Microwave Plasma System

1
Microwave Plasma System

• Dr. Chandan C.K.
• Mr. Yee Y.F.
• University Tenaga Nasional

2
Plasma System

• Plasma System is enclose by a faraday cage.
• DAQ is done from outside of the cage.

3
Plasma System
Wave guide
Power Meter
Magnetron (microwave source)
Argon Gas Supply
Interferometer Langmuir probe
Cooling fan
Gas Flow Meter
Plasma Chamber
Vacuum Pump (inside)
Temperature monitoring
Vacuum gauge
Movable shot Control button
Microwave timing Control
Emergency STOP
4
Vacumm Pump Flow Control

• Rotary pump is use to maintain the vacuum inside
  chamber. Gas inlet is control by flow meter.

5
Magnetron uWave Power Meter
Magnetron
Power meter
Waveguide
Thermocouple

• Magnetron is use as a microwave source, transmit
  and reflex power is indicated by the power meter.

6
Wave Guide Chamber
Plasma Chamber
Isolator mwave power probe
4 stub tuner for impedance matching
Moveable shot (inside)
Langmuir Probe
7
Langmuir Probe
Probe tip see from quartz window.
Probe tip inside chamber when plasma is on.

• Photo show the Langmuir Probe in the plasma
  chamber when its off (left) and on (right).

8
Interferometer
Connect to DAQ
Interferometer is use to diagnose the plasma,
picture show interferometer in place for
experiment.
9
Conclusion

• Powered by a kitchen microwave oven, Power
  efficiency of more than 70
• Use of a 4 stub tuner for power transfer
• Secondary tuning by variable short in the plasma
  chamber
• 4 stub tuner and variable short are independent
  of each other
• Plasma electron densities of greater than 1011 /
  cm3 are achievable
• Plasma electron temperature varies from 0.5-10 eV