DP Series Springless Diaphragm Valves

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DP Series Springless Diaphragm Valves
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Why develop a new valve?

• Semiconductor industry driving for lower costs
• Availability of new technology
• Swageloks drive to help customers win

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DP Series Objectives

• Provide a 1/4 inch UHP valve for low and
  high-pressure applications
• Provide a high-performance seat
• Improve flow capabilities
• Provide integral locking handle
• Drop in replacement
• Provide a competitively priced valve

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Topics to be Discussed

• Technology
• Design tools
• Seat performance
• Valve overview
• DP specifications
• DP components
• Valve highlights

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DP Series Computer Modeling Technology
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Fully Swept Flow Path
Diaphragms
CFD Analysis
Valve inlet
Valve outlet
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Finite Element Analysis
Featured area
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Repeatable Shutoff Performance
FEA Analysis
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Finite Element Analysis
Featured area
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Diaphragm Cycle Life
FEA Analysis
Bonnet nut
Actuator button
Diaphragms
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DP Series Valve Seat Technology
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Helium Leak Test Performance
Inboard helium leak testing of the seat with 145
psig inlet pressure
1x10-7 _
1x10-8 _
(std cm3/s)
1x10-9 _
1x10-10 _
Time in seconds
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Minimum required by SEMI F1-96
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¼ in. DP Series Technical Issues

• Pressure Rating
• 145 psi / 10 barLow Pressure
• 3045 psi / 210 barHigh Pressure
• Cv
• 0.27 Low Pressure
• 0.20 High Pressure

• Dimensions
• Same O.A.L.
• HLT
• 1 x 10-9 std cm3/s
• Surface Finish
• 5 ?in Ra

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Low Pressure Internal Components
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Actuator Options
High-pressure air actuator
Low- and high- pressure locking handle
Low-pressure air actuator
Low- and high- pressure T handle
Common body, diaphragms and seat
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Locking Handle
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DP Series Valve Highlights

• Both high- and low-pressure options
• Improved seat performance
• Improved flow capabilities
• Standard locking handle option for safety
• Drop in replacement
• Competitively priced

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DP Series Springless Diaphragm Valves