[e-mail]

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• ???
• zjqiu_at_fudan.edu.cn
• ???????435?

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??? ?? ??? ???? ??? ?????????? ???
?? ??? ??? ??? ??? ???
???? ??? ???? ??? ?? ???
??????? ???? ???????
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???????? ????????
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???(?) ????(?) ??????(?)1/3?????? ??(throughput)
(?) ????(?)
?????
35??????????
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????
????
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?????
CAD?????????????????????
1?????
?????????
????
4?5?????
?????
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• 4?5?????? ?????????
• ????????
• ??(pellicle)????????

?????
???
1015nmARC(anti-reflection coating)
80nmCr
???????
????(???) ????
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(No Transcript)
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???Y
D0???????, Ac ????, N ?????
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???????????
???
???
???
11????
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???????????
11????
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???????????
???????
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DSW-direct step on wafer
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????
???????????(Fresnel) ???????,?????????
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??????
Fresnel???????????
??????
g10 mm, ?365 nm(i?)?, Wmin?2 mm
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???????(Fraunhofer) ???????,???????????
???
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???????????????
???
??S1??????????????S2???? ??(??????)????,????????
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?????????20?m ???100 ?m
???????????(????)
???
n
k10.6-0.8
????? NA?,??,k1?
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???

• ????
• ???(resolution)
• ??(depth of focus)
• ??(field of view)
• ??????(MTFmodulation transfer function)
• ????(alignment accuracy)
• ??(throughput)

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??
????????????????????????
? ???,
??
NA?,??? ?
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??
???
???
IC???,????1mm,????
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??????MTF--???
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????MTFgt0.5 ?????
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MTF????????S
S??,??????
??S0.5-0.7
????s ?????d
?
S
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???????????,???/mm
?????1/(2W), W??????????,2W?Pitch
?????????,??01/W01/R NA/0.61? (????)
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???????????MTF0.4????,???????NA0.35,?436
nm(g-line),S0.5???????????????????i????? ??????
??S0.5 ,MTF0.4,????0.52?0? ?436
nm?,?0NA/0.61?0.35/(0.610.436)
1.32/mm ??????mm?0.684?(?0.52?0
) ???????????0.73 mm?pitch1.46 mm ??365
nm(i-line),?????????0.61 mm? DOFg-line3.56 mm,
DOFi-line2.98 mm(??k21)
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???
?????????????????,????,????????? ??????????????
???mJ/cm2
??????? ?????????
??????????
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??436nm (g?)?365nm (i?)?????? (??-positive
photoresist, DNQ)

• a) ???? ???????????? (novolac, a polymer)
• ???????,?????15 nm/s?
• b)????(PAC-photoactive compounds)
• ??? (diazoquinone, DQ)
• DQ??????,?????????????? 1-2 nm/sec
• ???,DQ????????,???????????(TMAH????????????)
• ???,??????????????100-200nm/s
• c)?? ???????????????????,???????????

??????? PAC11
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?? (Negative Optical Photoresist)

• ?VLSI???????2 mm??,????????????
  ???????????,????????????
• ?????????????,???????
• ?????????
• ??????
• ?????,???
• ??????? (??????????)
• ???? (????????)

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??????? a) ?????????? (cyclized synthetic
rubber risin) ??????,?????????????????? b) ????
PAC ???? (bis-arylazide)
????,???????????,??????????????? c)????????
(aromatic)
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DUV??????
??DNQ???? 1???lti????????? 2????DUV????????i??g?,?
?????? 3?????????(???1,??0.3)
???????PAG????,?????,?????????,?????????,????????
??
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DUV??????????
?????
?????
??
INSOL
INSOL
INSOL
INSOL
????? (PEB)
PAG
?
?????
?????
SOL
SOL
SOL
INSOL
?
?
?
?
???????????????,PEB ???????????
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????? ??????? ???,???,???
???????
???????????
???(????)???????MTF?????S
?????/?? ?????? i?/g?(PAC) DUV(PAG)
??/???(????)????