Shadow Nanosphere Lithography

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ShadowNanosphereLithography
Peter J. ShinDepartment of Bioengineering
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Introduction

• A. Kosiorek, et al., Shadow Nanosphere
  Lithography Simulation and Experiment, Nano
  Lett., 2004

• Interested in Batch Fabrication technique for
  making biosensors (i.e. SERS substrate)

• Wanted features include
• - low cost manufacturing
• - regular patterns in large area (6