The Nordic Microsystem Manufacturing Cluster

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MultiMEMS MPW Design Introduction CoursePart1
Introduction
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The MultiMEMS Organisation

• Partners
• SensoNor
• SINTEF ICT
• Vestfold University College (VUC)

• Sattelite Access Centres (SAS)
• LioniXs, the Netherlands
• C2V, the Netherlands
• AML, UK
• Imego, Sweden
• FraunHofer ISIT, Germany
• MicroStencil UK

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Where is Horten ?
In Norway 90 km South of Oslo, on thewest side
of the Oslo-fjord.
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MultiMEMS MPW Design Introduction Course

• At the end of this course you should be able to
• Understand the MultiMEMS organisation.
• Understand the steps involved in MPW production
• Understand the limitations and the possibilities
  of the MultiMEMS MPW process
• Understand the main laboratory processing steps
• Use the MPW design handbook in design work
• Have an understanding of the main possibilities
  and limitations of the SensoNor foundry process
• Use the MultiMEMS system in product development

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A total MST Concept
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Traditional MST development

• MEMS development has historically been very
  research oriented.
• The manufacturing has been done using a project
  specific process in a research lab
• Very costly or impossible to transform to volume
  production

Idea
Concept feasibility
Design modelling
Test evaluation
Prototyping

• ?

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Development using an industrial MST process

• Established, documented and qualified
  (repeatable, reliable) processes developed for
  MEMS products
• Infrastructure for support from design and
  development to manufacturing
• Easy to ramp up to volume production since an
  established process is used
• An established process gives confidence in cost
  prediction

Concept feasibility
Design modelling
Test evaluation
Prototyping
Qualification in system
Trial series production
Production ramp-up
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Why Multi Project Wafer?

• Share the cost with other users!
• Access to industrial manufacturing process in a
  cost effective way
• Low-cost for prototyping compared with a custom
  run
• Can be used for low volume production
• Direct transfer to high volume production

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MPW Services

• Today several MPW (Multi Project Wafer) services
  are available from MEMS Foundries.
• The following MPW services are offered through
  Europractice
• Bulk Micromachining MPW
• MultiMEMS (SensoNor)
• Surface Micromachining MPW
• Bosch
• SOI Micromachining MPW
• MEMSOI (TRONICS Microsystems)
• MPW for diffractive optical elements
• CSEM

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MultiMEMS From Idea to Production
Idea
Design Houses SINTEF FrH-Isit LioniX Imego C2V AM
L
MPW VUCSensoNor Micro-Component
Production SensoNor MicroComponent
Test VUCSINTEFSensoNor DELTA
Concept feasibility
Design modelling
Prototyping
Qualification in system
Trial series production
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Foundry processes in MultiMEMS

• Based on SensoNors 4th generation wafer process
• High-precision membrane / spring definition
• 3-stack glass-Si-glass
• Hermetically sealed
• Buried conductor technology (patent)

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Standard Processes
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MultiMEMS MPW

• One of SensoNors standard foundry processes
• Four different chip sizes (3x3, 3x6, 6x3 and 6x6
  mm x mm)
• 10, 15 or 20 chips depending on chip size
• Design tool support
• Library of elements

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Product examples
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Design Examples from previous MPW runs

• Flow and Pressure
• Gas and Thermal
• Acceleration and Force

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Flow and Pressure
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Gas and Thermal
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Acceleration and Force
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Introduction

• End of this chapter
• Questions or comments?