Dip-pen Nanolithography

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Dip-pen Nanolithography

• Yu Shi
• Dept. of Materials Science Engineering

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From microscopy to lithography
Scanning probe microscope
electron microscope
optical microscope
?
photolithography
E-beam lithography
10-6m
10-7m
10-8m
10-9m
10-10m
10-5m
10-11m
If you can see, then you should be able to write
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History and origin
4,000 years ago Invention of
AFM in 1986
1995 by Jaschke Butt
1999
Butt et al. Langmuir 11, 1061 (1995). Mirkin et
al. Science 283, 661 (1999).
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Principle
Source http//www.nanoink.net
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Principle
Mirkin et al. Science 283, 661 (1999).
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Extended capabilities I
Mirkin et al. Nature Nanotechnology 2, 145 (2007).
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Extended Capabilities II
55,000 cantilevers and 88,000,000 gold dots!
Mirkin et al. Nature Nanotechnology 2, 145 (2007).
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Compare contrast
Source http//www.nanoink.net
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Thank you!

• Q A

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Chemistry I
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Chemistry II
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Idea from Mirkin

• DPN is finding applications in certain areas
  that impact the semiconductor industry such as
  mask fabrication, inspection and repair
• However, its unique attributes have positioned
  it on a different path aimed largely at
  exploiting the properties and applications of
  nanopatterned soft materials
• -- C. A.
  Mirkin (2007)

Mirkin et al. Nature Nanotechnology 2, 145 (2007).