Local workshop on e-beam lithography and related

1
Local workshop on e-beam lithography and related

• QEPL/Chalmers
• May 9, 2003

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Agenda

• Drawing software
• AutoCAD
• Conversion (Alexi)
• Multiple current lithography and alignment
  strategies
• Other
• CASINO software
• the scattering of electrons by matter (Serge)
• MgB2 vs YBCO a nice case of substrate dependant
  dose (Serge)
• Proximity effect simulations (Serge)

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Common references

• From the SNL webpages
• http//fy.chalmers.se/assp/snl/
• JEOL_EXPRESS_Manuals
• Lithography operation guide
• BEAM 4TH
• BEAM 5TH
• Others
• JEOL-EOS-tables.pdf

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From users

• References from S. Charlebois
• Serges notes EBL and using AutoCAD
• Serge's references for students
• Multi-chip holder sketch
• JEOL Cassette
• References from other users?
• JEBCAD
• To have default colors for various doses, place
  this script in the root directory
  JEBCAD_INITIAL.COMMAND