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ODSA Taipei, 1st September 2005 200 a.m.
Optical Test Equipment
Rolf Hertling STEAG ETA-Optik GmbH September 2005
Rolf Hertling, September 2005
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Why Physical Testing? One reason really counts
Profit!
Increase Profit by
Faster production Save operator time Solve
process problems quickly Better production yield
Lower downtime and improved disc quality Good
reputation Win orders from your customers
Inline Testing
Real time defect detection for every single disc
(GOOD/NG) High-precision measurement of selected
physical optical properties Trend information
about the process Closed-Loop process control
Offline Testing
Detailed analysis of the whole disc and of single
areas High precision measurement of all relevant
parameters Comprehensive quality control for
process optimization
Rolf Hertling, September 2005
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Process for Recordable/Pre-recorded Discs
Examples of Problems
Problem (hard to see)
Physical Values
Moulding
- Localized substrate thickness unstability -
Bad groove shape Top/Bottom width - Poor
write-ability (wrong OD) - Poor read-ability
Unstable radial reflectance shape (wrong Dye
profile) - Sputter compensation for long
target life time - Poor absolute layer thickness
distribution - Bonding layer thickness bump
- Substrate thickness - Birefringence -
Tilt/Deviation - Groove parameters - Dye
material data n/k - Dye optical density OD - Dye
profile In groove/On land, Levelling D(abs)
- Sputter material data n/k - Sputter layer
thickness - Bonding layer thickness
Blank disc
Dye coating
(Recordable only)
Dye coated disc
Sputtering
Sputtered disc
Bonding
Final disc
Rolf Hertling, September 2005
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Moulding Problem Localized substrate thickness
instability
DVD 2003
- Unstable substrate thickness at specific radius
- Accurate measurement required, independent from
tilt
Rolf Hertling, September 2005
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Moulding Problem Groove Shape
CD-R 1999
- Bad disc although both width and depth were
scanned as flat. Why?
- Reason of bad quality Groove shape
deteriorates from inner to outer radius (Type 1
Type 2)
Rolf Hertling, September 2005
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Dye Coating Problem Bad Optical Density Poor
write-ability
CD-R/DVD-R 1996-2005
- Wrong OD measurement at wavelength 650nm
No information about the dye layer distribution!
- Correct OD measurement at wavelength of max.
dye absorption True Optical Density (here at
602nm)
Rolf Hertling, September 2005
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Dye Coating Problem Wrong dye filling Poor
read-ability
DVD-R 2004
Good disc reflectance gt 70
Bad disc reflectance lt 60
- Case 1 Discs can be written in every drive,
but not read in every drive. - Case 2 Discs had
electrical errors at inner radius when reading
but not at outer radius - OD value was ok in
both cases! Why was the disc bad?
- Reason Poor dye filling into the groove -
D(abs) too high, Dye in groove too low.
Rolf Hertling, September 2005
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Sputter Problem Energy compensation for long
target life time
DVD 2001-2005
- Target life time very long for semireflector.
Problem How to compensate sputter power? -
Absolute semireflector thickness is very critical
for DVD quality!
Reflector
- Solution Inline check of semireflector (and
reflector) thickness and closed-loop for
sputtering
Semireflector
Radial profiles of sputter layers
Rolf Hertling, September 2005
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Bonding Problem Bump at outer radius 57.5mm
DVD 2003 / HD-DVD 2005
- Bonding layer had strong, local thickness
increase (bump) at outer radius 57.5mm
- Process problem could only be detected by
highly accurate measurement with good local
resolution and additional single point check
Rolf Hertling, September 2005
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Hard Coating Thickness Problem Overflow at inner
radius
DVD-RAM 2005
- Unstable spin coating produces unstable HC
thickness at radius 23mm
- High precision and local resolution necessary.
HC thickness not easy to measure (we need
reflectance spectra)
Rolf Hertling, September 2005
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Eccentricity Problem
DVD 2002/2003
- Unbalance of disc in drive leads to read-write
problems
- Too high eccentricity
- Solution Precise (/- 3µm) measurement of ECC
and automatic display of needed stamper
re-adjustement
Rolf Hertling, September 2005
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Local Defect Problem
Hard coating local defects
DVD-R 2005
- Problem Hard coating defects
- Very low contrast in hard coating Difficult to
detect
- Solution Precise optical setup in scan camera
system - Improve defect contrast for accurate
local defect detection
Rolf Hertling, September 2005
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Process for ReWritable Discs - Problem Layer
Stack Stability
Each 10th disc had different buffer thickness
Sputter systems problem detected inline. Yield
increase of 10 possible!
DVDRW 2004
Moulding
Blank disc
Sputtering
Sputtered disc
Bonding
Final disc
Rolf Hertling, September 2005
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Offline Test Equipment
ETA-ODT
ETA-RT
ETA-GT
Rolf Hertling, September 2005
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Offline Test Equipment
ETA-ODT Offline tester for production control of
standard formats
ETA-RT Offline tester for advanced production
control, Process design and RD
ETA-GT Eccentricity Tester

• Eccentricity and Unroundness,
• Layer shift
• Inner hole diameter
• Lead-in and lead-out diameter
• Eccentricity with outer grooves
• for all optical disc types and stampers,
  including Blu-ray

• 1-Button Measurement of all standard Parameters
  in fast speed
• Tilt, Deviation, VACC, Birefringence,
  Reflectance, Transmittance, Grooves for
  Recordable, OD, Dye Profile, Bonding-Thickness,
  Lacquer)

• All Measurements of ETA-ODT, at all radii, angles
  and single points
• Measurement of n/k material data and all sputter
  layer thicknesses
• Measurement of all RW values
• Standard tester for New Formats

Rolf Hertling, September 2005
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ETA-GT Geometrical Parameters of a Disc or
Stamper
Rolf Hertling, September 2005
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ETA-GT User Interface All Information on one
Glance
Rolf Hertling, September 2005
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Modules Sputter Thickness Measurement and Control

• ETA-STS Sputter control unit for inline use
• Operating of up to two sputter units
• Automatic reflector type recognition
• Measuring the disc on the flight

Thickness range Si 4nm - 35nm Au, Ag,
Al 5nm - 130nm
ETA-STS inline sensor with ETA-STC controller box
Rolf Hertling, September 2005
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Modules ETA-ISS - Inline Substrate Thickness
Measurement
ETA-ISS is a new dedicated inline measurement
system for substrate thickness of half discs

• Main Features
• Inline measurement of substrate thickness of
  half discs
• No need for line I/O signals
• Autorecognition of passing measurement object
  (auto
• trigger)
• High measurement speed (down to 6ms per
• measurement point)

Rolf Hertling, September 2005
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ETA-IS - Scanner User Interface (UI) Software for
defect scanners
The Scanner run independent of UI software, even
with UI software off
Free Configurable Screensets can be assigned
to F-keys
B - quality
Yield100 filtered by orders (sources) and
defects
order (source) management
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ETA-IS - Scanner Setup for Process Control of
DVD-R Dye Coating
Dye coater
Blank half disc
Edge cleaning
Coated disc
ETA-IS 2300 Dye scanner
PLC
ProCon/Dye
n/k Groove geometry
d groove
d
d land
o
r
Target profile setting thresholds
ETA-RT
Rolf Hertling, September 2005
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Production Monitoring System Advanced HERMES
Line 1
Line 2
Line 3
Line n
Production Report
......
HTML
Ethernet
ODBC
ODBC
Reporting tools
Track down production problems from one station!
Plant historian database
ETA-STS
ETA-ISS
Rolf Hertling, September 2005
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Thank You for Your Attention!
Headquarters STEAG ETA-Optik GmbH Borsigstrasse
78-80 D-52525 Heinsberg, Germany Fon 49
2452 96 001 10 Fax [phone]
433 Internet http//www.eta-optik.com
Rolf Hertling, September 2005