Binning option in PSP 101'0

1
Binning option in PSP 101.0

• PSP Group
• March 2006

2
Outline

• Introduction
• Basic binning scheme
• Geometrical scaling rules for binning
• Summary

3
Introduction

• Ideal situation
• One global parameter set for the whole geometry
  range of a process
• Real life
• Difficult to keep geometrical scaling rules in
  tune with technology developments

4
Introduction

• In real life sometimes binning has to be used
• Divide the geometry range
  of a process in a number of bins
• One global parameter set
  for each bin

5
Outline

• Introduction
• Basic binning scheme
• Geometrical scaling rules for binning
• Summary

6
Basic binning scheme

• Prerequisite
• No parameter jumps at the borders of the bins
• This is not guaranteed using the physics-based
  geometrical scaling rules

7
Basic binning scheme

• Binning scheme for PSP
• New geometrical scaling rules for binning have to
  be developed
• PSP uses the concept of local parameters
• Assumption local parameter sets
  are available at the
  corners of the bins
• Requirement exact reproduction
  of local parameters at the corners
  of the bins
• Define binning rules in terms of
  effective length and width

8
Basic binning scheme

• Goal

Push-button solution to go from local parameter
sets at bin corners to global parameter sets
for each bin
9
Outline

• Introduction
• Basic binning scheme
• Geometrical scaling rules for binning
• Summary

10
Geometrical scaling rules for binning

• 4 types of physics-based parameter scaling in
  PSP (first-order geometrical dependence only)
• type I
• type II
• type III
• type IV (no binning)

11
Geometrical scaling rules for binning

• type I physics-based scaling rule
• type I scaling rule for binning
• scales like 1/LE for constant WE
• scales like 1/WE for constant LE
• exact reproduction of local parameters at bin
  corners
• no parameter jumps at bin borders
• parameters in binning scaling rules can be
  calculated from local parameters at bin corners

12
Geometrical scaling rules for binning
Example for calculation of one of the parameters
13
Geometrical scaling rules for binning

• type II physics-based scaling rule
• type II scaling rule for binning
• scales like LE for constant WE
• scales like WE for constant LE
• exact reproduction of local parameters at bin
  corners
• no parameter jumps at bin borders
• parameters in binning scaling rules can be
  calculated from local parameters at bin corners

14
Geometrical scaling rules for binning

• type III physics-based scaling rule
• type III scaling rule for binning
• scales like 1/LE for constant WE
• scales like WE for constant LE
• exact reproduction of local parameters at bin
  corners
• no parameter jumps at bin borders
• parameters in binning scaling rules can be
  calculated from local parameters at bin corners

15
Geometrical scaling rules for binning

• type IV physics-based scaling rule
• type I scaling rule for binning of some type IV
  pars
• exact reproduction of local parameters at bin
  corners
• no parameter jumps at bin borders
• parameters in binning scaling rules can be
  calculated from local parameters at bin corners

16
Geometrical scaling rules for binning
type
III
30
XCOR
yes
type
I
66
FNT
no
no
31
STXCOR
no
no
67
NFA
yes
type
I
32
FETA
no
no
68
NFB
yes
type
I
RS
NFC
33
yes
type
I
69
yes
type
I
34
STRS
no
no
70
DTA
no
35
RSB
no
no
1
17
Summary

• Binning scheme for PSP
• Additional geometrical scaling rules for binning
• Exact reproduction of local parameters at bin
  corners
• No parameter jumps at bin borders
• Parameters in binning scaling rules can be
  explicitly calculated from local parameters at
  bin corners
• Only local parameters at bin corners are needed
• No fitting of geometry scaling required
• Push-button solution for parameters binning
  scaling rules
• This procedure has been used for MOS Model 11
• 180nm, 120nm, 90nm and 65nm technology nodes
• Very successful