NEW SENSING DEVICES

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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro
Laboratory of microsystems for bio-medical and
environmental applications

• NEW SENSING DEVICES
• FOR IMPROVING THE QUALITY OF LIFE
• Interest in FP 6 call 'Nanotechnologies and
  nanosciences, knowledge-based multifunctional
  materials and new production processes and
  devices - FP6-2004-NMP-TI-4Thematic area
  NMP-2004- 3.4.1.1
• Towards converging technologies
• - new solutions to improve the quality of life
  e.g. by helping to alleviate the effect of
  disabilities or creating new types of
  nanotransducers
• research at the frontiers of knowledge
  addressing nanoscience approaches together with
  biotechnologies and information technologies
  jointly with social, cognitive and/or
  neurosciences.

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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro

• Expertise in
• Microsystems fabrication design, simulation,
  technology, testing for chemo and biosensors
  Pressure sensors Concentration vapour sensors
  Biosensors Microelectrodes for recording neural
  activity Bulk and surface micromachining
  Polymeric sensitive layers for chemical and
  biological sensors
• Process development Wet and Electrochemical
  Anisotropic Etching of Silicon Silicon Wafer
  Bonding Double side alignment Thin layers
  deposition (Si3N4, SiON, Polysilicon, PSG, BPSG,
  CVD) Spin deposition of thin film sensitive
  polymers

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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro

• Projects examples
• Microprobe for recording/stimulation of the
  electrical activity of cells and tissues
• - Stimulating probes for many prosthetic
  applications should be able to deliver constant
  current pulses into the tissue through multiple
  sites precisely spaced on a substrate.
• - The extracellular potential recording
  permits the investigation of the central nervous
  activity
• - The compatibility between the materials used
  in the semiconductor fabrication and the human
  body was analysed.

SEM Microprobe photo
Microprobe photo with the optical microscope
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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro

• Projects examples
• Calorimetric Microsensor for Methane detection
  based on Alumina thin Film
• - Ceramics Alumina
• - Incorporated materials in Alumina Platinum,
  palladium
• - Deposition methods for thin films spinning,
  sol-gel
• - Characterisation methods X-ray, AFM, SEM
• - Applications thin layers alumina used for
  the fabrication of integrated sensors polymer
  layers with controlled film characteristics for
  Chemo sensors Detection of flammable gases
  (e.g. methane) - domestic applications, mining
  industry, chemical industry and many more.

Design and technological steps presentation for
the calorimetric sensor
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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro

• Projects examples
• Gas sensor SnO2 based, on alumina substrate
• - The rounded shape of the heating resistor
  gives an uniform temperature distribution, with
  the maximum temperature in the center of the
  circle.
• - By applying voltages on the pads, the
  resistor heats up to 400 degrees Celsius

3D Model
Full layout
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National Institute for RD in Microtechnologies -
IMT Bucharest http//www.imt.ro
Contact person for the Laboratory of
microsystems for bio-medical and environmental
applications Dr. Carmen Moldovan E-mail
cmoldovan_at_imt.ro Tel [phone] Fax 021 490
82 38 http//www.imt.ro