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• ???
• zjqiu_at_fudan.edu.cn
• ???????435?

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??? ?? ??? ???? ??? ?????????? ???
?? ??? ??? ??? ??? ???
???? ??? ???? ??? ?? ???
??????? ???? ???????
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????????,?????????????
Deposition

• ?????Si
• ????SiO2,Si3N4, BPSG,
• ????Al,Cu,W,Ti,

????Si, SiGe(??) ????poly-Si
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1)?????? Chemical Vapor Deposition
(CVD) ??????????,????????,???????????,????????????
???? ??APCVD, LPCVD, PECVD, HDPCVD 2)??????
Physical Vapor Deposition (PVD) ???????????????,??
??????????(?)???,?????????? ????
evaporation,??sputtering
?????????
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??CVD?PVD?,?????????
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???????
?????????????????,???????
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????????
CMOS?????????????????
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Chemical Vapor Deposition (CVD)
Courtesy Johan Pejnefors, 2001
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??????

• ????,???,????????
• ?????(?????????)????
• 3. ??????(conformal coverage ????)
• ????
• ????
  

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??????(CVD)

• ?? (??)??????(???)??
• ???????????
• ????????(APCVD),??CVD (LPCVD),????????(PECVD)?

CVD?????????????

• ??????,??????????????
• ??????,???????????
• ????????????????

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???????????
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????? ??????????,?????????????????????????????????
???????? ????,??? ?SiO2?????
F1???????????? F2??????????????????????
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hG ???????(cm/sec)
ks ?????????(cm/sec) ???,???????????????
??
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?
?? Y ???????????????, CG??cm3???????,??CT??????cm3
???????
PG ?????????,PG1, PG1 PG2 PG3..????????????
?????
N????????????????????N?51022 cm-3
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Y???, v ?hG?ks?????? 1???hGgtgtks,?CsCG,???????????
?? ? 2???hGltltks,?CS0,?????????? ?
??????,??????
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??????????

• T?ks????hG???,??
• hGltltks?????????????
• hGgtgtks?????????????

???Ea1.6 eV
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??????(1 atm,APCVD)
??????????????,???????????????,???????????????????
??????????,????????? ???????????,???????,????????
???
hG ???
Ea ???
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???????,???????,hG???,?????????????????,??????????
??????????

• ??????
• ks ????? ???????
• hG ????? ?????????????

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?????????????????,????????????????
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????????s?x??????????
?????? ?????? U?????
a. ??x???,?s(x)??,hG??????????????,???????? b.
??????????????, ???????????
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??,?????????s(x)?x???? ?????????,???????????,????
?????,?????s(x)?x???hG?????????hG?????????????????
??????????????????????????????,?APCVD?????
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???????????
??????????,???????HCl?????????,??????????????????
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?????????????????
???????BH3/B2H6,PH3/AsH3
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Two different modes of epitaxy

• Non-selective epitaxial growth (NSEG)

Selective epitaxial growth (SEG)
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• APCVD????????(throughput)
• ???????????
• ?????????

??????Ea???
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???????? (LPCVD)
?????????
??????????hG??? ??????1 torr?,DG????760?,?ds????7?
,??hG????100??????????????????
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? ???????
?????
r????????

• ???????,???????????????????
• ????,???????????,???????????
• ??,???????????
• ??????,??????????,?????????
• ????????,??????????,??,??????
• ??????,?????????APCVD?????

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(No Transcript)
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• ???? ??????????(100-200)
• ???????,????????????????????????
• ??????????????,??????525 ?C,?????

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LPCVD??????

• Batch processing??100-200?
• ????????
• ??????????????
• ???????
• ??????
• ?????
• ?????
• ?????

??,???????,???????????????Al????????? ?????????
?????? PECVD
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??????? LPCVD,??????,??600-650
????,?????????,??????(overall reaction)???SiH4?Si
(??)2H2

• ??575 ??????????????(amorphous Si)
• ??600 ????????,????????(column structure)
• ??????(gt600 ?)???,???(crystallization)
• ?????????????,?????(grain growth)?

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• ??????
• ?????
• ????
• ????????????(??????,in situ),???????

• ??????
• ??????9001000 ??????????
• ?????????????????(111)?(100)??????????
• ???????????????(????)?????????

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625 ?C LPCVD????TEM??
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???????- ??- ??- ????- ?????

• ????????????????
• ?????????(????)?????

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???????? ?????????????
????????
???????
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????????
1)??CVD(250450?C)
P2O5?SiO2?????????? ???,????? ?????????????????
???????APCVD,LPCVD,PECVD
??????,?PH3,??PSG????
???PECVD
?????,??????,??????????,??????
?HD-PECVD??????(120 ?C)????????
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2)??LPCVD(680730?C)
TEOS(?????)?????
(1)?????Al??(????) (2)??????,??????,SiO2????? (3)?
?PH3????PSG
TEOS????PECVD????(250425 ?C) ??????,???????
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????(??? conformality)
1????????????????
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PSG????????????? PSG???????PSG??????1000 - 1100
?C,?PSG????,??????
??68 wt P
BPSG???????????
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???????
???(??)????????SiO2????Si3N4?????
???????????????????
???????????????????????????1)????????????????????
2)???????????3)??????4)??????
???CVD??????????
CVD????????????????????????
???????? ???????????,????