Title: VEECO NANOINDENTER
1VEECO NANOINDENTER
2Multimode NanoScope 3D
3Multimode NanoScope 3D
4Atomic Force Microscope (AFM)
- Nanoindenting/Scratching
- Contact Mode AFM
- TappingMode AFM
- Torsional Resonance Mode AFM
- Phase Imaging
- Lateral Force Microscopy (LFM)
- Magnetic Force Microscopy (MFM)
- Scanning Tunneling Microscopy (STM)
- Force Modulation
- Electric Force Microscopy (EFM)
- Surface Potential Microscopy
- Force-Distance and Force-Volume Measurements
- Electrochemical Microscopy (ECSTM and ECAFM)
- LiftMode
5Nanoindenting/Scratching
Nanoindenting is a new method to characterize
material mechanical properties on a very small
scale. Features less than 100 nm across, as well
as thin films less than 5 nm thick, can be
evaluated. Test methods include indentation for
comparative and quantitative hardness
determination and scratching for evaluation of
wear resistance and thin film adhesion.
6Scanning Technique with Multimode SPM Contact
AFM Measures topography by sliding the probes
tip across the sample surface. Operates in both
air and fluids. Contact mode AFM is the only AFM
technique, which can obtain "atomic resolution"
images. Tapping Mode AFM Measures topography
by tapping the surface with an oscillating tip.
This eliminates shear forces, which can damage
soft samples and reduce image resolution. Tapping
Mode is available in air and fluids (patented).
This is now the technique of choice for most AFM
work. Phase Imaging Provides image contrast
caused by differences in surface adhesion and
viscoelasticity. Requires an Extender
Electronics Module (patent pending). Non-contact
AFM Measures topography by sensing Van der
Waals attractive forces between the surface and
the probe tip held above the surface. Provides
lower resolution than either contact AFM or
Tapping Mode.
7Scanning Tunneling Microscope (STM)
- The first SPM
- Atomic resolution capability in 1981
- The tunneling current maps the electronic
density of states at the surface - Unlike AFM, cannot image insulating materials
- Scanning tunneling spectroscopy (STS)
characterizes the local electronic structure of
surface
8Magnetic Force Microscopy (MFM)
- Magnetic force microscopy (MFM) images the
spatial variation of magnetic forces on a sample
surface. Resolution 1025 nm.
9MFM
- The system operates in non-contact mode. An image
taken with a magnetic tip contains information
about both the topography and the magnetic
properties of a surface. Which effect dominates
depends upon the distance of the tip from the
surface, because the interatomic magnetic force
persists for greater tip-to-sample separations
than the van der Waals force. If the tip is close
to the surface, in the region where standard
non-contact AFM is operated, the image will be
predominantly topographic. As the separation
between the tip and the sample increases,
magnetic effects become apparent.
Topography MFM
Magneto-optical disk
10Electrostatic Force Microscopy (EFM)
Tip Si cantilevers with conductive coating.
The grounded tip first acquires the surface
topography using the tapping mode. A voltage
between the tip and the sample is applied in the
second scan (Lift-Mode 50 to 100 nm) to collect
electrostatic data. EFM measures electric field
gradient and distribution above the sample
surface. EFM is used to monitor continuity and
electric field patterns on samples such as
semiconductor devices and composite conductors,
as well as for basic research on electric fields
on the microscopic scale.
11Quadrex
For measurements with MFM and EFM.
12Electrochemical Scanning Tunneling Microscope
(ECSTM)
- Essential tool in the study of electro-chemical
interfaces in surface electrochemistry. - Combines SPM with electrochemical control to
study electrode surface structures, properties,
and reactivities down to the atomic scale. - The practice of ECSPM falls into two categories
in situ and ex situ.
13Electrochemical Atomic Force Microscope (ECAFM)
- Liquid cell set-up
- Case study with in-situ imaging and EC cell
potential control - Metal deposition variable ph and variable
cell potential
14Scanning Electrochemical Potential Microscopy
(SECPM)
- Imaging
- In-situ
- Real-time
- True atomic resolution is possible
- Measure profile of Electrochemical Potential
- Comparison with STM, SECM
15Universal Bipotentiostat
- Compatible with ALL DI Nanoscope controllers and
microscopes - 7 decades of gain (100nA/V to 100mA/V)
- Current resolution of 100 pA
- Supports ECAFM in TappingMode
- Supports SECPM and STM/STS