Meso Machining

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Meso Machining

• Norman Salmon
• Engineering Program Manager
• Lawrence Berkeley National Lab
• njsalmon_at_lbl.gov

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• Meso-scale machining 10 µm 1mm
• bridging the gap between silicon based MEMS
  and conventional miniature machining.

10-3 10-4
10-5
10-6 m
Critical dimensions
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Micro Milling, Drilling and Turning
Micro Stepper Motor Laminates - Produced Using
100 Micron Diameter Rotary Cutting Tools - Tech
Transfer Grant for Empire Magnetics FY2002
100 Micron Diameter Micro Electrodes Produced for
Alexander Zholents 2002 AFRD LDRD
Holes as small as 40 Microns can be drilled in
Stainless Steel - Shown is a 70 Micron Drill
compared with a Human Hair
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Micro Rotor
Micro Engine Components
1mm
Micro Turbine
1mm
1mm
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Electroplated RF Electrode
125 micron
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Meso-Machining Examples
FIB
Milling
37µm cutting tool
10µm gears on silicon
25µm channel on diamond
39µm channel on graphite
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• Micro Tooling
• tooling design
• tooling application
• materials
• Diamond tools cut by FIB
• New workpiece materials
• analysis of cutting performance
• Force sensing (MEMS)
• Acoustic emissions

10 micron End Mill
25 micron End Mill
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Long Term Vision
Micro Turning
Micro EDM
Micro Milling
Laser Cutting and Welding
LBL - MESO Machining Lab
AFM Nano- Machining
LIGA
Micro Molding Casting
FIB
Micro Wire EDM
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Micro Manipulation Stage for Lift-Out Specimen
Preparation with FIB
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Nano-Manipulator for the Molecular Foundry
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Micro Assembly Station

• MEMS Grippers
• Gripper Changer
• Nanometer resolution
• Haptic Feedback?

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Meso machine tool with in situ metrology

• High Speed 170K RPM Hydrostatic Spindle
• Sub-Micron Accuracy
• Integrated CMM Probing, Laser, and Capacitance
  Inspection

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Objectives

• Develop Leading Technology Program in Meso
  Machining, Assembly, and Metrology
• Develop Partnerships and Collaborative efforts
  that support and compliment our Technology