Thermal Management of IGBTs using

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Thermal Management of IGBTs using
Micro-Capillary Pumped Loops Prof. Scott K.
Thomas (WSU) Dr. Kirk L. Yerkes (AFRL/PRPS) Prof.
Dorian Liepmann (UC Berkeley)
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What is a µCPL?

• Passive heat transfer device (no moving parts)
• Two-phase (evaporation/condensation)
• Fabricated onto silicon chip using standard
  photolithographic techniques

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Silicon/Borosilicate Glass Sandwich
Vapor/liquid lines in silicon Evaporator/condenser
grooves in glass
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Experimental Setup at AFRL/WPAFB
Heat input CO2 laser Heat output water-cooled
calorimeter (0.12 W 10) Insulation Vacuum
chamber w/ thermocouple, power and water
feedthroughs
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Mounting Fixture for µCPL
Acrylic holding fixture to reduce parasitic heat
losses XYZ stage for positioning within the
vacuum chamber
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Copper Calorimeter
Mounted to µCPL using RTV sealant Constant head
reservoir controls mass flow rate Thermocouples
located within vacuum chamber Direct mass flow
rate measurement
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Flow Visualization