RTO

1
B1F
?????
????????
?????
??????
??????? (?????)
?? ????
????????
???????
????
UVO3?????
???? CVD
??????
???
????? ??
????????????? (??????)
RTO ???
???
?? ???
???
???????
5-001
???????
??? ???
???? ??? MZ50
UV?? ??
5-002
?????
??????
?????? (?????)
????
????????
????? ???? (S-4300)
??????? (RC8)
???
??
?????
??????? ????
???????
????
?????
???
????
DEEP ICP RIE
CCP RIE
?
??
???
??????? (???)
??
???
???
?????
O2
N2
Ar
2m
2
1F
?????
????????
???????
????????
????????
????
?????
???????
?????
COE/NFD???
O2 ???
???
???? ????
?? ????
ICP-RIE
H2??? (??)
?????? (SPF332H)
Ar ???
??????????? (????????)
?? ???
???????
?????
N2 ???
????????
??????
?????
?????
?????
????
?????
Miniscope ???????
?????????? ?? EVG810
???????? EVG101
?????? ????BOX ????? ?????
?????? (SPC350)
???
?? ???
??????? EVG520
???
FIB
?????
???????? (?????????) EVG620
???????????????? EVG301
????
????
???
?
??
2m
3
2F
?????
??????
?????
204
201
205
202
?????
????
203
?????
??? ???
????????????
???? ???????
?????? ???
???? ???
???? ???????
???????
?? ?????
????
??????
???????
DMFC????
???
???
??SEM
????? ????
CCD ???
?????????
??????????
?????
A
?????
??
???
C
B
???????????
???
????
??????
AFM??
??????? ???
?
????
????
????????
????
CV???
SEM?????
??
?????
???????
????
WYCO
????
ESCA
????
???????? ??????
CMP-2
???
FE-SEM
????????
????
CMP??????
?
??????
???
???????
??? ??
????????
???? ??
CMP-1 ???
??????
???? ???
??
??
2m
4
????
06.3.2??? 1F-CR