SiC????????????? ??

1
SiC?????????????????

• 2004? 3? 9?
• ??????? ?? ??,?? ??,
• ?? ??,?? ??,
• ?? ???
• ???? ?? ??,?? ?,
• ?? ??
• KEK ?? ??

2
? ?

• 1.?????
• 2.SiC????
• 3.SiC study??????
• 4.???
• 5.???
• 6.?????
• 7.??????

3
1.?????
??????
???????
??????
4

• ??????????????????????,???????????????????????
• ????
• ??? ?
• RD42 Diamond Detector
• RD50 4H-SiC?

5
2.SiC???? ????????
? ? / ? ? Si GaAs 3C-SiC 6H-SiC 4H-SiC GaN Diamond
???????(eV) 1.12 1.43 2.3 2.86 3.02 3.39 5.47
?????(?2/Vs) 1500 8500 800 460 700 900 1800
??????(MV/?) 0.3 0.4 4 3 3.5 2 4
??????(107?/s) 1 2 2.7 2 2.7 2.7 2.5
????(W/???) 1.51 0.54 3.2 4.9 4.9 1.3 20.9
???? 11.9 12.91 9.72 10.03c 10.03c 10.4c 5.93
Johnson??(?????) 1.0 7.1 1296 400 992 324 1100
Key??(???????) 1.0 0.53 3.9 5.2 6.1 1.5 31
????Johnson?? 1.0 2.5 2750 1360 3370 280 15000
(?)Johnson?? (????????????)2 Key??
????(??????/???)1/2
6
SiC(vs Si)

• ????(bandgap)
• 23?
• ??????
• 1????
• ??????
• 2?
• ????
• 3?
• ???????
• 500-600?(Si150????)
• ?????
• (MOSFET?12??????????)

7
Polytype(????)

• 200????
• nH-SiC (hexagonal???)
• nR-SiC (rhombohedral????)
• 3C-SiC (Cubic???)

?
8
3.SiC Study??????

• 2001??
• ????????? 3mmF
• ??????a??????
• 2002??
• ????????????
• ????
• UV-LED(375nm3.31eV)????????
• 2003??
• ?????(???ß?)???

9
Sample(SiC detector)made in ??(??)

• p(epi)/p(substrate)
• CREE?????
• 6H-SiC
• ?????
• P???
• 11019(3.31018)/cm3
• ??
• Al(???????)

??????
???
150200nm
70nm
150nm
epi
5µm
6H-SiC
bulk
??????
??????
??????
10
????
Wire Bonding
PN-SiC?????
300µmF
Pad
150nm
SiO2
SiCn
5µm
SiC p
300µm
SiC p
Si PIN ????????
Al

• ?????????????? ?????(8?)
• ?????? 0.0707mm2

• S3071(?????????)
• ?????? 19.6mm2

11
Photograph of Sample
??(??????????)
2cm
??(????)
1cm
300 µm
12
4.??? I-V??
????nA
????? V
???????????? ???????? ????SiC???????
SiC
Si
13
I-V ??
14
C-V??,??????
C-V??
102 10 1
SiC n
???
SiC p
??pF
SiC p
1 10 100
????? V
????-V??
102 10 1
???? µm
Si PIN ???????? 26122
PN-SiC????? 0.34
????um
1 10 100
????? V
15
????????? C-V ??
???
???
16
5.??? LED ??
Diffusion?????? P Bulk????
17
P11

• a(4.4MeV)
• No Damage
• 150 Mrad Gamma

18
P11

• a(2MeV)
• No Damage
• 150 Mrad Gamma

Sensitive Area???(5µm)??
19
6.????? ????????
_at_???????????

• ??(??)??
• ß(??)?2MeV
• 1.01013, 1.01014, 1.01015 e/cm-2
• ?????1.173, 1.333MeV (?? 60Co)
• 1.3, 6.3, 15.2, 29.1, 43.1, 150.4 Mrad

????? ??????? Access?????
20
I-V??(??????)
?ß?
???
????????
Si?
102 101 1 10-1 10-2 10-3
102 101 1 10-1 10-2 10-3
0 20 40 60 100 200
0 20 40 60 100 200
SiC?
102 101 1 10-1 10-2 10-3
102 101 1 10-1 10-2 10-3
????nA
0 20 40 60 100 200
0 20 40 60 100 200
????? V
21
Si
SiC
SiC
22
7. ??????

• ?????????????????????????.
• ??????????SiC???????????.
• SiC???Si??????????????.
• ????????????????????????.???????epi-???????????
• ?? MIP Detection