??????af?a ??e?t??????? d?s

1
??????af?a ??e?t??????? d?sµ?? ??a ?atas?e??
?a??d?µ??

• 
  
  
  ?aµp???? ??????
• 
  

2
?? e??a? ??????af?a

• ??ad??as?a ap?t?p?s?? ?e?µet????? s??µ?t?? se
  ??p??a ep?f??e?a
• ??d? ??????af?a?
• ?pt???
• ??e?t??????
• a?t??e? ?
• ???t???
• colloidal
• ???se?? t?? ??????af?a?

3
?a??de??µa ??????af?a?
4
EBL - Electron Beam Lithography?a????sµ?? ?a?
?st????? a?ad??µ?

• ??e?d??e?µ??? te????? ??a e?a??et??? ?ept? s??d?a
• ?e???????a pa??µ??a µe t?? t??p? ?e?t?????a? t??
  p??t?? SEMs
• (S???s? d?sµ?? ??e?t?????? se ep?f??e?a)
• ????a ?a?a?t???st???
• µe???? a????s?
• ???s? p??????a? ?????? ?a? s?ed???
• a??? µ???d??
• a???ß? ?a? pe??p???? µ???d??
• ???? 1960 ?a? s???de?t??e ap? t?? a?a?????? t??
  PMMA

5
?fa?µ????

• ?atas?e?? µas??? ??a ?pt??? ??????af?a
• ??a?? ??a d?ast?se?? 1-2µm, ?a? ??a X ray µe
  d?ast?se?? ap? 0,25 e?? lt0,1µm
• ?µes? e???af? ??a a??pt??? p??t?t?p?? ICs
• ??e??a

6
EBL Column

• ???? ??e?t??????
• ??? ? pe??ss?te??? fa???
• Blanker
• Stigmator
• S?st?µata e??????µµ?s??
• ?????e?t?? ??e?t??????
• ????a? z pa???????? st?? d?sµ? ??e?t??????
• x ?a? y pa???????? st?? ep?f??e?a t?? ??????

7
???? ??e?t??????

• ??e?t?????? a?t???ß???a pa???eta? µe 2 t??p???
• ????s? t?? ?e?µ???as?a? t?? p???? (?e?µ??????
  fa???µe??)
• ?fa?µ??? ?s????? ??e?t????? ped???
• ??e?? ????e? pa??µet??? ??a t?? p??? e??a?
• ?? µ??e??? t??
• ? f?te???t?t? t?? (Amperes/steradcm2)
• ?????e?a t?? e?peµp?µe??? a?t???ß???a? (eV)

8
??e?t????? fa???

• ?? ?a? ?e?t??????? pa??µ??a µe t???
• ?pt????? fa???? d?af????? sta e???
• ?p????? µ??? ?a s?????????
• ? ?a?? p???t?t? t??? pe??????e? t? ????a µe??????
  ?a? t? a???µ?t??? ?????µa
• ?p?????? 2 t?p?? pa?e????se??
• Sfa?????? (?fe????ta? st?? ??s?)
• ???µat???? (?fe????ta? st?? e????e?a)
• ?a? ?? d?? e?a??st?p?????ta? µe t? µe??s? t??
• ????a? s?????s??

9
???e? s?s?e???

• ?????µatat??pe? µ?sa ap? t?? ?p??e? pe??? ?
  ??e?t?????? d?sµ?
• ??t??p? d?sµ?? ??e?t??????
• Stigmators

10
??t?d??se?? ??e?t?????? ste?e??

• ?a??? ta ??e?t????a d?e?sd???? st? resist
• ?f?sta?ta? s??das? µ????? ????a?.
• ?ta? pe??s??? ap? t? resist st? ????? t?te
• pa?at??e?ta? ?a? ?p?s??s??das?.

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S??das?

• ? eµp??s??a s??das? ??e? sa? ap?t??esµa t??
  d?e????s? t?? e????e?a? t?? ??e?t?????? ?a???
  a?t? e?s?????ta? st? ?????
• ? ?p?s??s??das? ??e? sa? ap?t??esµa ta ??e?t????a
  ?a a????ep?d???? p??? µe t? resist

12
?e?te?e???ta ??e?t????a

• ??e?t????a p?? ????? ??se? µ???? t?? e????e??
  t???
• ??e????s? t?? a????µat?? t?? d?sµ?? (10nm)

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Fa???µe?? e???t?ta?

• ?? ?a?a?? ap?t??esµa t?? d?asp????
• ??e?t?????? e??a? ?t? ? d?s? e??a?
• d?af??et??? ap? a?t? p?? ????e? t?
• e??a?e??

14
??????s?

• ?? fa???µe?? t?? e???t?ta? µp??e? ?a
• e?att??e? µe t??? e??? t??p???
• ??aµ??f?s? d?se??
• Pattern biasing
• GHOST
• ??????µµata ?/?

15
?e??ß????? e??as?a?

• ?a?a?? clean room
• ?s???
• ? ?????a p??pe? ?a e??a? µa???? ap? d??f??a
  µ??a???? µ??? a?????, µetat??pe?? ?.a.

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Resists

• ??s? e???af?? ?a? µet?d?s?? t?? e-beam
• ????µe?? se ???? d?a??t?
• High resolution low sensitive

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?atas?e?? ?pe?a????µ?? ?a??d?µ?? MgB2 µe EBL

• ? ????? ?e?µ???as?a ??a ?a??? p???t?ta? MgB2
  ?a??st? t? PMMA a?a???p?st?.
• S??d?asµ?? t?? µe??d?? a) EBL ?a? ß) ?pt????
  ??????af?a?
• ?a?as?e??
• a) CVD ?a? t?? d?? s?stat???? ap? e-gun ?a?
  ?pe?ta heater
• ß) e?ap??es? se ?p?st??µa sta?e??? ?e?µ???as?a
  ?280 oC µe ???µ? e?????s?? 1Å/sec ??a t? ? ?a?
  d?p??s?? ??a t? Mg

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?atas?e?? ?pe?a????µ?? ?a??d?µ?? MgB2 µe EBL

• ???pt?s? st??? 500 ?C ??a 5 ?ept? se atµ?sfa??a
  Ar.
• ?? ?µ???? p?? p????pte? e??a? ?e?? ?a? ??a??ste??
  µe
• ?e?µ???as?a µet?ßas?? µeta?? 30 ?a? 35 K.
• ??ap??es? t?? ?µe???? se SiN 500 nm µe LPCVD
• ?a????sµ?? ?e?µet??a? ?a? te?e??p???s?
• a)EBL
• ß)afa??es? a????pt?? MgB2 (pa?as?e?? ?a??d?µ??)
• ?)?pt??? ??????af?a
• d)????????s? t?? chip
• ?? PMMA ???s?µ?p??e?ta? ??a t?? µ??f?p???s? t??
  ?a???a??d???
• ?? ????? de? ???e? t?? ?pe?a????µe? ?d??t?t?? t??
  pa???? t?? µetaß???? ?a? d?ad??as?e? p??
  ?f?stata?

19
?atas?e?? ?pe?a????µ?? ?a??d?µ?? MgB2 µe EBL
20
??ß?????af?a

1. C.Portesi, S. Borini, G. Amato, E. Monticone,
   Journal of Applied Physics 99 (2006) 066115
2. http//www.cnf.cornell.edu/cnf_spietoc.html
3. http//www.ese.upenn.edu/microfab/PS460_04.doc
4. R.A. Laws, Applies Surface Science, 154-155,
   2000, 519-526
5. ?. ?s???a???, ?e???????a µ????s?st?µ?t??, ??µ?a?
   f?s????, S??F?, ???, ????a 2005