Customer Presentation

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Not All Servo Motors Are Made of Magnets and
Copper!
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Ceramic Servo Motors
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Agenda

• Corporate Overview
• Theory of Operation
• Product Features
• Envelope of Performance
• Applications
• Question / Answer

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Corporate Introduction

• Nanomotion
• Established in 1992 for the design, manufacture
  and marketing of piezo-ceramic motors and
  electronics (for linear and rotary motion)
• 51 owned by Johnson Electric (1.8B, 38,000
  employees, 3 million motors/day)
• Nanomotion is 70 people with 35 in the
  engineering and RD.
• gt50,000 motors in field
• gt5000 linear axes in the field

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Johnson Electric Motors for consumer products
Adidas 1 Smart Sneaker
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Nanomotion

• Theory of Operation
• Traditional Piezo VS
• Reversed Piezo VS
• Standing Wave

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Piezo Direct and Reverse Effect
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Poling a Piezo Element
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Summary of Traditional Reversed Piezo Motors

• Travel
• Very limited displacement (lt.1 of overall
  length)
• Speed
• Slow speed (1 to 2mm/sec)
• Positioning
• High Hysteresis

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Basic Structure of Nanomotions Piezoelectric
Element
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Nanomotion Motor Basics Ultrasonic Standing
Waves
Bending Mode
Longitudinal Mode

• Simultaneous excitation of both modes
• creates motion at the edge of motor fingertip

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Finite Element SimulationLongitudinal
Mode Bending Mode
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Ceramic Servo MotorsUltrasonic Standing Wave
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Motor Ellipse

• Amplitude of ellipse varies with voltage
• Slow speed ellipse at the few nm level
• High speed- ellipse at the tens of microns
• The larger the ellipse, the more the mechanical
  stress, the more the heat, the less the duty
  cycle

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Nanomotion Motor Basics
Rotary Table

• Linear Motion Rotary Motion

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Same Motor for Linear or Rotary Motion
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Motor Assembly
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Capabilities LimitationsEnvelope Of
Performance

• Ultimate performance of a motor stage (system)
  is based on
• Output force and speed
• Servo system (control, encoder, motor drive)
• Motor efficiency
• Heat dissipation

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HR1 HR8 Curves
Force Vs. Velocity Curve
FN 5
40N
HR-1
HR-8
250 V mm/sec
250 V mm/sec
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Output Force Speed

• Typical max speed of 275mm/sec at input signal of
  10V
• High speed of 300mm/sec (can guarantee)
• Low speed of 250mm/sec
• Max force of 4.4N per element
• Max power consumption 5 watt at input signal of
  10V

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Duty Cycle (for HR8)
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Motor Selection Guide
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Amplifier Selection Guide
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Drive Technology Comparison
2 Piece Construction

• ?? Piece Construction

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Drive Technology Comparison
VS
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Motor Features

• Standard motors for most operating environments
• Unlimited travel with small operating package
  (Drive strips to 4m length)
• Superior move settle Slow speed CV
• Vacuum motors for high and UHV
• Up to 10-10 Torr
• Non-Magnetic motors / No EMI from motor
• No servo dither no hysteresis
• Built in holding / braking without power
  consumption
• Wide range of dynamic performance
  (Resolution to 1nm, velocity from 1u/sec to
  300mm/sec)
• Cost effective direct drive solution

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Nanomotion Applications
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Nanomotion Applications

• Bio-Medical/Pharmaceutical
• Semiconductor (standard to UHV environment,
  non-magnetic motors)
• Light Assembly Automation
• Metrology/Inspection Equipment
• Fiber Optics (passive and dynamic components)
• Consumer Products (cell phone, digital camera,
  auto)

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Nanomotion Solution
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MEMs Multi Axis Stage

• 4 Axis (X/Y/Z/T)
• Vacuum Rated
• Low Magnetic Field
• (VN motors, SS Bearings)
• Spring Counterbalance in Z
• Resolution of 100nm (available to 10nm)

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Multi Axis Stage

• 2 Axis Pan/tilt (gimbal)
• Platform used for
• Satellite tracking
• XRay beam focus
• Optics positioning

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Multi Axis System

• 2Axis (X/Y)
• X-Ray Inspection
• (radiation environment)
• Demonstrated ability to use vibration
  cancellation with AB2/DC Mode.

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Multi Axis Stage

• 3 Axis (X/Y/T)
• Laser assisted Chemical Micromachining for
  Semicon Biomedical applications.

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Biomedical Application Base

• Cell Imaging (Cytopathology, Gene/DNA analysis)
• Surgical Robots Manipulators (MRI compatible)
• Microfluidics (drug discovery development)
• Proteomics Dispensing
• Device Manufacturing (Angioplasty balloons,
  implant devices)

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Virtual Microscopy Solutions forAnalysis and
Discovery

• Digitized entire microscope slide with scanning
  operation
• Scanning resolution to .23u/pixel with 40x
  objective (motion system to 50nm resolution)
• CV for scanning and integrated Z axis for
  managing Cell Terrain
• 151 Data compression ratio for file management
• 15mm sq region scanned in 5.6 minutes (at 20x)

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Cell Imaging

• Rapid scan locates 22 areas of interest (field
  of view) with step and repeat motion
• Slide imaged in 4 min/ 360 slides per day.
• Improve Sensitivity Specificity (false positive)

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Cell Imaging Benefit

• Ability to achieve high move settle rate due to
  inherent motor braking capability
• Higher resolution, faster moves for increased
  throughput and image accuracy.
• Ability to track autofocus, on-the-fly.
• Highest performance in smallest motor/stage
  package
• Simple drive assembly (2 piece construction)
• Cost effective technology compared to other
  devices

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Auto Focus Axis forCell Imaging

• Resolution from 10nm to 100nm
• Spring counter-balance for optics
• Anti-migration crossed rollers for vertical
  operation
• Available with a variety of motor sizes

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Single Molecular Sequencing

• Primary axis drive for decoding Human Genome in
  days (DNA Sequencing)
• Using Auto Focus Z axis and XY with Nanomotion

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neuroArm

• neuroArm robotic system will be 2 robotic arms,
  each with 6 degrees of freedom for extra
  intra-cranial functions (ultimately for spinal
  surgery)
• Designed to perform
• soft tissue manipulation
• needle insertion
• blunt dissection
• Suturing
• grasping of tissue
• Cauterizing, Cutting, Manipulation of retractor
• Suction irrigation

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Biomedical Device Applications

• MRI Process (with non-magnetic motors
• Robotic arm for micro surgery of the brain
• MRI breast biopsy
• Other diagnostic tools

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MRI Probes
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Multi-Axis Motion PlatformsFor Microfluidics

• Travel Unlimited (typically up to 600mm X/Y/Z)
• Speeds to 300mm/sec
• Reduced form-factor for table top machines
• Built-in holding braking.

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Biomedical /Pharmaceutical

• Flow Cytometry
• Cell Analysis
• Medical Robot (end of arm tooling / grippers)
• Micro-Fluidics
• Dispensing
• Pumps

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Semicon Application Base

• Ebeam /Ion Beam wafer processing
• Mask correction machines
• Surface analysis equipment
• Wafer inspection, processing, and packaging
• Hard disk drive certification
• Other storage media

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(13) ST Motors on Nanotechnology tool
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(24) ST Motors on custom tool Closed loop XYZ
assembly
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Semiconductor / Electronics

• E-Beam writing inspection
• Wafer Metrology
• Thin Film Measurement
• Head Testing
• Storage Media testing/ writing

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Disk Media Testing

• Hard Disk Certification
• 2000 Tracks per hour
• Moves 1 to 15 um in 5msec settle to 100nm.
• Inspection rates increase to 3000 and 4000 tracks
  per hour next year

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Scan and Step
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7 Axis SEM Motion Platform

• X Axis
• Tilt Axis
• Y Axis
• Rotary Axis ( 3 point leveling)
• Uses round bodied motor
• Bottom axis moves 65kg
• All motors vacuum/non-magnetic

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Aerospace Application Base

• Space Vehicles
• Spectrometers
• Sensors

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UHV Motors reduce platform size
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Custom UHV Stages

• 3 Axis stage in UHV for semicon applications.
• Replaced inchworm with crossed roller stage and
  HR2-U motors
• Now using custom motion system built by Nanomotion

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Custom Motion Platform

• Focused Ion Beam motion platform with high
  position stability
• Providing the ability to image below 1nm
• Complete X/Y/Theta

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Unique Solution Configurations

• Smallest available footprint.
• Can use smaller encoder
• IC alignment tool with ST motor.
• Position against two reference surfaces and
  adjust angle of IC

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Metrology
3-Axis system for Optical Surface Scanning,

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Assembly / Automation

• Long Travel Actuation (Travel to 4 meters)
• Inspection Device
• Pick Place assemblies

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Automation / Assembly
Spot Welding Gun driven by (4) HR8
Motors. Acceleration 250 m/s2 (25gs) Max
Force 150 N
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Airbearings Ceramic Servo Motors

• Compact / Cost Effective Air Bearing Performance
• Absolute Position Stability
• Ability to move 1nm

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Photonics / Fiber Optics

• Component Mfg
• Component placement, test, assembly
• Fiber alignment attach
• MEMs
• Tunable (Active) Devices
• -Linear Rotary Switches

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Competitive Large Volume Applications

• The economical XXXX delivers big performance in
  a small package. It pans a full 360º
  (non-continuous) and tilts 90º, giving you more
  coverage than multiple fixed cameras.

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Other Applications

• Rotary and Linear Stages
• Precision Motion Systems (x,y,z,t)
• Microscopy
• Printers and Plotters
• Scanners

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Application Specific Motors (ASM)

• Motors are available in different sizes
• Nanomotion cantailor a motor to meet your
  requirements
• Size
• Force
• Speed

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New AMT-1

• Motor/ASIC for image stabilization

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MM Motor

• The Micro Motor (MM) is the smallest Nanomotion
  Ceramic Ultrasonic motor, integrated in a new
  flexure housing

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Dynamic Performance

• Stall force 0.22 N
• Max Speed 240mm/s
• Stiffness 0.05N/mic

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Summary

• Ceramic Servo Motors deliver the most force per
  motor volume over conventional motor technology,
  making it well suited to a diverse application
  base of motion requirements.
• Ceramic Servo Motors are robust, with the ability
  to work in wide range of challenging
  environments.
• Nanomotions motors amps can be used with any
  servo control, providing flexibility in
  applications.