Title: Small Feature Reproducibility Educational Activities
1Small Feature ReproducibilityEducational
Activities
N. Cheung, D. Dornfeld, D. Graves, M. Lieberman,
C. Spanos SFR Workshop May 24, 2001 Berkeley, CA
2001 GOALS Second offering of cross listed
smart lab course Organize fall and spring
workshops for project participants.
2Achievements in Education
- More than 100 additional students a year get
exposed to IC technologies. - More than 20 SFR graduate students now work for
SFR companies. - 30 graduate students, 14 Professors, 5 UC
campuses supported. - New teaching lab operational, course started in
Spring 2000. - Teaching lab offered as UC Extension short
course, June, 2001. - EE143 lab has been completely refurbished, 55
students enrolled (up almost 60 since before
SFR). - Biweekly teleconferencing seminars continue with
technical talks this semester. - CMP Modeling Roadmap session at VMIC-CMP
conference in Santa Clara March 9th 2001
Established CMP modeling roadmap activity. - New freshman seminars added with semiconductor
emphasis. - First industrial short course planned for this
summer.
3SMART Equipment Lab Update
- 3 new PCs added in laboratory
- Statistical analysis of experimental data (JMP)
- Simulation of chemical vapor deposition reactor
(FLUENT) - Vacuum system simulation pumpdown, conductances,
pumping speed - Optical emission spectroscopy, quadrupole mass
spectrometry and Langmuir probe added to plasma
and vacuum systems labs.
4EE 143 Enrollment Statistics
35 Fall 98 46 in Fall 99 57 in Spring 2001
We will further enhance the training
laboratory. We will disseminate course modules to
other schools.
5Enrollment in Semiconductor Manufacturing Courses
at Berkeley 100 more students a year get
exposed to IC technologies!
SMART Lab
EE 143
Start of SFR Project
6Freshman Seminars
- One freshman seminar offered fall 2000 (ChE, UCB)
and two in spring 2001 (EECS and ChE, UCB). - Seminars emphasize semiconductor industry and
semiconductor processes. - 10 such seminars will be deployed by fall 2001 /
spring 2002, reaching 150 students across 4
campuses.
7Example of Freshman Seminar
TV with cover off - PC/disk drive - Laser
printer - Silicon run - Moores law - Liquid
crystal - Cell phones - MEMS - IC design /
fabrication sequence - super clean manufacturing
etc.
8Internships at Participating Companies
- At least five summer undergraduate positions each
year, starting in Summer 2001 - Student applications late in Fall Semester
- Advertise among 300 students taking
semiconductor manufacturing courses - Identify positions by end of January
- Select and fill positions by end of March
- Company Mentors and UC PIs coordinate exchange
- Coordinate with EECS BS/MS Internship Program
- We are always open to receive applications / job
descriptions!
92000-2003 Education Goals
- Freshman seminar program at all SFR campuses
- One seminar per faculty member per year - gt10
seminars/yr - 15 freshmen per seminar
- Related to semiconductor manufacturing and the
Department discipline - UC Extension summer offering of Equipment Lab
- First offering in Summer 2001
- Undergraduate internships at participating
companies - At least five positions, starting Summer 2001
- Seminar series with industrial speakers
- Biweekly, with emphasis on business and technology