Title: The Melbourne Node
1The Melbourne Node
2The Melbourne Node
3The Melbourne Node
Node Team Leader Steven Prawer
Test structures created by single ion implantation
Atom Lithography and AFM measurement of test
structures
Theory of Coherence and Decoherence
4Key Personnel
- Students
- Paul Otsuka
- MatthewNorman
- Elizabeth Trajkov
- Brett Johnson
- Amelia Liu
- Leigh Morpheth
- David Hoxley
- Andrew Bettiol
- Deborah Beckman
- Jacinta Den Besten
- Kristie Kerr
- Louie Kostidis
- Poo Fun Lai
- Jamie Laird
- Kin Kiong Lee
- Geoff Leech DeborahLouGreig
- Ming Sheng Liu
- Glenn Moloney
- Julius Orwa
- Arthur Sakalleiou
- Russell Walker
- Cameron Wellard
- Academic Staff
- David Jamieson
- Steven Prawer
- Lloyd Hollenberg
- Postdoctoral Fellows
- Jeff McCallum
- Paul Spizzirri
- Igor Adrienko
- 2
- Infrastructure
- Alberto Cimmino
- Roland Szymanski
- William Belcher
- Eliecer Para
5Existing Infrastructure
- NEC 5U Pelletron accelerator with RIEF funded
upgrade to make it one of the brightest
accelerators in the world for nuclear microprobe
operation (2,000,000) - Two MeV ion microprobe beam lines and associated
instrumentation (1,000,000 each) - Dilor confocal Raman spectrometer (500,000)
- Joel UHV AFM (700,000)
- Distributed computer network (100,000).
- Pulsed Laser Deposition System (1,000,000)
- This combination of instruments is unique
worldwide for one research Centre!
6The Science
- Creation of an array of phosphorous ions ina Si m
7The Melbourne Pelletron Accelerator
- Installed in 1975 for nuclear physics
experiments. - National Electrostatics Corp. 5U Pelletron.
- Now full time for nuclear microprobe operation.
- Will be state-of-the-art following RIEFP upgrade
- Capable of delivering a single ion into an area
0.25 mm in diameter
Accelerator
Specimen Chamber
8JEOL Variable Temperature UHV AFM/STM
- Imaging RT-800K
- Cantilever based AFM
- STM imaging with tip or AFM cantilever
- All imaging modes available
- In situ evaporation source.
- In situ ion sputtering.
9Atom Lithography Key Imaging Fabrication
Technology
10Programmed Lithography for nanofabrication
100 x 100 nm
1 atom deep, 10 atoms wide
Alberto Cimmino leaves his mark
11AFM imaging of surfaces
Atomic Force Microscope Image of Si 7 x 7 surface
reconstruction. Each dot is a single Si atom.
12Test structures created by single ion implantation
- The basic idea
- Previous work
- Potential problems and solutions
13Single Ion Implantation Fabrication Strategy
Etch latent damage metallise
Read-out state of qubits
MeV 31P implant
Resist layer
Si substrate
14MeV ion etch pits in track detector
- Single MeV heavy ions are used to produce latent
damage in plastic - Etching in NaOH develops this damage to produce
pits - Light ions produce smaller pits
3. Etch
2. Latent damage
1. Irradiate
From B.E. Fischer, Nucl. Instr. Meth. B54 (1991)
401.
15Single ion tracks
Depth
- Latent damage from single-ion irradiation of a
crystal (Bi2Sr2CaCuOx) - Beam 230 MeV Au
- Lighter ions produce narrower tracks!
1 mm
3 mm
5 mm
7.5 mm
3 nm
From Huang and Sasaki, Influence of ion velocity
on damage efficiency in the single ion target
irradiation system Au-Bi2Sr2CaCu2Ox Phys Rev B
59, p3862
16Project Management - A distributed system
Director Clark
Deputy Director Milburn
Theory/Modelling
Array fabrication
Readout
SET Dzurak
Magnetic Resonance (LANL)
Quantum Optics Rubeinstein-Dunlop
Single Ion Implantation Jamieson
Atom Lithography Prawer
Silicon MBE Simmons
17Potential Problems