart systems
STREP
77 M
(c) Application-specific Microsystems
Transport, Safety and Security
IP or STREP
Telecommunications
Environement Food/Beverage
Smart Fabrics, Interactive Textile
Biomedical
3 M
(d) Coordination and Support actions
CSA
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General Information and Contact
Pre-proposal service INFSO-MICROSYSTEMS_at_ec.europ
a.eu
http//cordis.europa.eu/fp7/ict/micro-nanosystems

• Complete ICT Work programme 2009-2010
• Objective 3.9 Microsystems and Smart
  Miniaturised Systems
• Pre-proposals check form
• Latest information on this objective and call
• More information on EU-funded projects in
  Microsystems

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• Infoday on 3.9 in Brussels, June 23, 09
• More information on
• http//cordis.europa.eu/fp7/ict/micro-nanosystems
• griet.van-caenegem_at_ec.europa.eu

Thank you very much !