MAS.961 Special Topics: How To Make Something That Makes (almost) Anything

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MAS.961 Special TopicsHow To Make Something
That Makes (almost) Anything NanoFabrication
J. Jacobson MIT 02/17/09 jacobson_at_media.mit.ed
u
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Outline

• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies

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Immersion Lithography
22-nm immersion interference lithography T. M.
Bloomstein, M. F. Marchant, S. Deneault, D. E.
Hardy, and M. Rothschild 10 July 2006 / Vol. 14,
No. 14 / OPTICS EXPRESS 6434 Received 11 May
2006 revised 23 June 2006 accepted 23 June 2006
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Immersion Lithography
(Air)
(Liq)
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Stereolithography
Speed
Resolution Two Photon
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Laser CVD
Mechanism Pyrolitic (Heating in absense of O2)
Chemical Vapor Deposition (500 to 2000C local
temperature). Rates Fiber growth rates gt 2
mm/s,metals and ceramics. Linear growth rate of
200 mm/s Carbon volumetric deposition rate of 50
mm3/s carbon. Materials Cu, Au, Si, Al, W, C,
WC, B, TiC, TiN, SiC, and Si3N4.
http//www.me.gatech.edu/Lackey/nsfgranteesjan02.p
df
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LENS (Laser Engineered Net Shaping)
www.optomec.com
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Outline

• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies

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Dip-Pen Nanolithography
Mirkin et. al.
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Contact Mode Nanoparticle AFM
Hubert et.al.
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Massively Parallel Dip-Pen Nanolithography with
55 000-Pen Two-Dimensional Arrays   
Massively Parallel Dip-Pen Nanolithography with 55 000-Pen Two-Dimensional Arrays    
Chad A. Mirkin, et. al. 1 Angewandte Chemie Volume 45, Issue 43, Pages 7220-7223
http//mass.micro.uiuc.edu/research/current/nanoli
thography/2006-focus-intro/slide12.html
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Solder Jet
25 micron resolution
http//www.microfab.com/research_areas/electronics
/electronics.htmanchor250555
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Outline

• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies

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Cost Per Resolution Element The Case for Printed
Electronics
Can we use this map as a guide towards future
directions in fabrication?
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Imprint Lithography
Stephen Chou (Michigan/Princeton) et. al.
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Step Flash Lithography
http//www.molecularimprints.com/Technology/techno
logy2.html
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MultiLayer Step and Flash Lithography
Emerging Lithographic Technologies X, edited by
Michael J. Lercel, Proc. of SPIE Vol. 6151,
61510J, (2006) 0277-786X/06/15 doi
10.1117/12.655604 Proc. of SPIE Vol. 6151 61510J-1
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HP Self Aligned Imprint Lithography - SAIL
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Offset Liquid Embossing (OLE)
Nanoparticle Inks
Bulthaup et. Al. APL 79(10) 1525 (2001)
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Nanomoulding with Amorphous Metals Golden Kumar,
Hong X. Tang Jan Schroers
Vol 457 12 February 2009 doi10.1038/nature07718
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Outline

• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies

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Focused Ion Beam
FEI Corp.
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Focused Ion Beam - Milling
NanoLathe
FIB Fabricated Stamps
http//www.siint.com/en/technology/ion_beam_applic
ations_e.html
Toshiaki Fujii, and Takashi Kaito
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Focused Ion Beam - Writing
FIB Fabricated MOSFET
FIB Pt CVD
FIB CVD Pt (gate electrode)
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E Beam Metal Melting
ARCAM.Com
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Electrospinning
http//www.che.vt.edu/Wilkes/electrospinning/elect
rspinning.html
https//www.uni-marburg.de/fb15/ag-wendorff/resear
ch/Electrospinning/fiber-hair
http//en.wikipedia.org/wiki/Electrospinning
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1D and 2D Composites
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Notes
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Objet Ink Jet UV Cure
16 micron layers
http//www.2objet.com