MEMS Animated Graphic Design Aid Project MAGDA

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MEMS Animated Graphic Design Aid Project(MAGDA)

• Alexandra Baer
• Martin Kellermann
• Verena von Hintzenstern
• Wolfram Schoor
• Supervisor Dr. Renate Sitte

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Content

• Introduction
• Purpose and realization
• Specific MEMS elements
• MEMS materials
• Transformation from 2D to 3D
• 3D Visualisation

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MEMS Short Introduction

• Micro-Electro Mechanical Systems
• Integrated on a common silicon substrate
• Similar fabrication like Integrated Circuit
• Widely used
• Numerous advantages

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The Purpose of MAGDA

• Provide a user friendly way to design
• Pre analyse use under real circumstances
• Compatibility to ANSYS
• 3D presentation (VRML)
• Animation

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The Basis

• MATLAB program used to design IC
• Very limited

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MAGDA

• Functional design
• Fast access
• Improved functions
• Additional functions
• Objects editable
• - geometric shape
• - 3d data
• - material data

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Specific MEMS Elements

• MAGDA provides user-friendly construction and
  editing of specific MEMS primitives
• Comb Gear Coil

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Comb

• Electrostatic comb drive actuator

• Important factors
• - number, length and width of fingers
• - gap between fingers (important for different
  force profiles e.g. linear, quadratic,
  cubic,)

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Comb

• Menu to design a 2D comb

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Gear

• Microengines

• Important factors
• - size of whole gear
• - number,width and height of teeth

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Gear

• Menu to design a 2D gear with specific parameters

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Coil

• Used as an induction coil

• Important factors for the magnetic field
• - number of twists
• - distance between the twist
• - width of twists

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Coil

• Menu to create a 2D coil

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Materials in MEMS

• Various materials undergo different deformations
• Use of Silicon and UNCD (Ultrananocrystalline
  Diamond) can deform due to temperature
• Use of Gold and Aluminium can deform due to
  electrical voltage and current

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The Material Menu in MAGDA

• Contains MEMS specific materials and parameters

• Input of object thickness

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Input for ANSYS

• Material parameters saved in Data structure
• Library as input for ANSYS
• Shininess and RGB values

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The Extrude Menu in MAGDA

• Declaration of extrude angles by selecting single
  lines

• Addition of angles and thickness to the 2D object
  

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3D Data in MAGDA

• Extrusion
• 3D Data
• New angles and thickness

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3D Visualisation of MEMS-data

• Recognition of shape 2D vs. 3D
• Power of VRML- Animation of simulation- Virtual
  interaction
• Matlab 3D view

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Positioning of objects

• Level based height vs. individual object height
• Pushing down complex objects(transformation/group
  ing)
• Creating vertex data
• Stacking objects
• Write data into .wrl file

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Stack algorithm

• Place objects from level 1insert object into
  list according to its size
• For each obj from current level search for
  intersection obj, calculate absolute
  height,store object on right position in list
• Increase level

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Intersection
Base obj a lt 90 deg

• Case I.a
• Drop obj b lt 90 deg

Case I.b Drop obj 90 lt b lt(180-a) deg
Case I.c Drop obj b gt (180-a) deg
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Intersection
Base obj a gt 90 deg

• Case II.a
• Drop obj b lt 90 deg

Case II.b Drop obj b gt 90 deg
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Intersection
(common case)

• Case III
• Base obj 0 lt a lt 180 deg
• Drop obj 0 lt b lt 180 deg

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3D View
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Example Sensor MAGDA
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Example Sensor VRML
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Future work

• Remove function
• Curves
• Additional specific MEMS
• Simulation of functionality
• Animation of MEMS

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References

• Modelling and Simulation of MEMS flexibility with
  spline approximation for fast VR visualisation,
  Kevin Tatur, 2003
• http//www.microchem.com,2003
• http//mems.sandia.gov ,2003
• http//clifton.mech.nwu.edu/espinosa/micro-nano.h
  tml ,2003
• http//www.camd.lsu.edu/ ,2003
• http//artemis.cop.uop.edu/krysac/mems/memstalk/1
  memstalk.html ,2003
• http//www.memsguide.com ,2003
• http//www.ansys.com/ansys/mems.whatis.htm
• Subrata Mukherjee MEMS Application in Sensors
  and Actuators Optimal Design of MEMS
• Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka,
  Tarik Bourina, Hiroyuki Fujita Magnetic
  Actuator for Optical Switch
• Emily J. Pryputniewicz, Samuel L. Miller, Maarten
  P. de Boer, Gordon C. Brown, Ronald R. Biederman
  and Ryszard J. Pryputniewicz Experimental and
  analytical characterization of dynamic effects in
  electrostatic microengines
• http//www.fujita3.iis.u-tokyo.ac.jp/limms/projec
  ts/rapportpdf/DOC1620-20lionel.pdf
• http//www.wtec.org/loyola/mcc/mems_eu/Pages/Chapt
  er-5.html
• http//users.wpi.edu/chslt/docs/pdf/rjp/Adv20opt
  20meth20microeng20rot20high20speeds20-20SEM
  2000.pdf
• http//users.wpi.edu/chslt/docs/pdf/rjp/MicroEngD
  ynamicEffects2020SympMicroscaleSystems200020.pd
  f
• http//www.sandia.gov/mstc/technologies/micromachi
  nes/docs/linkdeseff.pdf

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Example VRML