Definitions

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  ??????????????????30???,????????????????????,?????
  ??????????????????????????????????????????????????
  ???????

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Definitions
Microscope - A device with a lens or series of
lenses that enlarge (magnify) the appearance of
an object. Does not apply to SEM.
Image - Perception of an object using your eyes
(vision). One can sense an object without vision
(touch, etc..). Requires visible light.
Lens - A lens is an optical component which is
used to focus beams of radiation. Lenses for
light are usually made of a glassy material,
whereas non-uniform electromagnetic fields are
used as lens for electrons.
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Lenses Curved glass or mirror for Visible
light Concave surface of metal (e.g. satellite
dish) Radio waves Concave mirror or Fresnel
lens Heat Solenoid (electromagnetic fields that
can be varied) Subatomic particles (electrons,
protons, positrons)
convex
concave
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Magnification - The ratio between image size to
the object size. Can be varied by changing the
distance between the object and the final lens
(of the eye) or by inserting a second lens
between the two.

Resolution - The point at which two or more
objects can be distinguished as separate.
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History First record of using glass lens for
magnification was by an Arabian from what is now
known as Iran, Alhazen, in the 10 and 11th
century. He contradicted Ptolemy's and Euclid's
theory of vision that objects are seen by rays of
light emanating from the eyes according to him
the rays originate in the object of vision and
not in the eye. Because of his extensive research
on vision, he has been considered by many as the
father of modern optics.

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15th century on - Studies done with glass
magnifiers to study objects in detail mostly as a
curiosity by non-scientists - Antonie van
Leeuwenhoek (linen draper) described three shapes
of bacterial cells using his simple, single lens
microscope (glass bead in metal holder).
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By mid-19th century, became evident that
theoretical limits of light were reached. Above
magnification of 1500, resolution lost. Image
was larger, but blurred (empty magnification). In
1870, Ernst Abbe derived mathematical expression
for resolution of microscope Resolution is
limited to approx. 1/2 the wavelength of
illuminating source.
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Wavelength - distance between peaks of the
waveform
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Blue light has a wavelength of 0.47
um Resolution max - 0.2 um (200 nm) Cannot go
beyond this even with better optics. Solution?
Use illumination of shorter wavelength
Antone de Broglie (1924) Theory of wave nature
of electrons Hermann Busch (1924) axial magnetic
fields refract electrons Electron optics
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• 1935 - Max Knoll demonstrates the theory of the
  scanning electron microscope

1938 - First scanning electron microscope
produced by von Ardenne
von Ardenne
Knoll and Ruska 1986 Nobel Prize winners
1939 - Ruska and von Borries, working for Siemens
produce the first commercially available EM
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• 1939 - First EM built in North America by James
  Hillier and Albert Prebus at the University of
  Toronto

Dr. Ladd
Dr. Prebus
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Light vs Electron Microscope
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?????????

• ????????,???????????????????????????????????,?????
  ?????????,???????,??????,???????????????,?????????
  ????????????????????Airy????5-1???

16
?????

• ??????Airy??????84????????,??????????????????????
  ??,????????,??????????????Airy????????????????????
  ????,??????????Airy???R0?????
• (5-1)
• ?????Airy???????Airy????,?????????????(?r0)???????
  ??????,??????(??????)???5-1?
• ? (5-2)
• ??????,?nsina?????(n1.5,a70-75),?(5-2)???

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??????

• ????,?????????????????????????????????????????????
  ???390nm,????????????????200nm?
• ?????????????0.2mm,??????????????0.2µm??0.2µm???0.
  2mm????????????1000????????????????????????????0.2
  µm?,????????1000??
• ????????????????,??,???????????????,??????????????
  ?????????????????1000-1500???

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???????????

• ???(5-3),???????????,?????????????
• ??????????????,???????13-390nm??,?????????????????
  ???????,??????????????
• ??????X?????,???????????X???????????????????,?????
  ??X??????????X????????????????
• ???????,?????,??????????,?????????????????????????
  ????,??????????

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????

• ??????(de Broglie)???,?????????????,??????????????
  ???????????????????????,?
• (5-4)
• ??,h??????h6.62610-34J.sm?????v???????,??????
  U????????
• ? (5-5)
• ??e???????,e1.610-19C?
• ?(5-5)??(5-4)????
• (5-6)

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?????????????

• ????U/KV ??????/nm ????U/KV ??????/nm

20 40 60 80 100 0.00859 0.00601 0.00487 0.00418 0.00371 120 160 200 500 1000 0.00334 0.00285 0.00251 0.00142 0.00087
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• ????????,????????????????????????????????????,????
  ?????????,?????????????????????????????????????
  ????????????

22
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• ?????????,????????,???????????????????????(??????)
  ,??????????????????,??????????????????????????????
  ????(?5-2)???????????????????????????????????????

23
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• ????????,???????????????????,??????????????(????)?
  ???????????
• ?5-3???????????????????,????????????????,?????,???
  ????????????????,?????????,????????,?????????????
  ????????????????

24
????

• ????????????????????????????????????????????,?????
  ?????????(??????)??????????????(??5-4)?

25
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• ??????????????,?????????????????,??????,??????????
  ?????????????????,????????????????????(??5-5??),??
  ??????????????????????????????????????????

26
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• 
  

27
??????

• ???????,??L1???L2???f??????????
• (5-8)
• ?????????????(5-8)??????,?????????????,???????????
  ????????f????????
• (5-9)
• ???K??,Ur??????????????,(IN)????????????
• ??(5-9)????,??????????????????????????????????,???
  ???????????,??????

28
????????????????

• ??(5-3)?????????????????????????,?????????????????
  ?????H-800??????,???????200KV,??????????,?????????
  ?0.00125nm???H-800??????????0.45nm,?????????360??
  
• ???????????????????????????,??????????????,???????
  ????????????,??????????????????????????????????

29
????

• ??????????????????????????????????????
• ???????????,????????????????rS??????????rS??????,
  ?????
• (5-10)

• ???????????????????,??????????????????????????????
  ??

30
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• ??????????????????????????????????????????????????
  ??????????????????????????????
• ?RA???????????????rA?????,??rA???????,??????
• (5-11)

• ??????????,???????????????????????????????????????
  ????

31
????

• ?????????????????,??????????????????????????????
• ??????RC????RC???????,??????rC???????rC??????
• (5-12)

• ??????????????,??????????,???????????????????????
  ????,???????????,???????

32
?????????????????

• ???(5-2)?(5-10),????????a?????????????????????????
  ?
• ??????a????????r0,????????rS??????????????????????
  ?rS?r0,????????????a??(10-2-10-3rad),?
  
• (5-13)
• ???rS?r0, ?
• ??? (5-14)
• ?????(5-13), (5-15)
• ???(5-15)?(5-16),????????a???10-2-10-3rad????????
  ??????0.1nm???

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??

• ?????????????,?????(????),???????????,????????????
  ??
• ?????O??,???????O??????????O?,?????????????????
  ??A??,?????O??????A?,?????????,????O???????????
  ?????????????????????????????,???????R0???????????
  ?????r0,??????????????
• ???AB??????????Df?
• ??5-9?????????????????
• (5-16)

34
??

• ??????????(????),???????????,???????????????
• ?????O??,???????O??????????O?,?????????????????
  ?????,????????????????????????????R0(?????????????
  ?r0),??????????????????????????????DL??5-10??????
  

35
???????

• ?5-11???????????
• ?????????????????????????????????????,????????????
  ???????

36
???????

• ?5-12??????????????????????????????????????,??????
  ?????????????????????

37
????

• ?????????????????
• ??????????????
• ????????????????????????????????????
• ??????????????????????????????????????

38
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• ????????????????
• ????????????,??????????????????,
• ?5-13(a)??????????,????????????????????
• ?5-13(b)???????????????????????,???????????,??
  ??????????????????????????

39
??

40
???

• ????????????????,??????????,??????????????????????
  ?????,??5-14??????????????,??????1050???,????????
  ??????15µm????????????,????????2???????????????2
  10µm????????

41
???????
42
????

• ????????????????????
• (?)??
• ??????????????????????????????????????????????????
  ???????????????????????????????????????,??????????
  ???????,???????
• ??????????????,????????,???100-300????,???????
  ?????0.1nm???

43
??

• ??????????????????????????,????????????????,?????
  ?????
• ?????????,???????????????????????????????,????????
  ,????????????
• ??,??????????????,??????????????,?????????????????
  ?
• ??????????????,?????????????????,(???L1??)????
  ??????????????,?????????????(?f ? L2)????????

44
(?)???

• ?????????????????,??0-20???????Mgt1?,????????????M
  lt1?,?????????????????,????????????????????????
• ???????????????????,?????????????,??????????????,?
  ?5-15(a)??????????????????????,????????????????,??
  ??????????????,??5-15(b)???

45
(?)???

• ??????????????(???)??(??????)?????,????????,??????
  ,???????????????????????????????????????????(?10-3
  rad),??????????????????????????,????????????????,?
  ?????????????,????????????????,???????????????????
  ??,??,???????????????

46
????

• ????????????5?????,???????????,????????????,??????
  ????????

47
???????

• ?????????????????,????????????????????????????????
  ?,???????????????????????????,??????????????????,?
  ????????

48
?????????---???

• ???????????,??????????????,???????????????????????
  ??????????????????,?????????,????????????,?????3mm
  ????

49
??????
50
?????????---????

• ???????????,?????????????????????????????????????,
  ???????????,??????????????????????????????????????
  ??????????

51
?????????---??

• ?????????????????????,???????????????,????????????
  ??????????????????????,????????????????????(????)?
  ??

52
(?)???????

• ?????????????????????(?5-19),???,?????????????????
  ,???????????????(??????????)?
• ?????????????????????????,???????????????????????2
  0400µm????????,??????????200300µm,???????,??????
  ????

53
(?)????

• ???????????,??????????????
• ???????????20120µm???
• ?????????????????????(????)??????????,??????????,?
  ?????????????????????????,????????,????????,??????
  ??????????????????????????,?????,????????????
• ??????????????????????????(????)??,???????????????
  ????????,?????????????????

54
(?)????

• ????????????????
• ??????????????,???????????,????????????????
• ???????????????????????????????,??????????????????
  ????????????,??????????,??,???????????????????????
  ?????????????????????????????????????????????50?,?
  ??????50µm??????????????1µm????
• ??????????????????,????????????20400µm????,??????
  ????????????????,????????????

55
??????????

• ?1934???????????????,70???????????????????????????
  ??
• ???????????????
• ????????????
• ??????????????????????????????

56
?????

• ?????????????????????,????????????????????????????
  ??????????????????????????(????X?????)??????
• ????????????,???????????????????(TEM)??????????(Di
  ff),???????????????(???EDS????????EELS)???????(???
  ??SED???????BED)??????(STEM)?

57
?????

• ???????????????????,??????????????????????????????
  ???????????????,???????????????????
• ?????????????????????????????????????,????????????
  ?????????????(??)??????

58
??????????

• ??????????????????????????????,???????????????????
  ?????????????????????????

59
??????????
60
??????????
61
?????
62
??????????

• ???????????????????????????200KV?????????????0.2nm
  ,1000KV?????????????0.1nm?
• ?????????????????????????????,???????????????????
  ?????,?80KV?100KV?120KV?200KV?300KV??1000KV??????
  ????????????,?????????????,???LaB6????,???????????
  ??

63
??????????

• ???????????????????????????????,??????????????????
  ?????????,????????????????????????????(HREM)?
• ???????????????????,????????????????????,????????

64
????????

• ??????????????????????????????????????????????????
  ????????,?????????,???????
• ???????????????????????,?????????,??????????????CC
  D???????????????????,???????(??)??????????,???????
  ?,??????????????????

65
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• ??????????????????????(?????)?????a?????????????
• ???????????????????????????????????????????????
  ???????????
• ????????????????????
• ????a??,???????????????

66
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• ???????????????????????????????
• ???????????????,?????????????????????????????????
  ????????,??????????????????????????,????????

67
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• ??????????????????,??????????????????????????????
  ?????????????????????????????
• ???????????????????????????
• ????????????????????????????????????