???

1
???ß??µata µ??a????? s?µpe??f???? se s?st?µata
?ßa?t???? d?ast?se??

• ???µa ????? ??t??
• 8? e??µ??? S.?.?.F.?
• ?p?ß??p?? ?. ??pt??

2
?e??e??µe?a

• ??sa????
• ?d??t?te? ?a? efa?µ???? t?? NEMS
• ?ßa?toµ??a???? ?a? NEMS
• ?ßa?t??? ???a- ???? t?? ?ßeßa??t?ta?
• ?e?????? a????e?s?? t?? µ??a????? µetat?p?s??
• S??e??? ?a??µ??a????? ?a? ?ßa?t?µ??a?????
• NEMS st?? e?e?e???s? t?? ?ßa?t???? ??sµ??.
• ??ß?????af?a.

3
?st?????There's plenty of room at the bottom

• ????? t?? 1950 ? Richard Feynman p??sfe?e 1000
  ?? p?????s? se ?p??? ?a ?at?fe??e ?a d?µ??????se?
  µ?a ??e?t???? µ??a?? µ????te?? ap? 1/64th µ?a?
  ??tsa?. ? McLellan, µet? ap? ?????ß??e?
  p??sp??e?e?, ???s?µ?p????ta? ts?µp?d???a ?a?
  µ????s??p?? t? ?at?fe?e.
• ? µ??????e?t??µ??a????, microelectromechanical
  systems (MEMS), ?e????se ?a a?apt?sseta?
  s?st?µat??? µet? t? 1980 ?a? e?a??????e? ?a
  a?apt?sseta? µe te??st?a p???d?.
• NEMS

4
NEMSnanoelecromechanical systems

• ?p?te????ta? ap? µ?a ?a??µ??a???? d?µ? ?a? ??a
  ??e?t???? µetat??p?a a??????? d?ast?se??.
• ?a??µ??a???? d?µ? ??a? p??ß???? (d??. ??ßd??
  ste?e?µ??? st? ??a ????) µ?a ??f??a, ??a?
  st??f?a? ?t?.,µe s???e???µ??? s????t?ta
  s??t???sµ??.
• ??e?t??????? µetat??p?a? ??a µ?????e-?t????a??
  transistor, µ?a ?ßa?t??? ??????da Q.D ap?
  ?µ?a????µ? ????? ?t?.

5
.

• Ge???? a?apa??stas? ??e?t??µ??a????? s?s?e???,
  ?p?? d??eta? ??p??a µ??a???? d???e?s? st?
  µ??a???? s?st?µa, st? s????e?a ? ??e?t???????
  µetat??p?a? a????e?e? t?? µ??a???? ap????s? t??
  s?st?µat?? ?a? t? µetat??pe? se a?????? ??e?t????
  s?µa e??d??.

6
?? ?a????e?t??µ??a????? d?µ?? p??s?????? ta
ap???ta ???a t?? ?ßa?t?µ??a?????

• G?a t?? efa?µ??? t?? NEMS st?? te??????????
  ?atas?e??? ?a p??pe? ?a s?µpe????ß??µe µe ???e
  ?ept?µ??e?a st??? ?p?????sµ??? µa? ta ?ßa?t???
  fa???µe?a, µ?a ?a? ta s?st?µata a?t? ß??s???ta?
  st?? ?d?a ???µa?a µe ta ?t?µa, p?? e??a? ta µ??a
  e?e??e?a ?ßa?t?sµ??a s?µ?t?a st? f?s?.

7
???µa?a t?? p?a?µ?t????a s?????t??? p??s????s?
t?? ?EMS
8
?d??t?te? t?? NEMS

• ? ????a?? ?d??s????t?ta µ??. s?st?µ?t??
  
• ?e?????ta? t? µ??e??? t?? s?st?µat?? ?a?
  d?at????ta? t? d?µ? t????0 a????eta?
• ??a ????? s????t?ta µetaf???eta? se ??a µ????
  ????? ap????s?? st?? efa?µ???µe?e? d???µe??.(se
  ap??? d?µ??)

9
?d??t?te? t?? NEMS

• S?st?µata ?????? p???t?ta? (µe????? pa-?????ta?
  p???t?ta? Q)
• ??e???? e?a?s??s?a st??? e??te?????? µ??a??sµ???
  ap?sßes??.
• ?Te?µ?µ??a????? ????ß?? 1/Q, ?atast???
  t??a??? µ??a????? d?a??µ??se??
• ?atas?e?????ta? ap? s?µßat??? ?µ?a????µa ?????.
• ???e?t?????? ?a? µ??a???? st???e?a st? ?d?? chip

10

• S?st?µata ?aµ???? ?s????.
• ???µa ?a? a? 1 e?at?µµ???? t?t???? s?-s?e???
  d???e???? ta?t?????a, ? s??????? ?s??? p?? ?a
  ?ata?????e ???????? t? s?st?µa de ?a ?epe????se
  t? 1microwatt.
• ??t? ? e????e?a p?? ?ata?a???eta? e??a? 3-4
  t??e?? µe?????? µ????te?? ap? t?? e????e?a p??
  ?ata?a?????? ?? s?µßat???? ??e?t????-???
  epe?e??ast??, p?? ?e?t??????? µe a?ta?-?a??
  pa??t?? ??e?t????? f??t???
• (?a? ??? µe µ??a???? st???e?a)

11
?fa?µ????

• ???? t?p?? ???????? µ????s??p??? a????e?s??
  d???µe??.
• ?p?????sµ?? d???µe?? µeta?? ß??µ?????
• ??s??t??e?
• ????? e?a?s??s?a st?? p??s?ete? µ??e?, a??µa
  ?? a? p???e?ta? ??a ??a µ???? a???µ? at?µ?? p??
  ap????f??ta? st?? ep?f??e?a.
• ???a???? a????e?s? t?? ??e?t????a?? spin. ?d?µ???
  ape?????s? p??te????,
• 3D ??µ??? ape?????s? at?µ??-µ?????
• ?ßa?t???? ?p?????st???qubits

12
? p??t? µ??a?? ?a?????µa?a? p?? ft???t??e-Berkley
California

• St??f?a? ap? ???s? 500nm.
• ????a? ? ?a??s????a? ????a?a d?aµ?t???5-10nm

13
?ßa?t?µ??a???? ?a? ?EMS

• ?a??? ? ?a?da?a p???d?? st? sµ?????s? t??
  ?µ?a????? ?d??e? p??? µe???? t?? chip µ????te?a
  100nm, ?? µ??a????? ?a? ?? f?s???? ß??s???ta?
  a?t?µ?t?p?? µe t?? pa???s?a t?? ?ßa?t?µ??a?????,
  ? ?p??a st?? ???µa?a a?t? a?ade????e? t??
  ??µat??? s?µpe??f??? t?? s?µat?d??? ?? ????a???
  s?µpe??f???.

14
The Quantum realm

• ?ßa?t??? Fa???µe?a e??a? p???? d?a???t? st?
  e??ast????
• ?? ?ßa?t??? fa???µe?? Casimir ??e? a????e??e? ?
  e??t??? d??aµ? Casimir, t???? pN µ?s? t??
  ????s?? p?? p?????ese st? µ??a???? d?µ?.
• ???2. ???a????? s??t???st?? ??a a????e?s? t??
  d??aµ?? Casimir. (Indianapolis)

15
?ßa?t?µ??a???? ?a? NEMS

• ? Vladimir Braginsky ?a? ? Farid Khalili(1992)
  p???ß?e?a? st? ß?ß??? t??? ??a ?ßa?t????
  µet??se?? ?t? ?a ?p???e? µ?a ep??? ?p?? ?
  ?ßa?t??? ?e???a ?a ??e? ?e?t???? ???? st??
  eµp????? ß??µ??a??a, s?µe?a, p??s?????µe a?t? t??
  ep??? ?p?? ?? µ??a????? ?a s?µpe????ß??? a??µesa
  st?? sta?e??? t??? t? sta?e?? t?? Plank h.
• ?? p??t?? ep?st?µ??e? p?? d?ap?st?sa? ?t? ?
  e?a?s??s?a t?? µ??a????? a????e?t?? pe??????eta?
  ap? ??p??a ap???ta ???a p?? ??te? ? a??? t??
  aßeßa??t?ta?, ?ta? ?? ep?st?µ??e? p?? µe?et???
  t?? a????e?s? ßa??t???? ??µ?t??.

16
?ßa?t??? ???a

• ?? ?e?µ???? ?a? ?? ?ßa?t???? e?d??e?e??
  d?a??µ??se?? ?????et??? t?? e?a?s??s?a t??
  a????e?t?.
• ?a ?ßa?t??? ???a se µ?a µ??a???? d?µ?, e?a?t??ta?
  ap? t?? ?d??s????t?ta ? ?a? t? ?e?µ???as?a ? t??
  s?s?e???.
• ?p??t?? ?ßa?t???? d?a??µa?s?? t?? d?µ??
• ??a?????ta? p???t?ta? t?? ta???t?s?? Q.

17
?a??µ??a???? d?µ?

• ??????s? µeta?? ta???t?s?? t?? ?a??µ??a?????
  d?µ?? ?a? f???????.
• ??a??µ??a???? d?µ? ?aµ???? s????t?ta?,
  ep??e??eta? ap? t?? s?????a??? s?????e? t??
  s?s?e???.
• ?f?????a ta?a?t?se?? µe µ??? ??µat?? µ????te?a
  ap? t?? d?ast?se?? t?? s?s?e???.
• ? ??as??? µ??a????, µe pa?aµ?t???? ?p?? ?
  p????t?ta,t? ?,µp??e? ?a pe?????fe? t??
  e?e??e?a?? ?at?stas? t?? ?a??d?µ??(100nm)
• ?? ?t? ? ?ßa?t?µ??a???? µp??e? ?a efa?µ?ste?
  a??µa ?a? se µe???e? µ??a????? d?µ?? e??a?
  ap??? µ?a ?p??es?- p?????s?.

18
?ßa?t??? ???a ???µ??a????? s??t???st?

• ?e ß?s? t?? ?ßa?t?µ??a????, ? e????e?a t??
  µ??a????? s?st?µat?? e??a? ?ßa?t?sµ???.
• ?h?(?1/2),
  ?0,1,2
• ? ?eµe???d?? ?ßa?t??? ?at?stas? ??e? aßeßa??t?ta
  ??s?? (p??t?? ?ßa?t???? d?a??µa?s??)
  
• ? p?s?t?ta a?t? e??a? ???st? ?? the standard
  quantum limit.
• ?s? p?? µe???? e??a? t? p??t?? t?? ?0
  ?d???at?stas?? t?s? p?? e????a a????e?eta?-p??sd??
  ???eta?.
• ?a??s????e? ????a?a ????? ??SQL10-10m pe??p??
  ?s? µe t? µ??e??? e??? µ????? at?µ??. ??t? ?
  s?et??? µe???? t?µ? ?a??st? t??? ?a??s????e? ??a
  ap? ta p?? e?d?af????ta s?st?µata ??a t? µe??t?
  t?? ?ßa?t???? fa???µ???? st?? µ??a????? d?µ??.
  ?? ?a??s????e? ????a?a e??a? t??a ?
  ?????? ?p???f??? ??a ?a a?t??atast?s??? t?
  p???t?? ?ta? ? pe?a?t??? sµ?????s? t?? d?ast?se??
  t?? ?????µ?t?? ?a ???e? ad??at?. (se 10 ? 15
  ?????a pe??p??)

19
???? t?? ?ßeßa??t?ta?

• ??s? a???ß?? µp??e? ?a e??a? ? s??e???
  µ?t??s? t?? ??s?? e??? a?t??e?µ????? ????ß??
  e?t?p?sµ?? ??s?? ?a? ??µ???
• ???? t?? ?ßa?t???? d?a??µ??se?? t?? µ??a?????
  s??t???st?, t?? µetat??p?a ?a? t?? e??s??t?
  s?µat?? e??d??. ? e????st? d?a??µa?s? t??
  ?ata??af?µe??? ??s? e??a?

20
?e?????? a????e?s?? µ??a????? µetat?p?s??-??e?t??
??? µetat??p?a?

• ??????s? ??a t?? te???????a t?? ???S!
• ?????e?s? ?a??? ?a? µetat??p? t?? µ??a?????
  µetat?p?s?? se ??e?t???? s?µa e??d??.
• ???. ?a??µ??a????? s??t???st?? s??dedeµ???? µe
  s??a??a sta?e??? ?e?µat??

21
?e?????? a????e?s?? µ??a????? µetat?p?s??

• ?pt??? a????e?s?. ???s?µ?p??e?ta? se at?µ???
  µ????s??p?a ?a? ???a s?st?µata MEMS a??? de?
  ?e?t????e? ?a?? sta NEMS.
• ?e a?t? t?? te????? p??sfata ep?te?????e ?
  a????e?s? ????s?? µ????d???? p?? p????????e ap?
  ??e?t????a?? spin!
• ???aµ? p?? p???a?e? t? p??????? spin 10-18N
• 1000 f???? µ????te??
• ? electron's magnetic moment is 658 times
  stronger than a proton's!!

22
?e?????? a????e?s?? µ??a????? µetat?p?s??

• Ma???te?e?t??? te????? ?p??????e? t??
  ??e?t?e?e?t??? d??aµ? p?? d?µ?????e?ta? ?ta? t?
  µeta????? st??µa p?? ß??s?eta? p??? st?? µ??a????
  s??t???st? ???e?ta? ???eta st? µa???t??? ped??.

23
?e?????? a????e?s?? µ??a????? µetat?p?s??

• S??des? ?a??µ??a????? ta?a?t?t? µe µ?a e?d??µes?
  ?a????e?t?????? s?s?e?? - e??s??t? ?p?? µ?a
  ?ßa?t??? te?e?a QD, ??a ?ßa?t??? s?µe?? epaf?? ?
  ??a µ???-??e?t????a?? transistor (SE?).
• ?a SE? µp????? ?a ft?s??? ta ?ßa?t??? ???a ??a
  t?? a????e?s? ??s?? t?? NEMS!

24

• G?a t? ße?t??s? t?? NEMS
• ?ße?t??s? st?? µe??d??? µetat??p?? s?µat?? se
  ?????te?e? s????t?te? s??t???sµ??.
• ?ße?t??s? st?? µe??d??? ????? t?? s?st?µat??
• ???.2 ?a??µ??a????? s??t???st?? s??dedeµ???? µe
  SE?.(University of California Santa Barbara)

25

• ????? ????-d?ast?se?? e??µ???? µe SE?

26

• ???tas? ???s? s?s?e??? ap? µ???st??µat?????
  ?a??s????e? ????a?a.
• (µ???a?? µ??a???? s?st?µata s??a?µ?????µ??a µe
  at?µ??? a???ße?a)
• ?? ep?st?µ??e? t?? ??? d?µ??????sa? t?? p??t?
  d??ta?? transistor ap? ?a??s????e? ????a?a, p??
  µp??e? ?a ???e? d??at? t?? pa?a???? µ????te???,
  ta??te??? ?a? µ????te??? e?e??e?a??? ?ata????s??
  microchips se s?????s? µe ta ?d? ?p?????ta chip
  p???t???. St?? ?d?a e??as?a ?? ep?st?µ??e?,
  de?????? p?? µp????? ?a d?aµ??f????? ?a??s????e?
  µe t?? ep???µ?t?? ??e?t????? ?d??t?te? ?a? p??
  µp????? ?a ?atas?e?ast??? transistor ped??? µe
  ?p???d?p?te ep???µ?t? ??sµa ?????.
• ???.???µ???µe??? ?a??s????a? ????a?a p??
  ?e?t????e? ?? µ??a????? s??t???st?? se s????t?te?
  ap? 3-300??z. (University Cornell)

27
S??e??? ?a??µ??a?????-?ßa?t?µ??a?????

• ?ßa?t??? s?µpe??f???? ?ßa?t??? e????e?a, ?p???es?
  ?atast?se??, e?????? t?? ?ßa?t???? s?µf???a?,
  entanglement ?.?
• S?µe?a? ?p???e? ? te???????a ?a pa?at????e? ?
  ?ßa?t??? s?µpe??f??? ?a? µe µ??a????? s?s?e???
  (?a??d?ast?se??)
• ????? s?µe?a? pa?at???s? µ??? µ?s? SQUID
  (?pe?a????µ? s?s?e?? ?ßa?t???? s?µß????), ?a?
  Q.D.
• ?? s??e?e?? ??aµµ???? ?p?????sµ?? ??s?? de
  µp????? ?a d?a??????? t?? ??as??? ap? t??
  ?ßa?t??? ?at?stas?? ?????e?s? e????e?a?.

28
S??e??? µ??a????? d?µ?? µe s?st?µa d?? ?ßa?t????
?atast?se??

• ?????e?s? ap??? e-spin ap? t?? ?µ?da t?? Rougar
  st?? IBM.
• ??ta??a?? e????e?a? t?? µ??a????? ta?a?t?t?
  ?a? t?? spin.? ?p??a p???a?e? µ???? µetaß??? st?
  s????t?ta ta???t?s?? t?? d????. ? µetaß???
  ?ata???feta? ap? ??a s?µß???µet?? laser.

29
Magnetic Resonance Force Microscope Locates a
Single Electron Spin Inside a Glass Slab

• ?????? µ??????sta??o Si
• 85µm µ????,100nm p??t??.5KHz
• ?a???t?? samarium-cobalt, µe p??? µe???? ???s?
  ?.
• ?????e?s? s?µat?? ap? t? s?µß???µet?? e??a?
  ef??t? µ??? ?ta? d?a??pe? ?a? epa?aefa?µ?ste? t?
  µetaßa???µe?? ?. Se ?1?.
• ? ????f? st? s??µa de???e? t? ??s? t?? spin p???
  st?? ????a ape?????s??(s???s??) ??s??.
• G?a stat??? ?? 34mT ?a? 30mT
• ??t?p?sµ?? t?? fa???µe??? ??s?? t?? spin 25nm.

30
? ????s? t?? spin se µetaßa???µe?? µa???t???
ped?? µa???t???? s??t???sµ??.

• Sta?e?? ped?? ???-µ??qBo/2mc sz µe 2 ?d??t?µ??
  (sz-1/2)
• G?a ?a p???a??s??µe e?e??e?a??? µetaß?se???
  ????cos?t.x (??????? µetaßa???µe??) ?ste ?a
  e??a? ef??t? ? µetaf??? e????e?a? ap? t? p???
  t?? ? st? ??e?t?????.
• S????t?ta s??t???sµ?? ?? t?? 2 st??µ??
  e????e?a?.
• ?0(?-?-)/h
• ??? ?1-µ??-µ?1

31

• ???tas? ap? t?? ?µ?da t?? Caltech
• ????a???? a?????? t?? laser ???s??s? t??
  µ??a????? ta?a?t?se?? µe e?a?a??asµ??e?
  µetaß?se?? Zeeman.

32

• ?p???es? t?? e??te?????? B0 ?a? t?? ??ped??? t??
  µa???t? ? t??p?p??e?ta? t? ?eff t?? p????????
  spin.
• (sensitive slice)
• S????t?ta Larmor ? ?o. (e GHz, p?????? MHz)
• ???a? ? s????t?ta s??t???sµ?? t?? d????.
• ??p????? µa???t??? a?/ep?d?as? t?? µa???t? ?a?
  t?? pe??st?ef?µe??? p???????? spin? epa??µ???
  d??aµ? d?e?e??e? ?a? e??s??e? t?? ta?a?t?se?? t??
  d????. O? ap?t??esµa d?µ?????e?ta? µetaßa???µe??
  µa???t??? ped?? t? ?p??? e?a?a????e? ta spin se
  s??t???sµ??e? µetaß?se?? st?? st??µe? zeeman.
• ??e????t?µa te?????? ? d??aµ??? t?? s?st?µat??
  de? e??a? pe?????sµ??? ap? t? ????? ?a????s??
  (decoherence) tmQ/??.
• ?fa?µ???? ?e??t? ?ß. S?µf???a?, ?ß. ?pt???, MRFM
  
• ? d??aµ??? s?st?µat???Hamiltonian t?? maser.
  (Jaynes-Cummings)

33
?ßa?t??? s?st?µa s??e??? µ??a????? s??t???st?
NEM ?a? ?ßa?t???? bit (qubit)

• Cooper-pair box ?pe?a????µ? s?s?e??.
• S.reservoir/ josephson junction /
  S.island
• ? ?ßa?t??? ?at?stas? t?? s?st?µat?? pe?????feta?
  ap? d?? ?atast?se?? 1gt ?a? 0gt .?? t? CP
  ?ataf???e? ?a pe??se? ap? t?? epaf? a?t?st???e?
  st?? ?at?stas? 1gt a? ??? st?? 0gt.
• S?µfas???t?ta t?? ?ßa?t???? d??aµ???? ?atast?se??
  ????aµ??? Coulomb ?a? ? e????e?a
  Josephson.
• ? e????e?a t?? d?epaf?? J? ???µ?? µetaß?se??.
• ? CPB ?a? ? µ??a????? s??t???st?? a?/ep?d?????
  d?aµ?s?? t?? ??e?t??stat???? d??aµ?? p?? ep?d??
  µe t? f??t?? t?? ???t???.
• H e????e?a CPB s?st?µat???Hamiltonian t?? maser.
  (Jaynes-Cummings)

34
S??e??? ?a??µ??a?????-?ßa?t?µ??a?????

• ?ßa?t??? ?p???es?
• ? ??s? t?? s??t???st? e?a?t?ta? ap? t?? ?at?stas?
  p?? ß??s?eta? t? ?ßa?t??? s?st?µa.
• ?? ???f?µa de???e? t? p??a??t?ta ?a ß?e?e? t? CM
  t?? s??t???st? se ??p??a ??s? ?(t).
• ?? t? CPB ß??s?eta? st?? ?ßa?t??? ?at?stas?
  (0gt1gt)/2 ? (Yp???es?) ??te ? s??t???st??
  d?µ?????e? µ?a ?at?stas? d?eµp?????
  (entanglement) µe t? qubit.
• ? ??ta
  t?? Shroedinger!?

35
S??e??? ?a??µ??a?????-?ßa?t?µ??a?????

• ???t???a ??a pe??aµat???? s?s?e???
• ?s???? s??des? qubit ?a? s??t???st?
• ? S??????? µetat?p?s? s??t???st? ?? gt??SQL
• ? ?????? as?µf???a? (decoherence) t?? s??t???st?
  ?a e??a? µet??s?µ??.
• ? ?????? as?µf???a?
  t?? ?p???es??.
• G?a ??3 ??SQL100fm,
  T100mK
• ?tf1µs
• G?a ??100nm
  ?tf10-18s!
• ? ??ta t?? Shroedinger fa??eta? ?a
  s??µat??eta? ap? ??a µ??a???? s??t???st?
  s??dedeµ??? µe ??a qubit, ?st? ?a? a? ? ap?stas?
  t?? ?atast?se?? e??a? ?p?at?µ???!!

36
NEMS st?? e?e?e???s? t?? ?ßa?t???? ??sµ??

• ?????e?s? as?e??? ?ßa?t???? d???µe??.
• ?e?t??sa? te?????? ??R, MRFM se µ???? de??µata
• ?a NEMS? ap?? ?ßa?t??? s?st?µata.
• ??e??a ?ßa?t???? s?µpe??f???? t?? ????.
• F??e?? ?ßa?t???? p????f???a?- µp????? ?a
  d?aß?s??? qubits
• ?p????? a??µa ?a? ?a ???s?µ?p??????? ?? qubits.

37
NEMS st?? e?e?e???s? t?? ?ßa?t???? ??sµ??

• ??????se??
• ?????e?s? p???????? spin.
• ?ßa?t??? ???a s?s?e???.
• ?e??t? t?? ?????? s?µf???a? ?a? as?µf???a?
  ?ßa?t???? ?atast?se??.
• ?ßa?t???? ?p?????st??.
• ????p???s? ?d??t?t?? t?? f?s?? p?? ?p?????? st?
  ?ßa?t?µ??a???? a??? ??? st? ??as??? f?s???
• ?pa?t?se?? st? ?e???a G?at? ??a µe????
  a?t??e?µe?? de µp??e? ?a ß??s?eta? se ?p???es?
  ?atast?se???

?
38
??p????µe ?t? pe???µata µe ?a??µ??a????? s?s?e???
st? ?ßa?t??? ???? ?a f?t?s??? ta s????a µeta??
t?? µ??????sµ??, p?? ??ße???ta? ap? t?
?ßa?t?µ??a???? ?a? t?? µa?????sµ?? p?? ??ße???ta?
ap? t? ??as??? µ??a????.
39
??ß?????af?a

• Putting mechanics into quantum mechanics.
  K.C.Schwab and M.L.Roukes (Phys.Today 2005)
• Quantum effects in nanodevices. D.Mozyrsky
• Nanomechanical analog of laser.
• I.Bargatin and M.Roukes (Phys. Rev. Let.
  2003)
• Entanglement and Decoherence of micromechanical
  Resonatos via coupling to a CPB. 2002
• A.D.Armour, M.P.Blencowe, K.C.Schwab
  (Phys.Rev.Let)
• Description of SET. M.Montemerlo
• Magnetic Resonance Force Microscope Locates a
  Single Electron Spin Inside a Glass Slab.
• D.Rugar, R.Budakian, H.J.Mamin and B.W.Chui (Phys
  Today 2004)
• Nanoelectromechanical systems face the future.
• M.Roukes
• R P Feynman 1960 There's plenty of room at the
  bottom American Physical Society Meeting
  (Pasadena, CA)
• ?ßa?t?µ??a???? ?,?? S.??a?a???

40

• SQUID superconducting quantum interference
  device.?pe?a????µ? ?ßa?t??? s?s?e?? pa??µßas??.
  ?pe?a????µ?? a????e?t??.20mK. ?et??e?
  ?ßa?t?sµ??e? t?µ?? µa???t???? ???? ?a? ???
  µetat?p?se??.
• MRFRmagnetic resonance force microscope
• Cooper pair ?e???? ap? ta fe?µ????a t??
  ?pe?a????? s??d???ta? se ?e?????a. ?a ?e?????a
  a?t? p?? e??a? p?a µp?????a.?? ze???? e??a?
  e?e??e?a?? p?? sta?e?? ap? ??a e.

41
SET single electron transistor

• ???s?µ?p????ta? t? fa???µe?? s??a??a? e? e??s??e?
  t? ?e?µa.
• ???1. tunnel junction.

42

• ???.1 ?ßa?t??? ??????da the larger the dot, the
  redder the light
• ???.2. Quantum Point Contact the bigger the
  opening the bigger the current. ?ßa?t?sµ???
  a????µ?t?ta

43
?ßa?t???? ?a??µ??a????? s??t???st??

• ?a??µ??a????? s??t???st??nanomechanical
  resonator
• ? ??as??? ?a? ? ?ßa?t??? pe????af? t?? µ??a?????
  s??t???st? e??a? pa??µ??a.
• G?a a??et? µ???? p??t? d???e?s?? ?? µetat?p?s?
  u(r,t) t?? s?st?µat?? µp??e? ?a pe????afe? ap?
  ap??? a?µ?????? ta?a?t?se??.
• ???a???? ?a??d?µ? ??e? 3? t??p??? ta???t?s??,
  ?p?? ? ta ?t?µa t?? ?a??d?µ??.
• ?G???????ta? t? p??t?? ?a? t? f?s? ???? t??
  ta?a?t?se?? p????? ???s? t?? ??s?? ?a? t??
  ??µ?? t?? ???e at?µ?? t?? s?s?e???!...?

44
?a??µ??a????, µ?a ??a ep?st?µ? st? ???? t?? t????
t?? µe????? ?a??µ?t???

• ??a?????s? t?? e?d?af????t?? ??a t?? µ??a?????
  s?s?e???.
• ?s???e?ta? µe t? d?µ??????a µ??a??? p??
  ap?te????ta? ap? µa???µ???a te???t?
  ?atas?e?asµ??a, ta ?p??a µp????? ?a µ?µ????? t??
  ?atas?e?ast???? d?ad??as?e? t?? f?s??, µe t? p??
  ta?? ???µ?.