Transmission Electron Aberrationfree Microscope TEAM Project

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Transmission Electron Aberration-free Microscope
(TEAM) Project

• unprecedented scientific opportunities for
  observing the atomic-scale order, electronic
  structure and dynamics of individual
  nanostructures
• Dean Miller, Argonne National Laboratory
• Yimei Zhu, Brookhaven National Laboratory
• Ivan Petrov, Frederick-Seitz Materials Research
  Lab, UIUC
• Ulrich Dahmen, Lawrence Berkeley National
  Laboratory
• Ian M. Anderson, Oak Ridge National Laboratory
• Presentation to Office of Basic Energy Sciences
• Germantown, MD October 3, 2002

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with implications for many important areas of
science!
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Feynman anticipates physical basis for chemical
behavior and role of electron microscope
It would be very easy to make an analysis of any
complicated chemical substance all one would
have to do would be to look at it and see where
the atoms are. The only trouble is that the
electron microscope is one hundred times too poor
I put this out as a challenge Is there no way
to make the electron microscope more
powerful? Richard P. Feynman, 1959,
Theres Plenty of Room at the
Bottom Atomic-scale imaging plays a unique
role by defining quantum mechanical boundary
conditions for the electronic structure
calculations necessary to determine how
nanostructures work
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TEAM extraordinary new scientific opportunities
for direct observation of individual
nanostructures

• three-dimensional atomic-scale structure, shape,
  and defect distribution
• spectroscopic identification and location of
  individual dopant atoms
• direct imaging of the atomic-scale structure of
  glasses
• electronic structure of individual point defects
• non-spherical charge density and valence electron
  distribution
• in-situ synthesis of novel nanoscale structures
• e.g., electron-beam lithographic removal of
  individual columns of atoms
• in-situ observation of the synthesis of
  individual nanostructures
• in-situ observation of processing methods
• e.g., thin film growth, oxidation, and
  deformation
• in-situ scientific investigation of dynamic
  materials responses to variations in external
  thermodynamic variables
• e.g., temperature, pressure, stress, chemical
  activity, and applied electric and magnetic fields

all with unprecedented spatial, spectral
temporal resolution
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Why now?A remarkable breakthrough has occurred
in electron optics

• Development of revolutionary aberration-correcting
  devices dramatically improves achievable
  numerical aperture in electron optical systems
• This breakthrough removes the barrier that has
  limited the performance of the electron
  microscope since its invention
• Simultaneous advances in stability of
  electronics, efficiencies of detectors, and speed
  of computers enable new opportunities for
  scientific investigation

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What does aberration correction buy us?
Higher probe intensity!
Smaller probes!
More signal!
Greater sensitivity!
Greater contrast!
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TEAM focusAberration correction also buys us
space!
Space for controlled specimen deformation!

• Aberration correction allows lenses with order of
  magnitude longer focal lengths at same resolution

Space for 3D specimen rotation!

• Modular approach to allow individual scientists
  to develop custom modules that address specific
  scientific questions

• Flexibility in instrument design allows in-situ
  studies of dyna-mical processes

Space for in-situ synthesis characterization
Microscope becomes a self-contained materials
science lab!
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Modular sample holder configurations enable
in-situ measurements of materials behavior
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The TEAM project a science-based approach for
the development of aberration correction

• Unique, state-of-the-art instruments designed to
  achieve the full potential of aberration-correctin
  g optics
• Hybrid instruments operating or on order today
  interface an aberration correcting device to an
  earlier generation microscope
• Instruments tailored to in-situ scientific
  investigation of materials behavior at the
  nanoscale
• Instruments designed in collaboration with
  non-microscopist scientists to address specific
  classes of scientific problems
• Unique instrumentation and supporting expertise
  broadly available to general scientific community
• Impact of investments maximized through location
  of instruments within outward looking user centers

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Status of TEAM Project

• First TEAM Workshop held following 2000 Stringer
  BESAC Panel Review endorsement of TEAM vision
  document
• Scientific Advisory Committee established
• C.B. Carter, U Minnesota J.A. Eades, Lehigh U
  J. Silcox, Cornell U J.C.H..Spence, Arizona
  State U R. Tromp, IBM
• Second TEAM Workshop, July 18-19, 2002 at LBNL,
  comprised 115 participants from 47 institutions
• Strong participation from microscopy and general
  science communities, with strong expressions of
  support for project
• Both TEM and STEM approaches to aberration
  correction under commercial development
• Second generation TEM STEM aberration
  correctors designed
• TEAM Advisory Committee recommends BES EBMCs
  develop full proposal to fund TEAM

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Broad-based TEAM Workshop participation18
universities, 13 companies, 7 national labs, 8
foreign DOE
Stanford University _at_ Massachusetts Institute of
Technology _at_ University of Illinois - Urbana
Champaign _at_ Lehigh University _at_ Arizona State
University _at_ University of Illinois - Chicago _at_
Case Western University _at_ North Carolina State
University _at_ Vanderbilt University _at_ Northwestern
University _at_ UC Davis _at_ University of Washington
_at_ UC Santa Cruz _at_ UC Berkeley _at_ Oregon State
University _at_ University of Minnesota _at_ AMD _at_
University of Pittsburgh _at_ Dupont _at_ Lumileds _at_
Gatan _at_ PNNL _at_ Hitachi _at_ IBM _at_ JEOL _at_ Lucent _at_
MMFX _at_ FEI _at_ LBNL _at_ LLNL _at_ ORNL _at_ BNL _at_ Intel _at_
Nion _at_ PGI _at_ ANL _at_ SNL _at_ Simon Fraser University
_at_ Chalmers University _at_ National Tsing Hua
University _at_ Regensburg University _at_ Monash
University _at_ University of Orsay _at_ CEOS _at_ DOE _at__at_
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TEAM 2002 WorkshopScientific challenges
identified

• Nanomaterials Dresselhaus, MIT
• Synthesis, properties, assembly electronic
  structure
• Semiconductors Eaglesham, Lucent
• The end of the roadmap in Si technology multiple
  nanoscale issues
• Magnetic materials Siegmann, ETH
• Fundamental understanding utilization of
  magnetic nanostructures
• Photonic materials Craford, Lumileds
• GaN will revolutionize the lighting industry
  dopants, point defects
• Computational materials science Diaz de la
  Rubia, LLNL
• Convergence of theory and experiment validate
  theory
• Catalysis Gai, Dupont
• Energy, environment, transportation controlled
  chemical processes

Aberration correction will create fundamentally
new opportunities!
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Opportunity for BESLocating TEAM at existing
EBMCs maximizes scientific impact

• Well established user programs with missions that
  are aligned with BES science goals
• Proximity to nations BES-sponsored synchrotron
  light and neutron sources
• Closely coordinated with BES-funded Nanoscale
  Science Research Centers (NSRCs)
• Necessary infrastructure to support unique
  capability
• broad scientific base, advanced scientific
  computing, technical support, etc.
• Strong record of instrumentation, technique
  development
• Extraordinary level of coordination among EBMCs
  in the development of electron beam
  microcharacterization user centers in general,
  and the TEAM initiative in particular

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The TEM as a materials science laboratory
atomic-scale synthesis and characterization
New science enabled by TEAM
Paradigm shift from 2D to 3D
UHV-TEM
Current state-of-the-art

• Direct 3D atomic-scale imaging of the synthesis
  of nanostructure in a controlled environment

LEEM
STM

• 3D self-assembly controlled by surface
  segregation
• In-situ chemical probes

• In-situ measurements of behavior of individual
  nanostructures

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New science through in-situ multi-probe
measurements
CNT

• STM/AFM
• Four-point probes
• Indentation
• Magnetic/
• electric probes

e-
TEM
STM
STM
Doped nano-peapods Yazdani, Science, 2002.
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Science of catalysts 3D atomic-scale morphology,
composition, and chemical state
Current state-of-the-art At right, fuel cell
Cu/ZnO catalyst particles changing shape in
response to gaseous environment Hansen et al.,
Science 295, 2055 (2002). New science enabled by
TEAM Model system for redox catalysis Oxidation
of CO by Pt on titania

• Key Scientific Questions
• How does 3D morphology of catalyst particle and
  its wetting to oxide support vary with T, pi, i
  O2, CO, CO2, etc.?
• How is oxygen transported to particles to effect
  redox reaction (e.g., CO to CO2)?
• What is physical extent of chemically reduced
  area of substrate in vicinity of active metal
  particle?

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Science of semiconductors 3D atomic-scale
elemental distribution and nanoscale structure
Current state-of-the-art

• New science enabled by TEAM
• Local 3D elemental distribution through
• Atomic resolution TEM STEM tomography
• Single atom sensitivity in STEM across most of
  periodic table
• Local nanoscale structure through
• Nanocrystallography

P.M. Voyles, D.A. Muller et al., Nature 416, 826
(2002)
Local elemental distribution key to developing
GaN for solid state lighting N, O distribution,
amorphous material key for Si gate oxide
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Science of superconductors simultaneous imaging
of structural defects, magnetic fields
Current state-of-the-art

• New science enabled by TEAM
• Location of vortices relative to pinning
  structural defects via simultaneous high
  resolution and magnetic imaging
• Magnetic structure in vortex core
• Proximity effects at interfaces (e.g., magnetic
  superconducting)
• Methods
• Phase reconstruction (Coene, Thust) defocus
  series enable long exp.times
• Cs-corrected Lorentz TEM
• Electron Holography
• Lorentz STEM (0.1 nm dedicated)

Lorentz micrograph of chain-lattice state of
vortices in Bi-2212 film SCIENCE 294, 5549, 2136
(2001)

• Resolution limit of 2 nm insufficient for
  simultaneous imaging of structural defects

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Science of nanoscale functional materials
non-spherical charge density, electron orbitals
spin
Current state-of-the-art

• New science enabled by TEAM
• Non-spherical charge density electron orbitals
  via quantitative small-angle electron scattering
• Structure, bonding in aperiodic and amorphous
  materials
• Scientific understanding of spin dynamics
  switching behavior of magnetic nano-arrays
• Methods
• Development of ultra-fast (104 frames/s)
  solid-state detector
• Position-sensitive, coherent interferometric
  diffraction for 5D structure (3r 2q)
• Real-time phase retrieval for in-situ mapping of
  electro- magneto-static potential, field

Valence electron distribution in MgB2. Left
2D line contour Right 3D map
35 Oe
0 Oe
Local magnetization induction distribution of
magnetic Co arrays
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Conclusion TEAM will enable scientific discovery
that cant otherwise be achieved

• Science-based approach for the development of
  aberration correcting electron optics
• Unique in providing 3D atomic-scale structure and
  dynamics of individual nanostructures
• From 2D to 3D from atomic columns to atoms
  from static to dynamic
• TEAM concept transforms electron microscope from
  imaging instrument into self-contained materials
  science laboratory
• Individual scientists able to develop
  experimental modules that interface with unique
  TEAM microscopes to address specific scientific
  questions
• New opportunities for materials discovery through
  combined atomic-scale characterization and
  in-situ synthesis
• Direct observation of nanoscale synthesis at
  atomic resolution
• Feynmans Holy Grail unique role by defining the
  quantum mechanical boundary conditions for the
  electronic structure calculations necessary to
  determine how nanostructures work