Time-sensitive%20CMOS%20MAPS - PowerPoint PPT Presentation

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Time-sensitive%20CMOS%20MAPS

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Multiple scattering of 200keV electrons in 200 mm of silicon ... Large fluctuations in signal charge liberated in the epitaxial layer of the sensor ... – PowerPoint PPT presentation

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Title: Time-sensitive%20CMOS%20MAPS


1
Time-sensitive CMOS MAPS
  • Drift assisted signal collection in CMOS MAPS.
  • Brookhaven National Laboratory
  • Politecnico di Milano
  • State University of New York at Stony Brook
  • Institut de Recherches Subatomiques, Strasbourg

2
Appl. in electron microscopy
  • Counting pulses versus signal integration
  • Precision and resolution
  • Principles of the cell (pixel)
  • Charge collection
  • Planned implementation

3
Multiple scattering of 200keV electrons in 200 mm
of silicon
4
Multiple scattering of 200 keV electrons in 30 mm
of silicon
5
Multiple scattering of 200 keV electron in 30 mm
Si 500 mm Be
6
Distribution of energy loss
  • Large fluctuations in signal charge liberated in
    the epitaxial layer of the sensor
  • For 10 mm of silicon s_Q/Q50

7
Charge integration versus counting
When signal is the integrated charge Where both q
and N are fluctuating Assuming that N is a
Poissonian process The total fluctuations are
Substituting for var(q) from the above
slide The penalty is only 25 of the dose For a
sub-poissonian process (F0.01-0.1) The penalty
of charge method expressed as an increase of the
number of electrons required to obtain the same
contrast as the counting method can be larger
than a factor between 2.5 to 25
8
N- and P- tap within a pixel
  • Greenn-tubs PMOS
  • No PMOS within anode
  • Redp-tubs NMOS
  • Substrate (back) voltage is -0.1V

9
Doping profiles in 2 dimensions
10
P-electrodes currents at bias
11
N-electrodes currents
  • There are very small values of currents flowing
    out of n-type tubs
  • The life time of carriers was put too long (10ms
    instead of 10ms)
  • No impact ionization under large el. fields

12
Hole current within the section
13
Simulation of electron transport
14
Fractions of collected charge
15
Waveforms of signal current
16
Summary of signal waveforms
17
Consequences of fast signal collection
  • Signal processing time down to 100 ns seems to be
    realistic
  • Correctible loss of 1 at .1 MHz/pixel
  • Detector can be used for diffraction studies
    where 1 of pixels have the full rate of 10 GHz
    with 10 rate correction
  • Implementation of fast read-out for STEM (in
    200-400 keV energy range)

18
Shaping and noise filtering
19
Small area design
20
The simplest triangle
Where C_in is the input capacitance, g_m is
transcondactance of the first transistor and
other letters have their usual meening.
21
Simulated performance
22
Conclusions
  • Active Pixel Sensor with full CMOS in each pixel
    seems to be feasible.
  • The presented design was based on the presence of
    hole currents within the pixel
  • The drift velocity of holes is only about 1 of
    their thermal velocity
  • Full CMOS allows the implementation of one scaler
    per pixel.
  • The detailed design depends on the technology of
    the selected foundry
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