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Small Feature Reproducibility Educational Activities

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Small Feature Reproducibility Educational Activities N. Cheung, D. Dornfeld, D. Graves, M. Lieberman, C. Spanos SFR Workshop May 24, 2001 Berkeley, CA – PowerPoint PPT presentation

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Title: Small Feature Reproducibility Educational Activities


1
Small Feature ReproducibilityEducational
Activities
N. Cheung, D. Dornfeld, D. Graves, M. Lieberman,
C. Spanos SFR Workshop May 24, 2001 Berkeley, CA
2001 GOALS Second offering of cross listed
smart lab course Organize fall and spring
workshops for project participants.
2
Achievements in Education
  • More than 100 additional students a year get
    exposed to IC technologies.
  • More than 20 SFR graduate students now work for
    SFR companies.
  • 30 graduate students, 14 Professors, 5 UC
    campuses supported.
  • New teaching lab operational, course started in
    Spring 2000.
  • Teaching lab offered as UC Extension short
    course, June, 2001.
  • EE143 lab has been completely refurbished, 55
    students enrolled (up almost 60 since before
    SFR).
  • Biweekly teleconferencing seminars continue with
    technical talks this semester.
  • CMP Modeling Roadmap session at VMIC-CMP
    conference in Santa Clara March 9th 2001
    Established CMP modeling roadmap activity.
  • New freshman seminars added with semiconductor
    emphasis.
  • First industrial short course planned for this
    summer.

3
SMART Equipment Lab Update
  • 3 new PCs added in laboratory
  • Statistical analysis of experimental data (JMP)
  • Simulation of chemical vapor deposition reactor
    (FLUENT)
  • Vacuum system simulation pumpdown, conductances,
    pumping speed
  • Optical emission spectroscopy, quadrupole mass
    spectrometry and Langmuir probe added to plasma
    and vacuum systems labs.

4
EE 143 Enrollment Statistics
35 Fall 98 46 in Fall 99 57 in Spring 2001
We will further enhance the training
laboratory. We will disseminate course modules to
other schools.
5
Enrollment in Semiconductor Manufacturing Courses
at Berkeley 100 more students a year get
exposed to IC technologies!
SMART Lab
EE 143
Start of SFR Project
6
Freshman Seminars
  • One freshman seminar offered fall 2000 (ChE, UCB)
    and two in spring 2001 (EECS and ChE, UCB).
  • Seminars emphasize semiconductor industry and
    semiconductor processes.
  • 10 such seminars will be deployed by fall 2001 /
    spring 2002, reaching 150 students across 4
    campuses.

7
Example of Freshman Seminar
TV with cover off - PC/disk drive - Laser
printer - Silicon run - Moores law - Liquid
crystal - Cell phones - MEMS - IC design /
fabrication sequence - super clean manufacturing
etc.
8
Internships at Participating Companies
  • At least five summer undergraduate positions each
    year, starting in Summer 2001
  • Student applications late in Fall Semester
  • Advertise among 300 students taking
    semiconductor manufacturing courses
  • Identify positions by end of January
  • Select and fill positions by end of March
  • Company Mentors and UC PIs coordinate exchange
  • Coordinate with EECS BS/MS Internship Program
  • We are always open to receive applications / job
    descriptions!

9
2000-2003 Education Goals
  • Freshman seminar program at all SFR campuses
  • One seminar per faculty member per year - gt10
    seminars/yr
  • 15 freshmen per seminar
  • Related to semiconductor manufacturing and the
    Department discipline
  • UC Extension summer offering of Equipment Lab
  • First offering in Summer 2001
  • Undergraduate internships at participating
    companies
  • At least five positions, starting Summer 2001
  • Seminar series with industrial speakers
  • Biweekly, with emphasis on business and technology
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