Shadow Nanosphere Lithography PowerPoint PPT Presentation

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Title: Shadow Nanosphere Lithography


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ShadowNanosphereLithography
Peter J. ShinDepartment of Bioengineering
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Introduction
  • A. Kosiorek, et al., Shadow Nanosphere
    Lithography Simulation and Experiment, Nano
    Lett., 2004
  • Interested in Batch Fabrication technique for
    making biosensors (i.e. SERS substrate)
  • Wanted features include
  • - low cost manufacturing
  • - regular patterns in large area (6
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